Vibration Assisted Nanopositioning: An Enabler of Low-cost, High-throughput Nanotech Processes

振动辅助纳米定位：低成本、高通量纳米技术工艺的推动者

• 批准号: 1562297
• 负责人: Chinedum Okwudire
• 金额: $ 20万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2016
• 资助国家: 美国
• 起止时间: 2016-03-01 至 2019-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1562297&HistoricalAwards=false
• 关键词: Vibration; Assisted; Nanopositioning; Enabler; Low

Nanotechnology is one of the most promising areas of technological development, and among the most likely to deliver substantial economic and societal benefits to the U.S. in the 21st century. Nanopositioning stages are mechanical devices used for precise positioning in a wide range of nanotech processes, ranging from spectroscopy to micro additive manufacturing. Hence their positioning speed and cost are critical to the throughput and scale up of many nanotech processes. Stages that use roller bearings are currently the only commercially viable option for a growing number of large-displacement nanopositioning applications performed in ultrahigh vacuum environments. However, roller bearing stages suffer from very low positioning speeds due to the adverse effects of so-called pre-rolling friction. This award supports a scientific investigation into a novel approach for mitigating the effects of pre-rolling friction on roller bearing nanopositioning stages by applying high frequency vibration to the stage. Results from this research will increase the positioning speed of roller bearing nanopositioning stages without significantly increasing their costs, hence enabling the scale up and increased throughput of a wide range of nanotech processes. This research is focused on vibration-assisted nanopositioning: a novel approach for applying high frequency vibration, combined with active vibration control, to nanopositioning stages. The objective of this research is to understand the interactions between high frequency vibration, pre-rolling friction, controller dynamics, and positioning speed. The method of direct partition of motion will be used to determine the influence of vibration parameters (vibration frequency and amplitude) on pre-rolling friction and stage position control, under ideal conditions where there is no active vibration control. Perturbation analyses (e.g., using the Poincaré-Lindstedt method) will then be carried out to understand the effects of active vibration control combined with high frequency vibration on the vibration of the stage. Control techniques that will be investigated include sliding mode control and harmonic cancellation control. In all analyses, pre-rolling friction will be modeled with increasing levels of complexity, starting from the simple Dahl model and building up to the Generalized Maxwell Slip model, in order to gain progressive insights into the effects of each model and its parameters on the results of the analyses. A simple roller bearing nanopositioning stage will be used to conduct point-to-point positioning experiments, with various high frequency vibration frequencies/amplitudes, friction conditions, and control techniques, to validate the theoretical analyses.

纳米技术是技术发展中最有前途的领域之一，也是最有可能在21世纪为美国带来巨大经济和社会效益的领域之一。纳米定位平台是用于从光谱学到微增材制造的各种纳米技术工艺中精确定位的机械设备。因此，它们的定位速度和成本对于许多纳米技术工艺的生产量和规模至关重要。对于越来越多的在真空环境中进行的大位移纳米定位应用，使用滚子轴承的平台是目前唯一商业上可行的选择。然而，由于所谓的预滚动摩擦的不利影响，滚柱轴承级的定位速度非常低。该奖项支持对一种新方法进行科学研究，该方法通过对载物台施加高频振动来减轻预滚动摩擦对滚子轴承纳米定位载物台的影响。这项研究的结果将提高滚子轴承纳米定位阶段的定位速度，而不会显着增加其成本，从而使规模扩大和增加的吞吐量的范围广泛的纳米技术工艺。本研究的重点是振动辅助纳米定位：一种新的方法，应用高频振动，结合主动振动控制，纳米定位阶段。本研究的目的是了解高频振动，预滚动摩擦，控制器动态和定位速度之间的相互作用。在没有主动振动控制的理想条件下，将使用运动直接分割的方法来确定振动参数（振动频率和振幅）对预滚动摩擦和载物台位置控制的影响。扰动分析（例如，采用Poincaré-Lindstedt方法）来研究振动主动控制与高频振动相结合对工作台振动的影响。将研究的控制技术包括滑模控制和谐波消除控制。在所有分析中，预轧制摩擦将以越来越高的复杂性进行建模，从简单的Dahl模型开始，建立到广义麦克斯韦滑动模型，以便逐步了解每个模型及其参数对分析结果的影响。一个简单的滚子轴承纳米定位阶段将被用来进行点对点的定位实验，与各种高频振动频率/振幅，摩擦条件和控制技术，以验证理论分析。