Solid-State Dewetting of Metallic Thin Films

金属薄膜的固态去湿

• 批准号: 1505947
• 负责人: Carl Thompson
• 金额: $ 45.74万
• 依托单位: Massachusetts Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2015
• 资助国家: 美国
• 起止时间: 2015-09-01 至 2019-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1505947&HistoricalAwards=false
• 关键词: Solid; State; Dewetting; Metallic; Thin

NON-TECHNICAL ABSTRACT:Metallic thin films are used in a wide range of devices and systems that have an impact on our everyday lives. They play critical roles in the integrated circuits used for computation and communication, microelectromechanical systems (MEMS) used for sensing and biomedical analyses, micromagnetic devices used for information storage, and microphotonic devices and systems used for information processing, communications and sensing. As these technologies advance, smaller and smaller metallic components are required. However, it has been found that when materials are made very small, their shape tends to evolve over time as they try to adopt spherical shapes, like droplets. This is limiting the development of new technologies, especially those involving metallic components. In this project, precisely controlled very small metallic structures are being made to study their evolution over time. These experimental studies are coupled with development of the theoretical models that are needed to explain this evolution. The goals of this project are to develop new techniques for making stable nano-scale metallic structures and for controlling shape evolution to make structures with complex shapes for new functions. This project involves students from two research groups, one focused on experiments and one focused on modeling. These students participate in meetings of both groups and will also extensively interact with senior and junior members of collaborating groups in the Technical University of Dresden, the University of Milano, and the University of New South Wales. Results from this project are included in courses at MIT and short courses for industry, as well as in massively open online courses. TECHNICAL ABSTRACT:Experimental and theoretical studies of solid state dewetting are being carried out to understand the effects of crystalline anisotropy on capillary-driven morphological evolution. Single crystal films have been lithographically patterned before heating to cause morphological evolution. It is found that this evolution is strongly affected by the crystallographic orientation of patterned features such as film edges. Edges were found to retract at orientation-dependent rates and either undergo pinch-off to leave behind sets of ligaments aligned in parallel with the retracting edge, or develop a fingering instability that leads to parallel ligaments aligned along the retraction direction. Ligaments are subject to a Rayleigh-like instability that leads to break-up into particles. This behavior is very reproducible, and leads to different intermediate structures that depend on the shape and orientation of the pre-patterned structures. In all cases, crystalline anisotropy strongly affects the observed phenomenology. In this project, systematic studies are underway in which films of different materials, thickness, and crystallographic texture are patterned with edges and other features within a range of in-plane crystallographic orientations. Kinetic studies of retraction of straight edges, rim pinch-off and fingering are underway. Different annealing ambients are being used to understand the role of surface structure and surface energy anisotropy on dewetting anisotropy. Morphological evolution in the systems under study occurs by capillarity-driven surface diffusion. 2D models for evolution in the case of isotropic surface energies are well developed, and 3D models based on phase filled approaches are emerging. However, the strongly anisotropic behavior that is observed in dewetting studies shows the need for 3D models that account for surface energy and diffusion anisotropy. As part of this project, the investigators are developing anisotropic 3D phase field models that will be tested by comparison with a wide range of experiments. It is anticipated that these basic studies will lead to an improved understanding of capillary-driven evolution of thin films and micro-/nano-structures. This will allow design of materials and systems with improved stability and enable the use of templated solid-state dewetting as a tool for generating complex structures with sub-lithographic feature sizes.

非技术摘要：金属薄膜广泛应用于各种设备和系统中，对我们的日常生活产生影响。它们在用于计算和通信的集成电路、用于传感和生物医学分析的微机电系统（MEMS）、用于信息存储的微磁器件以及用于信息处理、通信和传感的微光子器件和系统中发挥着关键作用。 随着这些技术的进步，需要越来越小的金属部件。 然而，人们发现，当材料做得非常小时，它们的形状往往会随着时间的推移而演变，因为它们试图采用球形形状，如液滴。 这限制了新技术的发展，特别是涉及金属部件的技术。在这个项目中，正在制造精确控制的非常小的金属结构，以研究它们随时间的演变。 这些实验研究与解释这种演变所需的理论模型的发展相结合。该项目的目标是开发新技术，用于制造稳定的纳米级金属结构和控制形状演变，以制造具有新功能的复杂形状的结构。 该项目涉及两个研究小组的学生，一个专注于实验，一个专注于建模。 这些学生参加这两个小组的会议，并将与德累斯顿工业大学，米兰大学和新南威尔士大学的合作小组的高级和初级成员进行广泛的互动。该项目的成果被纳入麻省理工学院的课程和工业短期课程，以及大规模开放的在线课程。 技术摘要：为了了解晶体各向异性对毛细驱动形态演化的影响，正在进行固态去湿的实验和理论研究。 单晶膜在加热之前已经被光刻图案化以引起形态演变。研究发现，这种演变受到薄膜边缘等图案化特征的晶体取向的强烈影响。 发现边缘以方向依赖性速率回缩，并且要么经历夹断以留下与回缩边缘平行对齐的韧带组，要么发展指状不稳定性，导致平行韧带沿回缩方向沿着。 韧带易受瑞利样不稳定性影响，导致断裂成颗粒。 这种行为是非常可再现的，并且导致取决于预图案化结构的形状和取向的不同中间结构。 在所有情况下，晶体各向异性强烈影响所观察到的现象。在这个项目中，正在进行系统的研究，其中不同材料，厚度和晶体学纹理的薄膜在平面晶体学取向范围内具有边缘和其他特征。 直边回缩、边缘夹断和指法的动力学研究正在进行中。 不同的退火气氛被用来了解表面结构和表面能各向异性对去湿各向异性的作用。 在所研究的系统中的形态演变发生毛细作用驱动的表面扩散。 在各向同性表面能的情况下，2D模型的演变是发达的，和3D模型的基础上相填充的方法正在出现。 然而，在去湿研究中观察到的强各向异性行为表明需要考虑表面能和扩散各向异性的3D模型。 作为该项目的一部分，研究人员正在开发各向异性3D相场模型，该模型将通过与广泛的实验进行比较来进行测试。 预计这些基础研究将导致对薄膜和微/纳米结构的毛细管驱动演化的更好理解。 这将允许设计具有改进的稳定性的材料和系统，并且使得能够使用模板化固态去湿作为用于生成具有亚光刻特征尺寸的复杂结构的工具。