MRI: Acquisition of Electron Beam Evaporation System for Multidisciplinary Research and Education

MRI：采购电子束蒸发系统用于多学科研究和教育

• 批准号: 1127093
• 负责人: Qiliang Li
• 金额: $ 25.2万
• 依托单位: George Mason University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-09-01 至 2014-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1127093&HistoricalAwards=false
• 关键词: MRI; Acquisition; Electron; Beam; Evaporation

The objective of this research is to materially strengthen the fabrication of micro/nanoscale functional devices for the multidisciplinary research and education within the areas of micro/nanoelectronics, bioengineering and physics. The approach is to acquire an electron beam evaporation system within the Shared-Access Facility at George Mason University (GMU) to deposit thin films and multilayers of metal, semiconductor and oxide materials with thickness at nanometer precision. Intellectual merit: The requested system will enhance the capability of depositing thin film materials to form electrodes, insulator, semiconductor channels and nanostructures, allowing collaboration among university and local industry researchers for a wide variety of applications including nanoelectronics, energy and biomedical devices. The requested instrument will enable research into high-performance nanowire MOSFETs, biosensors, symbiotic surfaces, organic solar cells, topological insulator materials and nanoscale field effect diodes. The enabled research will deal with fundamental questions and issues in a wide range of disciplines in physics, electronics, biology and chemistry, and will ultimately facilitate cross pollination between these groups leading to new veins of research.Broader impacts: The research enabled by the requested system will have significant impact in the development of future health technology, nanoelectronics and solar energy conversion devices. The requested instrument will be available to a large number of students, post-docs and faculty in GMU, other universities, national labs and industrial partners that involve a large proportion of underrepresented minorities and women. Hands-on experience with state-of-the-art equipment makes students and post-docs well-prepared to enter the workforce ready to engage in research, development and manufacturing.

本研究的目的是为微/纳米电子学、生物工程和物理学领域的多学科研究和教育加强微/纳米功能器件的制造。该方法是在乔治梅森大学（GMU）的共享访问设施内获得电子束蒸发系统，以沉积厚度为纳米精度的薄膜和多层金属，半导体和氧化物材料。智力优势：所要求的系统将增强沉积薄膜材料以形成电极，绝缘体，半导体通道和纳米结构的能力，允许大学和当地工业研究人员在包括纳米电子，能源和生物医学设备在内的各种应用领域进行合作。所要求的仪器将使高性能纳米线mosfet、生物传感器、共生表面、有机太阳能电池、拓扑绝缘体材料和纳米场效应二极管的研究成为可能。这项研究将涉及物理学、电子学、生物学和化学等广泛学科的基本问题和问题，并最终促进这些学科之间的交叉授粉，从而形成新的研究领域。更广泛的影响：所要求的系统所支持的研究将对未来卫生技术、纳米电子学和太阳能转换装置的发展产生重大影响。所要求的工具将提供给GMU、其他大学、国家实验室和涉及大量代表性不足的少数民族和妇女的工业伙伴的大量学生、博士后和教师。学生和博士后在最先进的设备上的实践经验使他们为进入劳动力市场做好了充分的准备，准备从事研究、开发和制造。