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Molecular Layer Deposition of Hybrid Organic-Inorganic Polymer Films with Tunable Mechanical Properties

Molecular Layer Deposition of Hybrid Organic-Inorganic Polymer Films with Tunable Mechanical Properties
具有可调机械性能的杂化有机-无机聚合物薄膜的分子层沉积
批准号:
1012116
负责人:
Steven George
金额:
$48.0万
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
2010
资助国家:
美国
项目状态:
已结题
起止时间:
2010-12-01 至 2013-11-30

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英文摘要
In this project funded by the Macromolecular, Supramolecular and Nanochemistry Program of the Chemistry Division, Steven George of the University of Colorado at Boulder will develop new surface chemistries for depositing hybrid organic-inorganic films using molecular layer deposition (MLD) techniques. The goal is to fabricate functional films with tunable mechanical, electrical, chemical, dielectric, optical and thermal properties to enable the construction of thin film devices. Targeted properties include: high cross-linking between polymer chains in the film for high toughness and high critical strain and compressibility for flexibility and volume expansion tolerance. The broader impacts involve student training and development, collaborations with companies interested in using hybrid organic-inorganic MLD films in future products, and communicating the excitement of science to elementary school students via the University of Colorado Wizard Program. This work will develop new way to make technologically important thin films with customizable mechanical properties. These films could impact technologies that use protective and barrier layers, flexible and conductive films, and compliant and functional coatings.
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Fundamental Issues for Thermal Atomic Layer Etching
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  • 资助金额:
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  • 项目类别:
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  • 项目类别:
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  • 财政年份:
    2004
  • 负责人:
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