MEMS-Switched Acoustic Delay-Lines Microsystems for Advanced Ultrasonic Imaging Applications

用于高级超声成像应用的 MEMS 开关声学延迟线微系统

• 批准号: 1131758
• 负责人: Jun Zou
• 金额: $ 36.7万
• 依托单位: Texas A&M Engineering Experiment Station
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-09-01 至 2016-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1131758&HistoricalAwards=false
• 关键词: MEMS; Switched; Acoustic; Delay; Lines

The objective of this research is to achieve true time delays in the acoustic signal channels of ultrasonic transceivers by using a new micro acoustic delay-line system controlled by in-line micro-electromechanical-systems (MEMS) acoustic switches. Multiple channels of time-delayed acoustic signals will be transmitted or received without mixing with each other with a single-channel transceiver module. Therefore, the massive transceiver electronics widely used in today?s ultrasonic imaging systems could become unnecessary. The approach includes (1) understanding the ultrasonic wave mode propagation, conversion and attenuation in micro acoustic delay-line structures; (2) characterizing and optimizing the operating speed and insertion loss of MEMS acoustic switches; (3) establishing a predictive physics-based model and investigating control algorithms to further improve the acoustic switching performance; and (4) evaluating the ultrasonic beam-forming capability of the micro acoustic delay-line system. If successful, this research could enable new ultrasonic imaging systems with enhanced performance and portability while lowering power consumption and cost. Moreover, the new ultrasonic imaging systems would be able to accommodate a variety of functional components to enable advanced multimodal sensing and imaging modalities in a single compact package. Application areas include ultrasonic imaging applications in medicine, industry, civil engineering and military. The multidisciplinary nature of this research is expected to provide unique learning and training opportunities. Teachers and students from underrepresented school districts from grades 7-12 will be reached out to through the Enrichment Experiences in Engineering and the Discover Engineering programs at the Texas A&M University, and the Infinity Project and the Kids Ahead program at the Southern Methodist University. Research results will be incorporated into the principle investigators? curriculum development at both the undergraduate and graduate levels and will be disseminated through journal/conference publications and outreach activities to the research community and general public.

这项研究的目的是通过使用由内线微电动机电系统（MEMS）声学开关控制的新微音声学延迟线系统在超声收发器的声学信号通道中实现真实时间延迟。多个通道的时间拖延的声信号将被传输或接收，而无需与单渠道收发器模块相互混合。 因此，当今广泛使用的超声成像系统中广泛使用的大量收发器电子产品可能不必要。该方法包括（1）了解微声音延迟线结构中的超声波模式传播，转换和衰减； （2）表征和优化MEMS声开关的工作速度和插入损失； （3）建立基于预测的物理模型并研究控制算法以进一步改善声学转换性能； （4）评估微声音延迟线系统的超声梁形成能力。如果成功，这项研究可以使新的超声成像系统具有增强的性能和便携性，同时降低功耗和成本。此外，新的超声成像系统将能够容纳各种功能组件，以在单个紧凑型包装中实现高级多模式感应和成像方式。应用领域包括在医学，工业，土木工程和军事中应用超声成像应用。这项研究的多学科性质有望提供独特的学习和培训机会。来自7 - 12年级的代表性不足学区的教师和学生将通过工程学和德克萨斯A＆M大学的发现工程课程以及南方卫理公会大学的Infinity Project和Kids Trook Program的探索经验来接触。 研究结果将纳入主要研究人员中？本科和研究生级别的课程开发，并将通过期刊/会议出版物和外展活动传播给研究社区和公众。