Integrated surface acousto-optical devices on piezoelectric aluminum nitride thin films

本研究的目的是在压电氮化铝薄膜上集成表面声波和纳米光子器件。该方法采用最新的纳米制造技术，制造出声波波长与共传播光波波长相当的表面声波器件，两者都被引导和限制在薄AlN层中。提出的集成表面声光器件系统将在光通信和射频/微波光子学领域带来许多新的应用。将展示基于非互反模式转换的纳米光子腔的超快开关和调制和光隔离。通过受激布里渊散射产生相干声子也将被探讨。知识优势：虽然声光技术有着悠久的历史，但纳米制造技术的最新发展可以在纳米尺度上为该领域带来前所未有的超强光声相互作用的新制度。提出的表面声波器件与纳米光子器件的集成将导致小型化的声光器件，可以集成在集成光子系统中，芯片上的可调谐光隔离，以及相干表面声子的产生。更广泛的影响：该项目将为光通信和传感技术提供新型集成光子器件，从而影响工业界和科学界。教育和推广活动将鼓励高中生追求科学和工程方面的职业生涯。一系列光学科学的实验演示将在夏令营项目中进行，以激励和教育K-12学生，并在明尼苏达科学博物馆进行。

The objective of this research is to integrate surface acoustic wave with nanophotonic devices on piezoelectric aluminum nitride thin films. The approach is to employ the latest nanofabrication techniques to fabricate surface acoustic wave devices with corresponding acoustic wavelengths comparable to the wavelength of co-propagating optical wave, both are guided and confined in a thin AlN layer. The proposed integrated surface acousto-optical device systems will lead to many novel applications for optical communications and RF/microwave photonics. Ultrafast switching and modulation of nanophotonic cavities and optical isolation based on non-reciprocal mode conversion will be demonstrated. Coherent acoustic phonon generation through stimulated Brillouin Scattering will also be explored. Intellectual Merit: Although acousto-optics has a long history, the state-of-the-art development of nanofabrication technology can bring the field to an unprecedented new regime of extremely strong light-sound interaction at the nanoscale. The proposed integration of surface acoustic wave devices with nanophotonic devices will lead to miniaturized acousto-optical devices that can be incorporated in integrated photonic systems, tunable optical isolation on a chip, and coherent surface acoustic phonon generation.Broader Impact: The project will impact the industry and the scientific community by providing a new class of integrated photonic devices for optical communication and sensing technologies. The education and outreach activities will encourage high-schools students to pursue a career in science and engineering. A series of experimental demonstrations of optical science will be performed during the summer camp programs to inspire and educate K-12 students and at the Science Museum of Minnesota.