Nanoelectromechanical uncooled infrared sensor using epitaxial graphene

采用外延石墨烯的纳米机电非制冷红外传感器本研究的目标是利用碳化硅上外延少层石墨烯薄膜的特殊材料特性，研制一种高灵敏度的非制冷红外传感器，该传感器使用聚合物/外延几层石墨烯(FLG)复合薄膜作为新型传感元件。该方法的基础是：(I)通过建模和有限元模拟设计聚合物/Flg传感器；(Ii)在掺杂的6H-SiC衬底上生长Flg薄膜；(Iii)聚合物/Flg传感器层的制备和表征；以及(Iv)用于红外探测的传感器的评价。智能价值：拟议研究的成功将导致开发一种新型的非制冷和廉价的红外传感器，其性能远远超过非制冷红外传感器的最先进性能，可与使用低温冷却的红外传感器相媲美。该传感器将提供非常高的灵敏度和非常短的响应时间，解决了其他非制冷红外传感器的关键限制，这些传感器受到高噪声底板、高热时间常数和对光学转换的依赖。利用衬底选通的高灵敏偏转换能法也可以促进基于悬浮石墨烯的下一代纳米机电器件的发展。更广泛的影响：该项目预计将在国防、国土安全、天文学、执法和环境监测等领域产生广泛的技术影响。在教育和外展活动方面，PIs每年将有一名本科生和一名高中生参与他们的研究，确保有一名少数族裔学生参与。私人投资促进机构还将开发研究生课程，并通过参加会议和利用个别研究小组和部门网站传播研究成果。

Nanoelectromechanical uncooled infrared sensor using epitaxial grapheneThe objective of this research is to develop a highly sensitive uncooled Infrared (IR) sensor using polymer/epitaxial few layer graphene (FLG) composite film as a novel sensing element, utilizing the extraordinary material properties of epitaxial FLG films on SiC. The approach is based on: (i) Designing polymer/FLG sensor through modeling and finite element simulations, (ii) Growing FLG films on doped 6H-SiC substrate, (iii) Fabrication and characterization of the polymer/FLG sensor layer, and (iv) Evaluation of the sensor for IR detection. Intellectual Merit: Success of the proposed research will lead to the development of a novel uncooled and inexpensive IR sensor that can far exceed the state-of-the-art performance of uncooled IR sensors, and rival those utilizing cryogenic cooling. The sensor would offer very high sensitivity along with very short response time, addressing the critical limitations of other uncooled IR sensors that suffer from high noise floor, high thermal time constant, and dependence on optical transduction. The highly sensitive deflection transduction method utilizing substrate gating, can also foster the development of next generation nanoelectromechanical devices based on suspended graphene. Broader Impacts: The project is expected to have broad technological impacts in the areas of defense, homeland security, astronomy, law enforcement, and environmental monitoring. For educational and outreach activities, the PIs would involve one undergraduate and one high school student every year in their research, ensuring one minority student participation. The PIs would also develop a graduate course, and disseminate research results through conference participation, and utilizing individual research group, and departmental websites.