EAGER: Piezoelectric Energy Scavenging Schemes for Hybrid Integrated Systems

EAGER：用于混合集成系统的压电能量清除方案目标：本提案的目的是设计和制造一种集成的封装装置，用于气体和/或液体环境中的传感应用。智力优势：探索性的方法是关注具有不同热膨胀系数的双晶光束，在锆钛酸铅（PZT）上进行实验，并在微机电系统（MEMS）型器件上进行演示。当输出电压驱动低功率电子器件时，PZT作为单层压电材料可以在能量收集应用中得到优化。首先，它可以通过缓解压力来产生可再生能源。此外，通过改变PZT中的Zr/Ti成分，它可以对温度敏感，从而用于热释电传感器。因此，这些器件可以随着温度变化产生小电压，并能够驱动后处理电子器件。面临的挑战包括限制这种电压波动，确定最佳组合的材料，并尽量减少驱动电子设备。所制备的器件结构将用于能量收集，并成为适合MEMS器件的重要性能材料。成功完成将使基于mems的子系统的整体灵敏度得到提高。通过协调压电和热释电效应，这里描述的方法可以提供许多应用，包括生物传感。最终，预计本次调查中样品的机械性能的电气测量将为集成设备的建模提供一个平台。更广泛的影响：首席研究员将把这个研究课题纳入？每个导师一个教育项目，包括研究生在学年期间作为专家课堂访问者，在夏季为年轻学者和高中教师提供导师，这是她与北卡罗来纳州立大学的北卡罗来纳州科学之家合作开发的。研究者特别努力的目标是增加妇女和代表性不足的学生在科学和工程领域的参与。

EAGER: Piezoelectric Energy Scavenging Schemes for Hybrid Integrated SystemsObjective: The objective of this proposal is to design and fabricate an integrated encapsulated device for sensing in gaseous and/or liquid environments applications.Intellectual Merit: The exploratory approach is to focus on bimorphic beams with different thermal expansion coefficients, experiment with lead zirconate titanate (PZT), and demonstration on a micro electromechanical systems (MEMS) type device. PZT used as a single layer piezoelectric material can be optimized in energy harvesting applications when the output voltage drives low power electronics. Primarily it can be implemented for generating renewable energy by stress relief. In addition by changing the Zr/Ti composition in PZT it can be temperature sensitive and in turn be used in pyroelectric sensors.Thereby these devices can develop a small voltage with temperature change and able to drive post processing electronics. The challenges consist on the limitations of this voltage swing, identification of the materials for the optimum combination, and to minimize the driving electronics. The fabricated device structure will be used for energy harvesting and into important properties of materials suitable for MEMS devices.Successful completion will permit the overall sensitivity of the MEMS-based subsystem to improve. By coordinating both piezo and pyroelectric effects, the approach described here could offer many applications including bio-sensing. Eventually it is expected that the electrical measurements with themechanical properties of the samples from this investigation will provide a platform for modeling the integrated device.Broader Impact: The principal investigator will incorporate this research topic within the ?Each One Mentor one education program involving graduate students as Expert Classroom Visitors during the academic year and mentors during the summer for young scholars and high school teachers that she hasdeveloped in collaboration with the NC Science House at NC State University. The investigator special efforts are targeted to increase the participation of women and underrepresented students in the science and engineering fields.