Collaborative Research: Development of a Robust, High-Speed, High-Quality Laser-Assisted Nanomanufacturing System

合作研究：开发稳健、高速、高质量的激光辅助纳米制造系统

• 批准号: 1200397
• 负责人: Xinwei Wang
• 金额: $ 10.79万
• 依托单位: Iowa State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-08-15 至 2016-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1200397&HistoricalAwards=false
• 关键词: Collaborative; Research; Development; Robust; Speed

This collaborative research project is focused on understanding the fundamental optical and plasma mechanisms in the laser-assisted tip-based nanomanufacturing (LA-TBN) process, utilizing the understanding to identify the optimal conditions for near-field radiation enhancement and plasma-mediated ablation at the sample surface that allow the use of advanced control techniques to achieve robust, high-speed, high-quality LA-TBN. The near-field radiation enhanced plasma-mediated ablation effect and possibly associated thermal side effects during the LA-TBN process will be clarified and distinguished through simulation and experiments enabled by the use of advanced control techniques. The gained knowledge will then be used to analyze and optimize the nanofabrication conditions towards fabrication robustness and quality. The optimal fabrication conditions will be achieved through the development and implementation of advanced control techniques, which in turn, leads to high-speed and high quality nanofabrication. The technique will be implemented and evaluated through the fabrication of a maze-like complicated pattern in single crystal silicon. The success of this project will not only significantly enhance the advantages of the LA-TBN process over other nanofabrication methodologies, including low-cost, ultra-high-resolution and versatility in materials that can be processed, but willalso increase understanding of the fundamental mechanisms involved in this intriguing process. As one of the first systematic attempts to overcome critical barriers in the LA-TBN process, this project enables these advantages for the productive implementations of this technique in strategically important areas, such as semiconductors. The educational activities comprise curriculum development, recruitment and retaining of under-represented students, and outreach to K-12.

该协作研究项目的重点是理解基于激光辅助的基于激光辅助的纳米制造（LA-TBN）过程中的基本光学和等离子体机制，利用该理解来识别近场辐射增强的最佳条件，并在样品表面上允许在高级控制技术上使用高级控制技术的样品表面，以实现强大的技术，高速升至高速，高速，高速升至高速，高速公路。在LA-TBN过程中，近场辐射增强的血浆介导的消融效果和可能相关的热副作用将通过使用高级控制技术启用的模拟和实验来阐明和区分。然后，获得的知识将用于分析和优化纳米制造条件，以实现鲁棒性和质量。最佳的制造条件将通过开发和实施高级控制技术实现，这反过来又导致了高速和高质量的纳米化。该技术将通过在单晶硅中制造迷宫般的复杂模式来实施和评估。该项目的成功不仅将显着提高LA-TBN过程的优势，而不是其他纳米制作方法，包括可以处理的材料中的低成本，超高分辨率和多功能性，而且还会增加对这一有趣过程中涉及的基本机制的理解。作为在LA-TBN过程中克服关键障碍的首次系统尝试之一，该项目可以在战略上重要的领域（例如半导体）中实施该技术的这些优势。教育活动包括课程开发，招聘和保留代表性不足的学生以及向K-12推广。