MEMS-Switched Acoustic Delay-Lines Microsystems for Advanced Ultrasonic Imaging Applications

本研究的目的是利用一种新型的微声延迟线系统，通过在线微机电系统（MEMS）声开关控制，实现超声收发器声信号通道的真实时间延迟。通过单通道收发模块，可以实现多通道延时声信号的收发，互不混杂。因此，大量的电子收发器在今天被广泛应用？超声波成像系统可能不再需要。该方法包括：(1)理解超声波模式在微声延迟线结构中的传播、转换和衰减；(2)表征和优化MEMS声学开关的工作速度和插入损耗；(3)建立基于预测物理的模型，研究控制算法，进一步提高声开关性能；(4)评价了微声延迟线系统的超声波束形成能力。如果成功，这项研究将使新的超声成像系统具有更高的性能和便携性，同时降低功耗和成本。此外，新的超声成像系统将能够容纳各种功能组件，在一个紧凑的封装中实现先进的多模态传感和成像模式。应用领域包括超声成像在医学、工业、土木工程和军事方面的应用。本研究的多学科性质有望提供独特的学习和培训机会。来自代表性不足的学区7-12年级的教师和学生将通过德克萨斯a&m大学的“工程丰富经验”和“发现工程”项目，以及南卫理公会大学的“无限项目”和“孩子超前”项目接触到。研究成果将纳入主要研究者？本科和研究生两级的课程发展，并将通过期刊/会议出版物和向研究界和一般公众的推广活动进行传播。

The objective of this research is to achieve true time delays in the acoustic signal channels of ultrasonic transceivers by using a new micro acoustic delay-line system controlled by in-line micro-electromechanical-systems (MEMS) acoustic switches. Multiple channels of time-delayed acoustic signals will be transmitted or received without mixing with each other with a single-channel transceiver module. Therefore, the massive transceiver electronics widely used in today?s ultrasonic imaging systems could become unnecessary. The approach includes (1) understanding the ultrasonic wave mode propagation, conversion and attenuation in micro acoustic delay-line structures; (2) characterizing and optimizing the operating speed and insertion loss of MEMS acoustic switches; (3) establishing a predictive physics-based model and investigating control algorithms to further improve the acoustic switching performance; and (4) evaluating the ultrasonic beam-forming capability of the micro acoustic delay-line system. If successful, this research could enable new ultrasonic imaging systems with enhanced performance and portability while lowering power consumption and cost. Moreover, the new ultrasonic imaging systems would be able to accommodate a variety of functional components to enable advanced multimodal sensing and imaging modalities in a single compact package. Application areas include ultrasonic imaging applications in medicine, industry, civil engineering and military. The multidisciplinary nature of this research is expected to provide unique learning and training opportunities. Teachers and students from underrepresented school districts from grades 7-12 will be reached out to through the Enrichment Experiences in Engineering and the Discover Engineering programs at the Texas A&M University, and the Infinity Project and the Kids Ahead program at the Southern Methodist University. Research results will be incorporated into the principle investigators? curriculum development at both the undergraduate and graduate levels and will be disseminated through journal/conference publications and outreach activities to the research community and general public.