EAGER: Implementing Nanolaminates in an Anodic Oxide Trench for Energy Storage Systems

该赠款为研究提供资金，使密集包装的纳米级结构的开发能够用于制造储能设备，如电容器。 纳米结构将由金属-绝缘体-金属层组成，并将优化沟槽结构中交替纳米层压材料（薄原子层材料）的新利用。 将制造纳米尺寸的沟槽，并且将使用原子层沉积来填充具有交替的高介电常数和宽带隙纳米层的沟槽。 沟槽形成和纳米层压开发将通过使用透射电子显微镜（TEM），傅立叶变换（FTIR）分析，原子力显微镜（AFM）和扫描电子显微镜（SEM）的结构和化学表征进行优化。 经过优化的结构将与高性能电极集成，作为电容密度、击穿电压和漏电流电气测试的触点。成功完成这项研究后，其结果将改变全球解决方案储能设备的寿命和成本效益。 这项研究的成果将导致改善纳米结构的加工和能量存储设备的等效平面电容（EPC）性能。 这项研究的主要目标是制造具有优化孔径和保形纳米层压覆盖率的纳米沟槽结构，以影响电容器的性能、组装和能量存储的可扩展性。 开发的纳米结构将优化材料的可靠性，耐用性和更低的加工成本。这些得到的金属-绝缘体-金属沟槽纳米结构将解决用于太阳能、风能、水力和其他替代能源的存储设备的长期生命周期、低效率和高漏电流。

This grant provides funding for research enabling the development of densely packed nano-scale structures to be used in the manufacturing of energy storage devices, such as capacitors. The nanostructures will consist of metal-insulator-metal layers and will optimize the novel utilization of alternating nano laminates (thin atomic layers of material) in trench structures. Nano-sized trenches will be fabricated and atomic layer deposition will be used to fill the trenches with alternating high dielectric constant and wide band gap nanolayers. Trench formation and nanolaminant development will be optimized through structural and chemical characterization using transmission electron microscopy (TEM), Fourier transform (FTIR) analysis, atomic force microscopy (AFM), and scanning electron microscopy (SEM). Optimized structures will be integrated with high performing electrodes as contacts for the electrical testing of capacitance density, breakdown voltage, and leakage current.Upon successful completion of this research, the results will transform the lifespan and cost efficiency of energy storage devices for global solutions. The outcomes of this research will lead to improved nanostructure processing and equivalent planar capacitance (EPC) performance for energy storage devices. The primary goal of this research is to manufacture nano trench structures with optimized pore size and conformal nanolaminant coverage to impact capacitor properties, assembly, and scalability for energy storage. The developed nanostructures will optimize material reliability, durability, and lower processing cost. These resulting metal-insulator-metal trench nanostructures will address long term life cycle, low efficiency, and high leakage current for storage devices used for solar, wind, hydro, and other alternative energy sources.