MRI: Acquisition of Electron-Beam Lithography System for Nanofabrication and Processing

磁共振成像：用于纳米制造和加工的电子束光刻系统的获取研究目标和方法：这项研究的目标是获得一种对纳米结构的制造和研究至关重要的最先进的电子束光刻系统。方法是使用EBL系统来定义纳米光子学、电子学和传感领域的尖端跨学科研究中的纳米级特征。该仪器将是亚利桑那大学探索纳米结构组件和系统的独特纳米制造和加工(NF&Amp；P)设施的组成部分。智能优点：EBL系统将在实现最先进的硅光子学研究以及在硅芯片上实现光学与电子和软件的集成方面至关重要。硅光子芯片的特征尺寸正在达到EBL系统可靠支持的50 nm以下。这项研究也将在NSF综合接入网络工程研究中心(CIAN)中发挥作用，并将对CIAN内其他合作大学的研究人员有用。此外，所要求的系统将在纳米级研发方面提供广泛的新机会，特别是为具有创新思维的年轻教职员工和学生提供独特的能力。广泛的影响：纳米技术的进步正在给信息技术、替代能源、环境科学、医疗保健和国土安全等领域带来革命性的变化。EBL将成为对学生进行纳米科学和技术教育和培训的重要工具。此外，与Cian ERC合作的少数族裔服务学校(包括诺福克州立大学和塔斯基吉大学)的教职员工和研究人员将能够利用这一设施。

MRI: Acquisition of Electron-Beam Lithography System for Nanofabrication and ProcessingResearch Objectives and Approaches: The objective of this research is to acquire a state-of-the-art electron-beam lithography (EBL) system critical for fabrication and investigation of nano-structures. The approach is to use the EBL system to define nanoscale features in cutting-edge interdisciplinary research in nano-photonics, electronics and sensing. The instrument will be an integral part of the unique Nano-Fabrication and Processing (NF&P) facility at the University of Arizona for the exploration of nano-structured components and systems.Intellectual Merit: The EBL system will be essential in realizing the state-of-the-art research in silicon photonics and integration of optics with electronics and software on silicon chips. The feature sizes for the silicon photonic chips are reaching sub-50 nm that would be reliably supported by the EBL system. This research would also be instrumental in the NSF Engineering Research Center on Integrated Access Networks (CIAN) and will be useful to researchers from other partner universities within CIAN. Furthermore, the requested system will enable a wide range of novel opportunities in nano-scale R&D, providing a unique capability especially for the young faculty and students with innovative thinking.Broader Impacts: Advances in nano-technology is revolutionizing the fields of information technology, alternative energy, environmental sciences, healthcare, and homeland security. The EBL will be an essential tool in the education and training of students in nano-science and technology. Also, faculty and researchers associated with the minority serving schools that are partnered with CIAN ERC including Norfolk State University and Tuskegee University will be able to take advantage of this facility.