MEMS-Switched Acoustic Delay-Lines Microsystems for Advanced Ultrasonic Imaging Applications

用于高级超声成像应用的 MEMS 开关声学延迟线微系统

• 批准号: 1131758
• 负责人: Jun Zou
• 金额: $ 36.7万
• 依托单位: Texas A&M Engineering Experiment Station
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-09-01 至 2016-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1131758&HistoricalAwards=false
• 关键词: MEMS; Switched; Acoustic; Delay; Lines

The objective of this research is to achieve true time delays in the acoustic signal channels of ultrasonic transceivers by using a new micro acoustic delay-line system controlled by in-line micro-electromechanical-systems (MEMS) acoustic switches. Multiple channels of time-delayed acoustic signals will be transmitted or received without mixing with each other with a single-channel transceiver module. Therefore, the massive transceiver electronics widely used in today?s ultrasonic imaging systems could become unnecessary. The approach includes (1) understanding the ultrasonic wave mode propagation, conversion and attenuation in micro acoustic delay-line structures; (2) characterizing and optimizing the operating speed and insertion loss of MEMS acoustic switches; (3) establishing a predictive physics-based model and investigating control algorithms to further improve the acoustic switching performance; and (4) evaluating the ultrasonic beam-forming capability of the micro acoustic delay-line system. If successful, this research could enable new ultrasonic imaging systems with enhanced performance and portability while lowering power consumption and cost. Moreover, the new ultrasonic imaging systems would be able to accommodate a variety of functional components to enable advanced multimodal sensing and imaging modalities in a single compact package. Application areas include ultrasonic imaging applications in medicine, industry, civil engineering and military. The multidisciplinary nature of this research is expected to provide unique learning and training opportunities. Teachers and students from underrepresented school districts from grades 7-12 will be reached out to through the Enrichment Experiences in Engineering and the Discover Engineering programs at the Texas A&M University, and the Infinity Project and the Kids Ahead program at the Southern Methodist University. Research results will be incorporated into the principle investigators? curriculum development at both the undergraduate and graduate levels and will be disseminated through journal/conference publications and outreach activities to the research community and general public.

本研究的目的是实现真正的时间延迟在超声收发器的声学信号通道，通过使用一种新的微声学延迟线系统控制的在线微机电系统（MEMS）声学开关。利用单通道收发模块，可实现多通道延时声信号的不混叠传输或接收。 因此，大规模的收发电子设备在今天广泛使用？的超声成像系统可能变得不必要。该方法包括：（1）了解超声波模式在微声学延迟线结构中的传播、转换和衰减;（2）表征和优化MEMS声学开关的操作速度和插入损耗;（3）建立基于预测物理的模型并研究控制算法，以进一步改善声学开关性能;（4）评价微声延迟线系统的超声波束形成能力。如果成功，这项研究可以使新的超声成像系统具有更高的性能和便携性，同时降低功耗和成本。此外，新的超声成像系统将能够容纳各种功能组件，以在单个紧凑的封装中实现先进的多模态传感和成像模式。应用领域包括医学、工业、土木工程和军事中的超声成像应用。这项研究的多学科性质预计将提供独特的学习和培训机会。来自7-12年级代表性不足的学区的教师和学生将通过德克萨斯州A M大学的工程丰富经验和发现工程计划以及南卫理公会大学的无限项目和未来儿童计划进行接触。 研究成果将纳入主要研究者？在本科生和研究生两级编制课程，并将通过期刊/会议出版物和外联活动向研究界和公众传播。