Integrated surface acousto-optical devices on piezoelectric aluminum nitride thin films

压电氮化铝薄膜上的集成表面声光器件

• 批准号: 1307601
• 负责人: Mo Li
• 金额: $ 35.95万
• 依托单位: University of Minnesota-Twin Cities
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-07-01 至 2017-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1307601&HistoricalAwards=false
• 关键词: Integrated; surface; acousto; optical; devices

The objective of this research is to integrate surface acoustic wave with nanophotonic devices on piezoelectric aluminum nitride thin films. The approach is to employ the latest nanofabrication techniques to fabricate surface acoustic wave devices with corresponding acoustic wavelengths comparable to the wavelength of co-propagating optical wave, both are guided and confined in a thin AlN layer. The proposed integrated surface acousto-optical device systems will lead to many novel applications for optical communications and RF/microwave photonics. Ultrafast switching and modulation of nanophotonic cavities and optical isolation based on non-reciprocal mode conversion will be demonstrated. Coherent acoustic phonon generation through stimulated Brillouin Scattering will also be explored. Intellectual Merit: Although acousto-optics has a long history, the state-of-the-art development of nanofabrication technology can bring the field to an unprecedented new regime of extremely strong light-sound interaction at the nanoscale. The proposed integration of surface acoustic wave devices with nanophotonic devices will lead to miniaturized acousto-optical devices that can be incorporated in integrated photonic systems, tunable optical isolation on a chip, and coherent surface acoustic phonon generation.Broader Impact: The project will impact the industry and the scientific community by providing a new class of integrated photonic devices for optical communication and sensing technologies. The education and outreach activities will encourage high-schools students to pursue a career in science and engineering. A series of experimental demonstrations of optical science will be performed during the summer camp programs to inspire and educate K-12 students and at the Science Museum of Minnesota.

本研究的目的是在压电氮化铝薄膜上整合表面声波与奈米光子元件。该方法是采用最新的纳米纤维技术来制造表面声波器件，其相应的声波波长与共同传播的光波的波长相当，两者都被引导并限制在薄的AlN层中。提出的集成表面声光器件系统将在光通信和RF/微波光子学中产生许多新的应用。超快开关和调制的纳米光子腔和光学隔离的基础上非互易模式转换将被证明。本课程亦将探讨借由受激布里渊散射产生相干声学声子。智力优势：虽然声光有着悠久的历史，但纳米纤维技术的最新发展可以将该领域带入前所未有的纳米级极强的光-声相互作用的新领域。表面声波器件与纳米光子器件的集成将导致小型化的声光器件，可以纳入集成光子系统，可调光隔离芯片，相干表面声学声子generation. BroaderImpact：该项目将影响工业和科学界通过提供一个新的类集成光子器件的光通信和传感技术。教育和推广活动将鼓励高中学生从事科学和工程职业。一系列光学科学的实验演示将在夏令营计划期间进行，以激励和教育K-12学生和明尼苏达州科学博物馆。