Integrated surface acousto-optical devices on piezoelectric aluminum nitride thin films

压电氮化铝薄膜上的集成表面声光器件

• 批准号: 1307601
• 负责人: Mo Li
• 金额: $ 35.95万
• 依托单位: University of Minnesota-Twin Cities
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-07-01 至 2017-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1307601&HistoricalAwards=false
• 关键词: Integrated; surface; acousto; optical; devices

The objective of this research is to integrate surface acoustic wave with nanophotonic devices on piezoelectric aluminum nitride thin films. The approach is to employ the latest nanofabrication techniques to fabricate surface acoustic wave devices with corresponding acoustic wavelengths comparable to the wavelength of co-propagating optical wave, both are guided and confined in a thin AlN layer. The proposed integrated surface acousto-optical device systems will lead to many novel applications for optical communications and RF/microwave photonics. Ultrafast switching and modulation of nanophotonic cavities and optical isolation based on non-reciprocal mode conversion will be demonstrated. Coherent acoustic phonon generation through stimulated Brillouin Scattering will also be explored. Intellectual Merit: Although acousto-optics has a long history, the state-of-the-art development of nanofabrication technology can bring the field to an unprecedented new regime of extremely strong light-sound interaction at the nanoscale. The proposed integration of surface acoustic wave devices with nanophotonic devices will lead to miniaturized acousto-optical devices that can be incorporated in integrated photonic systems, tunable optical isolation on a chip, and coherent surface acoustic phonon generation.Broader Impact: The project will impact the industry and the scientific community by providing a new class of integrated photonic devices for optical communication and sensing technologies. The education and outreach activities will encourage high-schools students to pursue a career in science and engineering. A series of experimental demonstrations of optical science will be performed during the summer camp programs to inspire and educate K-12 students and at the Science Museum of Minnesota.

本研究的目的是将声表面波与纳米光子器件集成在压电氮化铝薄膜上。该方法是利用最新的纳米制造技术来制备声表面波器件，其相应的声波波长与同向传播的光波的波长相当，两者都被引导并限制在薄的AlN层中。提出的集成表面声光器件系统将在光通信和射频/微波光子学中有许多新的应用。我们将展示纳米光子腔的超快开关和调制，以及基于非互易模转换的光隔离。还将探索通过受激布里渊散射产生相干声学声子。智能优点：虽然声光技术有很长的历史，但纳米制造技术的最新发展可以将该领域带入一个前所未有的新制度，在纳米尺度上实现极强的光声相互作用。提出的声表面波器件与纳米光子器件的集成将导致可以集成到集成光子系统中的小型化声光器件，芯片上可调谐的光学隔离，以及相干表面声学声子的产生。广泛影响：该项目将通过提供用于光通信和传感技术的新型集成光子器件，对工业和科学界产生影响。教育和推广活动将鼓励高中生在科学和工程领域追求职业生涯。在夏令营期间，将在明尼苏达州科学博物馆进行一系列光学科学的实验演示，以激励和教育K-12学生。