AIR Option 1: Technology Translation: Control of Ion Energy Distributions in Plasma Processing

这个PFI：空气技术翻译项目专注于翻译低温等离子体中离子能量分布控制的基础研究，以填补半导体行业在制造更高电路密度的硅集成电路方面的能力空白。在等离子体处理中用于离子能量分布控制的转换方法具有单一的、可选择的能量离子轰击的独特特征，与自限电荷中和步骤相结合，在硅集成电路制造中的图案化绝缘层和导电层方面提供示例性的性能优势，包括在蚀刻一种材料相对于另一种材料时的更高的选择性，以及在尺寸控制方面导致提高的成品率，与该市场空间中领先的射频偏置竞争技术相比。此外，与竞争对手定制的波形偏置相比，功率传输的简单性和效率使其具有额外的优势。该项目通过向电极和衬底阶段施加脉冲直流偏压来获得高能离子轰击，然后使用电子通量中和电荷，从而在绝缘材料上产生单能离子通量而不存在充电问题，从而实现了这一目标。该项目将生产一个原型，它将包括一个衬底平台和一个可以浸泡在脉冲等离子体中的边界电极。在余辉期间，边界电极上的正直流电压产生高能离子轰击，而正直流尖峰进入衬底阶段，使表面暂时达到接近等离子体的电势，允许电子流中和表面正电荷。该项目将提供概念验证、该硬件的规格以及扩大规模的途径。该合作关系与东京电子美国公司和GlobalFoundary公司合作，在半导体等离子刻蚀市场空间和其他方面提供指导，包括提供可提高市场空间可信度的测试样本，以及未来可能加快这项技术转化的潜在投资，从而可能导致具有竞争力的商业现实。预计未来十年工具销售的潜在经济影响将达到数亿美元，这将有助于美国在等离子刻蚀设备市场空间的竞争力。从长远来看，社会影响将是摩尔？S定律的延续，该定律预测集成电路的性能将稳步提高。这将反过来导致计算机和便携式电子设备的不断改进，以及导致新的消费电子产品、医疗设备和其他尚未构思的先进产品的创新。

This PFI: AIR Technology Translation project focuses on translating basic studies of ion energy distribution control in low temperature plasmas to fill a gap in the ability of the semiconductor industry to meet future needs in the manufacturing of silicon integrated circuits with higher circuit density. The translated method for ion energy distribution control in plasma processing has the unique feature of single, selectable energy ion bombardment, that, combined with a self-limiting charge neutralization step, provides exemplary performance advantages in patterning insulating and conducting layers in silicon integrated circuit fabrication, including higher selectivities in etching one material relative to another, and in dimension control leading to improved yields, when compared to the leading competing technology of radio frequency bias in this market space. In addition, the simplicity and efficiency of power delivery, compared to the competing tailored waveform bias gives it an additional advantage. The project accomplishes this goal by using pulsed DC bias to an electrode and the substrate stage to obtain energetic ion bombardment, then electron flux to neutralize charge, resulting in a mono-energetic ion flux with no charge-up issues on insulating materials. The project will produce a prototype that will consist of a substrate stage and a boundary electrode that can be immersed in a pulsed plasma. Positive DC voltage on the boundary electrode during the afterglow produces energetic ion bombardment, while positive DC spikes to the substrate stage temporarily bringing the surface to near plasma potential, allowing electron flow to neutralize positive surface charge. The project will deliver a proof-of-concept, the specifications for this hardware, and a path to scale-up. The partnership engages Tokyo Electron America and GlobalFoundaries to provide guidance in the semiconductor plasma etching market space and other aspects, including supplying test samples that would increase credibility in the market space, and potential future investments that could accelerate the translation of this technology along a path that may result in a competitive commercial reality. The potential economic impact is expected to be hundreds of millions in tool sales in the next decade, which will contribute to the U.S. competitiveness in the plasma etching equipment market space. The societal impact, long term, will be a continuation of Moore?s Law, which predicts the steady improvement in the performance of integrated circuits. This will lead in turn to the continued improvement in computers and portable electronic devices, as well as innovations leading to new consumer electronics products, medical equipment, and other yet to be conceived of advanced products.