Instrument Development for Ultrahigh-throughput 3D Chemical Imaging via Glow Discharge Optical Emission Spectroscopy

通过辉光放电发射光谱进行超高通量 3D 化学成像的仪器开发

基本信息

批准号：
1610849
负责人：
Gerardo Gamez
金额：
$ 38.11万
依托单位：
Texas Tech University
依托单位国家：
美国
项目类别：
Continuing Grant
财政年份：
2016
资助国家：
美国
起止时间：
2016-07-01 至 2020-06-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1610849&HistoricalAwards=false
关键词：
Instrument Development Ultrahigh throughput 3D

项目摘要

With support from the Chemical Measurement and Imaging Program in the Division of Chemistry, Professor Gamez at Texas Tech University is developing an ultra-high throughput surface elemental mapping technique based on measuring the light emitted from a glow discharge. It is important to obtain spatial-resolution of chemical information to order to understand natural systems and improve the efficiency of manufacturing (that is to see where impurities might be). Current imaging techniques, however, present several challenges. On the one hand, many techniques require several hours to tens of hours to obtain a surface element map with high resolution. On the other hand, current higher sample throughput techniques may not be widely accessible. Some high throughput techniques require the use of synchrotron radiation facilities which are relatively rare. Professor Gamez is working on a glow discharge optical spectroscopic technique that could potentially map element distribution 1000x faster than typical techniques. As such, imaging protocols currently limited by analysis time restrictions may become routine diagnostic tools. This research impacts many scientific research fields, from materials to biological sciences. The project also offers training opportunities to graduate and undergraduate researchers with regard to instrument development, fundamental studies, and application development in plasma-based optical hyperspectral imaging and surface analysis. Professor Gamez works with a number of local programs to recruit next generation STEM students, in particular those from underrepresented minority groups.Glow discharge optical emission spectroscopy (GDOES) has been recently shown to enable spatially resolved lateral information to be obtained from within the sputtering surface area by operating the GD in pulsed-power and at higher pressures. These modes of operation become are important as it is no longer required to raster pixel-by-pixel to obtain a hyperspectral data cube with the elemental distribution information. This savings may translates into several orders of magnitude faster analysis times. The overall goal of this project is to develop an ultrahigh throughput-, 3D-, large area surface chemical imaging technique based on GDOES. The three objectives are to: 1) develop hyperspectral imaging systems and novel GD instrumentation to enable GD 3D chemical imaging, 2) study the underlying GD mechanisms through OES and laser scattering plasma diagnostics, and 3) develop applications in materials, biological and geological sciences enabled by GDOES 3D chemical imaging. In addition to the overall goals, this research may improve comprehension of GD scaling, enhance the characterization of trends in molecular OES under GD conditions, and enable of a variety of imaging protocols in different fields.

在化学划分的化学测量和成像计划的支持下，德克萨斯理工大学的Gamez教授正在开发一种基于测量从发光排放发出的光的光线的超高吞吐量表面元素映射技术。重要的是要获得化学信息的空间分辨率以了解自然系统并提高制造的效率（即查看杂质的位置）。但是，当前的成像技术提出了一些挑战。一方面，许多技术需要几个小时到数十个小时才能获得具有高分辨率的表面元素图。另一方面，当前较高的样品吞吐量技术可能无法广泛访问。一些高吞吐量技术需要使用相对罕见的同步加速器辐射设施。 Gamez教授正在研究发光的放电光谱技术，该技术可能比典型技术更快地绘制元素分布的速度1000倍。因此，当前受分析时间限制限制的成像协议可能成为常规的诊断工具。这项研究影响了许多科学研究领域，从材料到生物科学。该项目还提供了培训机会，可在基于等离子体的高光谱成像和表面分析的仪器开发，基本研究以及应用程序开发方面毕业和本科研究人员。 Gamez教授与许多本地计划一起招募下一代STEM学生，特别是那些代表性不足的少数群体组的学生。Glow出院光学发射光谱（GDOES）最近已显示出可以通过在脉冲杆中和更高的压力机中的GD在Sputter表面积中获得的空间分辨出的横向信息。这些操作模式变得很重要，因为不再需要逐个像素来获得带有元素分布信息的高光谱数据立方体。这种节省可能会转化为几个数量级的分析时间。该项目的总体目标是开发基于GDOES的超高吞吐量，3D，大面积的地表化学成像技术。这三个目标是：1）开发高光谱成像系统和新颖的GD仪器以实现GD 3D化学成像，2）研究通过OES和激光散射等离子体诊断的基本GD机制，以及3）3）在材料，生物学和地质学科学中开发应用，由GDOS 3D化学成像启用。除了总体目标外，这项研究还可以提高对GD缩放的理解，增强GD条件下分子OE的趋势的表征，并可以在不同领域的各种成像方案中进行各种成像协议。