Direct Self-Assembly of Large Area, High Crystallinity 2D Graphene on Insulator: An Integratable Carbon Platform

绝缘体上大面积、高结晶度二维石墨烯的直接自组装：可集成的碳平台

• 批准号: 1162312
• 负责人: Bin Yu
• 金额: $ 40万
• 依托单位: SUNY at Albany
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-10-01 至 2016-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1162312&HistoricalAwards=false
• 关键词: Direct; Self; Assembly; Large; Area

The objective of the research is to demonstrate direct growth of 2D carbon (graphene) sheets on insulator via an innovative chemical process, laying the foundation for integrated, scalable carbon-based manufacturing. Aiming at removing the known barriers to preparing "integratable" carbon nanostructures, the research is composed of the following parts: (i) developing a chemical growth process for controlled assembly of single-layer graphene on an insulating substrate and discovering key mechanisms and pathways towards an integrated manufacturing process, and (ii) demonstrating two representative circuit elements on the carbon platform, graphene transistors and graphene nanowire interconnects, and correlating critical electrical performance and reliability metrics to material configurations, extrinsic effects (e.g., material imperfections), and nanofabrication processes. The ultimate goal is to demonstrate a seamlessly integrated material-processing platform with compatibility with the existing semiconductor integrated chip manufacturing. If successful, the research would overcome several major difficulties in the implementation of "integratable carbon-based manufacturing", challenging the present-day dominance of silicon electronics. The research could be potentially important in closing the big gap between science-driven research on 2D nanomaterials and commercial development in the microelectronics industry. In a broader view, the proposed integrated processing strategy could be extended to a broad family of emerging 2D/3D nanostructures. The integrated material platform has major potential impacts in a wide variety of arenas, including computing, broad-band/low-noise RF communication, high-speed interconnects, photovoltaics, distributed sensing networks, and heterogeneous integration of multifunctions via innovative engineering design. The research opens unique opportunities for students to acquire interdisciplinary research experience in material sciences and engineering, physics, devices, nanofabrication, and wafer-fab processing.

这项研究的目的是展示通过创新的化学工艺在绝缘体上直接生长2D碳(石墨烯)薄片，为集成、可扩展的碳基制造奠定基础。这项研究旨在消除制备“可集成”碳纳米结构的已知障碍，包括以下部分：(I)开发一种用于在绝缘衬底上控制组装单层石墨烯的化学生长工艺，并发现实现集成制造工艺的关键机制和途径，以及(Ii)在碳平台上展示两种具有代表性的电路元件，石墨烯晶体管和石墨烯纳米线互连，并将关键的电性能和可靠性指标与材料配置、外部效应(例如，材料缺陷)和纳米制造工艺相关联。最终目标是展示一个与现有半导体集成芯片制造兼容的无缝集成材料处理平台。如果成功，这项研究将克服“可集成碳基制造”实施中的几个主要困难，挑战当今硅电子的主导地位。这项研究可能对缩小2D纳米材料科学驱动的研究与微电子行业商业开发之间的巨大差距具有潜在的重要意义。从更广泛的角度来看，拟议的综合加工战略可以扩展到一大类新兴的2D/3D纳米结构。集成材料平台在各种领域具有重大潜在影响，包括计算、宽带/低噪声射频通信、高速互连、光伏、分布式传感网络，以及通过创新的工程设计实现多功能的异质集成。这项研究为学生提供了在材料科学和工程、物理、器件、纳米制造和晶片加工方面获得跨学科研究经验的独特机会。