EAGER: Implementing Nanolaminates in an Anodic Oxide Trench for Energy Storage Systems

这项拨款为研究提供资金，使密集的纳米级结构的发展能够用于制造能量存储设备，如电容器。纳米结构将由金属-绝缘体-金属层组成，并将优化交替纳米层压板（薄原子层材料）在沟槽结构中的新应用。利用原子层沉积技术制备高介电常数和宽禁带的纳米层。通过使用透射电子显微镜（TEM）、傅里叶变换（FTIR）分析、原子力显微镜（AFM）和扫描电子显微镜（SEM）的结构和化学表征，将优化沟槽的形成和纳米层的发育。优化的结构将与高性能电极集成，作为电容密度、击穿电压和泄漏电流的电气测试的触点。一旦成功完成这项研究，结果将改变全球解决方案的能源存储设备的寿命和成本效率。该研究成果将有助于改善储能器件的纳米结构加工和等效平面电容（EPC）性能。本研究的主要目标是制造具有优化孔径和保形纳米层覆盖的纳米沟槽结构，以影响电容器的性能、组装和储能的可扩展性。所开发的纳米结构将优化材料的可靠性、耐久性，并降低加工成本。这些金属-绝缘体-金属沟槽纳米结构将解决太阳能、风能、水电和其他替代能源存储设备的长寿命周期、低效率和高泄漏电流问题。

This grant provides funding for research enabling the development of densely packed nano-scale structures to be used in the manufacturing of energy storage devices, such as capacitors. The nanostructures will consist of metal-insulator-metal layers and will optimize the novel utilization of alternating nano laminates (thin atomic layers of material) in trench structures. Nano-sized trenches will be fabricated and atomic layer deposition will be used to fill the trenches with alternating high dielectric constant and wide band gap nanolayers. Trench formation and nanolaminant development will be optimized through structural and chemical characterization using transmission electron microscopy (TEM), Fourier transform (FTIR) analysis, atomic force microscopy (AFM), and scanning electron microscopy (SEM). Optimized structures will be integrated with high performing electrodes as contacts for the electrical testing of capacitance density, breakdown voltage, and leakage current.Upon successful completion of this research, the results will transform the lifespan and cost efficiency of energy storage devices for global solutions. The outcomes of this research will lead to improved nanostructure processing and equivalent planar capacitance (EPC) performance for energy storage devices. The primary goal of this research is to manufacture nano trench structures with optimized pore size and conformal nanolaminant coverage to impact capacitor properties, assembly, and scalability for energy storage. The developed nanostructures will optimize material reliability, durability, and lower processing cost. These resulting metal-insulator-metal trench nanostructures will address long term life cycle, low efficiency, and high leakage current for storage devices used for solar, wind, hydro, and other alternative energy sources.