NIRT: Nano-Pantography

NIRT：纳米受电弓

• 批准号: 0303790
• 负责人: Vincent Donnelly
• 金额: $ 100万
• 依托单位: University of Houston
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-08-15 至 2007-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0303790&HistoricalAwards=false
• 关键词: NIRT; Nano; Pantography

Current focused ion beam techniques are capable of writing nanometer-sized features, but are inherently very slow. The aim of this project is a novel, radically different approach to high-throughput and versatile fabrication of nanometer scale complex patterns over large areas (tens of sq. cm). A broad area collimated beam of ions will be directed at a silicon wafer, and focused as an orderly array of nanometer size spots with the use of sub-micron sized electrostatic lenses. Simulations indicate that regardless of the achievable resolution of current lithography, this method can improve resolution by a factor of up to 100. When the wafer is tilted off normal (with respect to the ion beam axis), the focal point is laterally displaced, allowing the focused beams to be rastered, thus forming any arbitrary pattern. This is the essence of nano-pantography. The desired pattern is replicated simultaneously in billions of spots over tens of sq. cm. The plan is to apply this method to deposit small metal particles that will nucleate the growth of an ordered array of isolated, vertically aligned carbon nanotubes, for field emission applications.This project aims to provide challenging projects for graduate and undergraduate students, with rich scientific and educational merit, as well as technological advances, not the least of which would be a clear path to large scale manufacturing of nano-devices. It is expected the latter will lead to a high level of interest from, and partnerships with, developing nano-technology companies and consortia. Diversity in undergraduate involvement will be facilitated by several programs at the University of Houston (a designated Minority Status University) and the University of California-San Diego. Outreach activities at the local public schools will help introduce the importance and excitement of nano-science and technology to students at an early age. Besides field emission devices, applications in quantum dot devices and ultra-small transistors will be investigated. The ability to deposit nanoparticles with a variety of size and/or composition could advance combinatorial approaches in fields such as catalysis or sensor development.

当前的聚焦离子束技术能够写入纳米尺寸的特征，但本质上非常慢。 该项目的目标是采用一种新颖的、完全不同的方法来高通量和多功能地制造大面积（数十平方厘米）的纳米级复杂图案。 大面积准直离子束将被引导到硅晶片上，并使用亚微米尺寸的静电透镜聚焦为有序的纳米尺寸斑点阵列。模拟表明，无论当前光刻可实现的分辨率如何，该方法都可以将分辨率提高高达 100 倍。当晶圆偏离法线（相对于离子束轴）倾斜时，焦点会横向移动，从而使聚焦光束被光栅化，从而形成任意图案。这就是纳米受电弓的本质。所需的图案在数十平方厘米的数十亿个点上同时复制。该计划的目的是应用这种方法来沉积小金属颗粒，这些颗粒将使有序排列的孤立的、垂直排列的碳纳米管的生长成核，用于场发射应用。该项目旨在为研究生和本科生提供具有挑战性的项目，具有丰富的科学和教育价值以及技术进步，其中最重要的是为大规模制造纳米器件提供一条清晰的道路。 预计后者将引起开发纳米技术公司和财团的高度兴趣并与其建立伙伴关系。 休斯顿大学（指定的少数族裔大学）和加州大学圣地亚哥分校的多个项目将促进本科生参与的多样性。 当地公立学校的外展活动将有助于向学生从小介绍纳米科学技术的重要性和令人兴奋的内容。 除了场发射器件外，还将研究在量子点器件和超小型晶体管中的应用。 沉积具有各种尺寸和/或成分的纳米粒子的能力可以推进催化或传感器开发等领域的组合方法。