EAGER: Implementing Nanolaminates in an Anodic Oxide Trench for Energy Storage Systems

这笔赠款为研究提供资金，使密集组装的纳米结构能够用于制造储能设备，如电容器。纳米结构将由金属-绝缘体-金属层组成，并将优化交替纳米叠层(材料的薄原子层)在沟槽结构中的新用途。将制造纳米尺寸的沟槽，并将使用原子层沉积来在沟槽中填充交替的高介电常数和宽带隙纳米薄膜。将通过使用透射电子显微镜(TEM)、傅立叶变换(FTIR)分析、原子力显微镜(AFM)和扫描电子显微镜(SEM)的结构和化学表征来优化沟槽形成和纳米层析剂的开发。优化的结构将与高性能电极集成在一起，作为接触，用于电容密度、击穿电压和泄漏电流的电气测试。成功完成这项研究后，结果将改变全球解决方案的储能设备的寿命和成本效率。这项研究的结果将导致改进纳米结构工艺和能量存储设备的等效平面电容(EPC)性能。这项研究的主要目标是制造具有优化的孔径和共形纳米层析剂覆盖率的纳米沟槽结构，以影响电容器的性能、组装和能量存储的可扩展性。开发的纳米结构将优化材料的可靠性、耐用性和更低的加工成本。这些金属-绝缘体-金属沟槽纳米结构将解决用于太阳能、风能、水能和其他替代能源的存储设备的长生命周期、低效率和高泄漏电流问题。

This grant provides funding for research enabling the development of densely packed nano-scale structures to be used in the manufacturing of energy storage devices, such as capacitors. The nanostructures will consist of metal-insulator-metal layers and will optimize the novel utilization of alternating nano laminates (thin atomic layers of material) in trench structures. Nano-sized trenches will be fabricated and atomic layer deposition will be used to fill the trenches with alternating high dielectric constant and wide band gap nanolayers. Trench formation and nanolaminant development will be optimized through structural and chemical characterization using transmission electron microscopy (TEM), Fourier transform (FTIR) analysis, atomic force microscopy (AFM), and scanning electron microscopy (SEM). Optimized structures will be integrated with high performing electrodes as contacts for the electrical testing of capacitance density, breakdown voltage, and leakage current.Upon successful completion of this research, the results will transform the lifespan and cost efficiency of energy storage devices for global solutions. The outcomes of this research will lead to improved nanostructure processing and equivalent planar capacitance (EPC) performance for energy storage devices. The primary goal of this research is to manufacture nano trench structures with optimized pore size and conformal nanolaminant coverage to impact capacitor properties, assembly, and scalability for energy storage. The developed nanostructures will optimize material reliability, durability, and lower processing cost. These resulting metal-insulator-metal trench nanostructures will address long term life cycle, low efficiency, and high leakage current for storage devices used for solar, wind, hydro, and other alternative energy sources.