MRI: Acquisition of Electron-Beam Lithography System for Nanofabrication and Processing

MRI：收购的电子束光刻系统的纳米fabbelling和加工研究目标和方法：本研究的目的是获得一个国家的最先进的电子束光刻（EBL）系统的关键制造和调查的纳米结构。该方法是使用EBL系统在纳米光子学，电子学和传感学的前沿跨学科研究中定义纳米尺度特征。该仪器将成为亚利桑那大学独特的纳米制造和加工（NF P）设施的一个组成部分，用于探索纳米结构的组件和系统。智力优势：EBL系统将是实现硅光子学和硅芯片上的光学与电子和软件集成的最先进研究的关键。硅光子芯片的特征尺寸将达到50 nm以下，这将得到EBL系统的可靠支持。这项研究也将有助于在美国国家科学基金会工程研究中心的综合接入网络（CIAN），并将是有益的研究人员从其他合作大学在CIAN。 此外，该系统还将为具有创新思维的年轻教师和学生提供独特的能力，为纳米级研发提供广泛的新机会。更广泛的影响：纳米技术的进步正在彻底改变信息技术、替代能源、环境科学、医疗保健和国土安全等领域。EBL将成为纳米科学和技术学生教育和培训的重要工具。此外，与CIAN ERC合作的少数民族服务学校的教师和研究人员，包括诺福克州立大学和塔斯基吉大学，将能够利用这一设施。

MRI: Acquisition of Electron-Beam Lithography System for Nanofabrication and ProcessingResearch Objectives and Approaches: The objective of this research is to acquire a state-of-the-art electron-beam lithography (EBL) system critical for fabrication and investigation of nano-structures. The approach is to use the EBL system to define nanoscale features in cutting-edge interdisciplinary research in nano-photonics, electronics and sensing. The instrument will be an integral part of the unique Nano-Fabrication and Processing (NF&P) facility at the University of Arizona for the exploration of nano-structured components and systems.Intellectual Merit: The EBL system will be essential in realizing the state-of-the-art research in silicon photonics and integration of optics with electronics and software on silicon chips. The feature sizes for the silicon photonic chips are reaching sub-50 nm that would be reliably supported by the EBL system. This research would also be instrumental in the NSF Engineering Research Center on Integrated Access Networks (CIAN) and will be useful to researchers from other partner universities within CIAN. Furthermore, the requested system will enable a wide range of novel opportunities in nano-scale R&D, providing a unique capability especially for the young faculty and students with innovative thinking.Broader Impacts: Advances in nano-technology is revolutionizing the fields of information technology, alternative energy, environmental sciences, healthcare, and homeland security. The EBL will be an essential tool in the education and training of students in nano-science and technology. Also, faculty and researchers associated with the minority serving schools that are partnered with CIAN ERC including Norfolk State University and Tuskegee University will be able to take advantage of this facility.