Robust Design and Control of Multi-Axis Thin-film Piezoelectric Scanning Actuators for Deep-Tissue Endoscopic Microscopy

该项目的重点是对微型成像仪器的压电薄膜致动器进行建模和控制。 某些高分辨率成像技术可以相对深入地穿透到生物组织中。 通过小型手持和/或内窥镜工具对活生物体使用这种能力需要精确控制新型微尺度致动器，例如基于压电材料锆钛酸铅（PZT）的致动器，其作为薄膜沉积在硅晶片上。 将开发紧凑的数学模型来描述薄膜PZT在不同工作频率和振幅下的行为。 这将被纳入致动器的结构运动的动态模型，在致动器制造的变化，和鲁棒控制领域的技术将被用来设计致动器，是相对不敏感的制造误差和压电材料的变化。最后，基于上述模型的反馈控制器将被设计为使用板上传感measurement.The拟议的工作将有广泛的影响，支持微型化的深层组织光学显微镜系统的内窥镜兼容的形状因子调节致动器的运动。 这些仪器将使各种科学和临床活动的主题，如系统生物学，癌症和过敏性疾病。 更好地了解薄膜PZT的行为也可以改善各种基于压电材料的微尺度致动器，如纳米定位器，微型机器人和光学扫描镜。 鲁棒性设计可以帮助减少微技术对由于加工和环境变化而导致的产量差或性能有限的敏感性。 在教育方面，本科研究人员将通过针对女性和代表性不足的少数民族的工程实习计划，大量参与原型设备和控制系统实施的实验测试。 支持还将用于开发和实施密歇根大学底特律地区大学预科工程计划的工程设计和实验活动。

The focus of this project is to model and control piezoelectric thin-film actuators for miniature imaging instruments. Certain high-resolution imaging techniques can penetrate relatively deeply into biological tissue. Use of this ability with living organisms through small handheld and/or endoscopic tools requires precise control of novel micro-scale actuators, such as those based on the piezoelectric material lead-zirconate-titanate (PZT), deposited as thin-film on silicon wafers. Compact mathematical models will be developed to describe thin-film PZT behavior at varying operating frequencies and amplitudes. This will be incorporated into dynamic models of actuator structural motion subject to variation in actuator manufacturing, and techniques from the field of robust control will be used to design actuators that are comparatively insensitive to fabrication errors and piezoelectric material variability. Finally, feedback controllers based on the preceding models will be designed to regulate actuator motion using on-board sensing measurements.The proposed work will have broad impact by supporting miniaturization of deep-tissue optical microscopy systems to an endoscope-compatible form factor. These instruments would enable a variety of scientific and clinical activities regarding topics such as systems biology, cancer, and allergic disease. Better understanding of thin-film PZT behavior could also improve a variety of micro-scale actuators based on piezoelectric materials, such as nanopositioners, micro-robots, and optical scanning mirrors. Design for robustness could help reduce susceptibility of microtechnologies to poor yield or limited performance due to processing and environmental variability. Educationally, undergraduate researchers will be heavily involved in experimental testing of prototype devices and control system implementation, through engineering internship programs targeting women and underrepresented minorities. Support would also be used to develop and implement engineering design and experimentation activities in the University of Michigan Detroit Area Pre-College Engineering Program.