NNCI: Stanford University - SNSF, SNF, MAF, EMF

斯坦福大学的国家纳米技术协调基础设施（NNCI）斯坦福站点将为来自学术界、大小公司和政府实验室的科学家和工程师提供开放的、经济的、最先进的纳米制造和纳米表征设施。斯坦福大学将向外部用户更全面地开放斯坦福纳米共享设施（SNSF）、斯坦福纳米制造设施（SNF）、矿物分析设施（MAF）和环境测量设施（EMF）。对这些设施的开放获取不仅将促进科学的进步，而且还将加速纳米技术的商业化，这些技术可以解决与能源、通信、水资源、农业、计算、临床医学和环境修复相关的一系列广泛的社会问题。斯坦福大学将创建并组装一个全面的在线图书馆，提供即时教育材料，使斯坦福大学和其他地方共享纳米设施的用户在接受专家人员的个性化培训之前，能够独立、迅速地获得基础知识。斯坦福大学的工作人员还将与两所少数族裔服务机构（加州州立大学洛杉矶分校和加州州立大学东湾分校）合作，为他们的学生提供课程、实践培训和纳米设施。斯坦福基地的共享纳米设施将提供全面的先进纳米制造和纳米表征工具，包括常规不可用的资源，例如可以沉积GaAs或GaN薄膜的MOCVD实验室，可以在200毫米晶圆上刻蚀8纳米特征的JEOL电子束光刻工具，NanoSIMS和独特的扫描SQUID显微镜，该显微镜检测磁场的灵敏度高于任何其他仪器。这些设施占地约30,000平方英尺，其中包括16,000平方英尺的洁净室，其中6,000平方英尺的洁净室在振动、声学、光线、洁净度和电磁干扰控制方面达到严格的要求。支持外部用户的工作人员已经获得了制造光子晶体，激光器，光电探测器，光学MEMS，惯性传感器，光学生物传感器，电子生物传感器，悬臂问题，纳米场效应管，新存储器，电池和光伏的专业知识。斯坦福大学将努力增加来自纳米科学非传统领域（如生命科学、医学、地球和环境科学）的用户数量，方法是创建有针对性的正式课程，制作纳米结构实验作为一种服务，提供种子资助，以及领导研讨会和网络研讨会。

The Stanford Site of the National Nanotechnology Coordinated Infrastructure (NNCI) at Stanford University will provide open, cost-effective access to state-of-the-art nanofabrication and nanocharacterization facilities for scientists and engineers from academia, small and large companies, and government laboratories. Stanford will open the Stanford Nano Shared Facilities (SNSF), the Stanford Nanofabrication Facility (SNF), the Mineral Analysis Facility (MAF), and the Environmental Measurement Facility (EMF) more fully to external users. Open access to these facilities will not only promote the progress of science but also accelerate the commercialization of nanotechnologies that can solve a broad array of societal problems related to energy, communication, water resources, agriculture, computing, clinical medicine, and environmental remediation. Stanford will create and assemble a comprehensive online library of just-in-time educational materials that will enable users of shared nanofacilities at Stanford and elsewhere to acquire foundational knowledge independently and expeditiously before they receive personalized training from an expert staff member. Stanford staff members will also collaborate with two minority-serving institutions (California State University Los Angeles and California State University East Bay) to provide coursework, hands-on training, and nanofacility access to their students.The Stanford Site's shared nanofacilities will offer a comprehensive array of advanced nanofabrication and nanocharacterization tools, including resources that are not routinely available, such as an MOCVD laboratory that can deposit films of GaAs or GaN, a JEOL e-beam lithography tool that can inscribe 8-nm features on 200-mm wafers, a NanoSIMS, and a unique scanning SQUID microscope that detects magnetic fields with greater sensitivity than any other instrument. The facilities occupy ~30,000 ft2 of space, including 16,000 ft2 of cleanrooms, 6,000 ft2 of which meet stringent specifications on the control of vibration, acoustics, light, cleanliness, and electromagnetic interference. The staff members who will support external users have acquired specialized expertise in fabricating photonic crystals, lasers, photodetectors, optical MEMS, inertial sensors, optical biosensors, electronic biosensors, cantilever probles, nano-FETs, new memories, batteries, and photovoltaics. Stanford will endeavor to increase the number of users from non-traditional fields of nanoscience (e.g., life science, medicine, and earth and environmental science) by creating a targeted formal curriculum, fabricating experimental nanostructures as a service, providing seed grants, and leading seminars and webinars.