MRI: Acquisition of a Portable SEM with EDS to Investigate Damages to Metallization Structure and its Interface with WBG Semiconductor in Harsh Environments.

MRI：购买带有 EDS 的便携式 SEM，用于研究恶劣环境中金属化结构及其与 WBG 半导体界面的损坏情况。

• 批准号: 1337141
• 负责人: Adetayo Adedeji
• 金额: $ 23.74万
• 依托单位: Elizabeth City State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-09-01 至 2015-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1337141&HistoricalAwards=false
• 关键词: MRI; Acquisition; Portable; SEM; EDS

DMR - 1337141 AdedejiTechnicalThis award from the Major Research Instrumentation program supports Elizabeth City State University (ECSU) with the acquisition of Portable Scanning Electron Microscope (SEM) with Energy Dispersive Spectroscopy (EDS) detector. The instrument will be used to investigate the effects of high temperature and high energy proton irradiation on Wide Band Gap (WBG) semiconductor surface based device characteristics. This instrument will enable the researchers to develop an advanced metallization scheme that minimizes surface deformation because of the harsh environment. Wide band gap semiconductors are capable of surviving in harsh environments because of their intrinsic properties. In principle, WBG semiconductor based devices can operate in environments such as: (a) inside or in close proximity to an automotive engine block (for efficient fuel usage and reduced atmospheric pollution due to incomplete gas combustion); (b) the control electronics for nuclear power plants; (c) the sensor electronics for space exploration and more. The goal is to investigate and explore conducting ternary refractory barrier layer to minimize damages to contact metal and semiconductor surface in high temperatures (between 500 and 800 degree centigrade) and high energy proton irradiations over a long exposure time. The equipment will be the first electron microscope at ECSU. It will therefore serve as a great educational tool for underrepresented and underserved STEM students. It will also be an important outreach tool to K-12 science teachers and students in the northeastern North Carolina region.*****Non TechnocalThis award from the Major Research Instrumentation program supports Elizabeth City State University (ECSU) with the acquisition of Portable Scanning Electron Microscope (SEM) with Energy Dispersive Spectroscopy (EDS) detector. The SEM and EDS system will be used to investigate the effects of high temperature and high energy proton irradiation on Wide Band Gap (WBG) semiconductor surface based device characteristics. This instrument is essential to be able to understand and develop a durable and robust metallization scheme for materials and devices in harsh environmental conditions. Such condition exists in defense and weapons systems and in automobile industries for in-situ monitoring of gas combustion and control of environmental pollutant from incomplete gas combustion. Many faculty members across disciplines from technology to biology will be using the electron microscope for research and education. It is expected that more than 50 undergraduate students will make use of the equipment on a short-term basis per year. About 5 undergraduate students and 3 graduate students will routinely use the equipment for research per year. Teachers from the K-12 public schools in the region will be trained and aided to use the equipment to educate and motivate their students for a career in STEM disciplines. Samples will be viewed with SEM to introduce students to sub-micron length scale, structures and patterns that are not visible with common light microscope. SEM with EDS at ECSU will enable increased intra-university and interdisciplinary research collaboration between faculty members. It will also enable stronger collaboration with the center for materials research at Norfolk State University and the Applied Research Center at Newport News, Virginia where faculty may use more expensive SEM/TEM for detailed studies.

DMR-1337141 ADEJI技术该奖项来自主要研究仪器计划，用于支持伊丽莎白城市州立大学购买带有能谱探测器的便携式扫描电子显微镜。该仪器将用于研究高温高能质子辐照对宽带隙(WBG)半导体表面器件特性的影响。该仪器将使研究人员能够开发出一种先进的金属化方案，使由于恶劣环境而导致的表面变形降至最低。宽禁带半导体由于其固有的特性，能够在恶劣的环境中生存。原则上，基于WBG半导体的设备可以在下列环境中工作：(A)在汽车发动机机体内部或附近工作(以提高燃料的使用效率，并减少因气体燃烧不完全而造成的大气污染)；(B)用于核电站的控制电子设备；(C)用于空间探索等的传感器电子设备。其目标是研究和探索导电三元耐火阻挡层，以最大限度地减少高温(500至800摄氏度)和高能质子照射下长时间曝光对接触金属和半导体表面的损害。该设备将是欧洲苏黎世州立大学的第一台电子显微镜。因此，它将成为代表不足和服务不足的STEM学生的一个很好的教育工具。它也将是北卡罗来纳州东北部地区K-12科学教师和学生的重要推广工具。*非技术奖这个奖项来自主要研究仪器计划，支持伊丽莎白城市州立大学(ECSU)购买带有能量色散光谱(EDS)探测器的便携式扫描电子显微镜(SEM)。利用扫描电子显微镜和能谱分析系统研究了高温高能质子辐照对宽带隙半导体表面器件特性的影响。该仪器对于理解和开发在恶劣环境条件下的材料和器件的耐用和坚固的金属化方案至关重要。这种情况存在于国防和武器系统以及汽车工业中，用于现场监测气体燃烧和控制不完全气体燃烧造成的环境污染物。从技术到生物学的许多学科的教职员工都将使用电子显微镜进行研究和教学。预计每年将有50多名本科生短期使用这些设备。每年约有5000名本科生和3名研究生将常规使用这些设备进行研究。来自该地区K-12公立学校的教师将接受培训和援助，以使用这些设备教育和激励他们的学生在STEM学科中从事职业。样品将用扫描电子显微镜观察，向学生介绍用普通光学显微镜看不到的亚微米长度尺度、结构和图案。ECSU具有EDS的SEM将增加教职员工之间的大学内和跨学科研究合作。它还将加强与诺福克州立大学材料研究中心和弗吉尼亚州纽波特纽斯应用研究中心的合作，那里的教职员工可能会使用更昂贵的扫描电子显微镜/透射电子显微镜进行详细研究。