MRI: Acquisition of an Inductively Coupled Plasma Reactive-Ion Etching System for Research and Education in Nanophotonics, Nanoelectronics and Nano-Bio Devices

MRI：采购感应耦合等离子体反应离子蚀刻系统，用于纳米光子学、纳米电子学和纳米生物器件的研究和教育

• 批准号: 1625998
• 负责人: Jing Zhang
• 金额: $ 30.5万
• 依托单位: Rochester Institute of Tech
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2016
• 资助国家: 美国
• 起止时间: 2016-09-01 至 2017-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1625998&HistoricalAwards=false
• 关键词: MRI; Acquisition; Inductively; Coupled; Plasma

This Major Research Instrumentation (MRI) funding will support the acquisition of an inductively coupled plasma reactive-ion etching (ICP-RIE) system to enable fundamental research and education in nanophotonics, nanoelectronics and nano-bio devices. The objective of this MRI acquisition is to facilitate new and existing multidisciplinary research in science and engineering, enable educational curriculum development, and promote outreach activities at Rochester Institute of Technology (RIT). The ICP-RIE system will enable photonic, electronic and bio device fabrication capability that does not exist presently at RIT and Rochester region. The requested ICP-RIE system will provide dry etching capability for various material systems such as compound semiconductors, dielectric materials, and metals with fast etching rate, well-controlled selectivity, and promising uniformity. The instrument is essential to enable fundamental research and education on III-Nitride based light emitting diodes (LEDs) and lasers, seamless integration of robust and low-powered III-V quantum dot (QD) lasers with silicon photonics, III-V tunneling field effect transistor, memory devices for computing, QD and nanowire photovoltaics, III-Nitride photodetectors for inertial confinement fusion research, nanoplasmonic devices, and nan-bio devices for efficient biomolecule transfer. The requested instrument will be the first ICP dry etcher tool at RIT, which will be shared by research groups across all disciplines in science and engineering with students trained from Microsystems Engineering Ph.D. program and Ph.D. in Engineering program. The tool will also be shared by external research groups in Rochester region to enhance research and collaborations between RIT and other colleges, national labs, and small businesses in the region. The ICP-RIE system will be designated as a shared user facility, available to new curriculum and lab section development on device fabrications for both undergraduate and graduate students at RIT, whom can be trained for next-generation scientists and engineers. The fabrication capability provided by the proposed instrument would benefit curriculum development at RIT for several fundamental courses and lab sections focused on nanofabrication and semiconductor devices. Demonstration experiments on photonic and electronic devices can also be designed to K-12 students and teachers through RIT outreach activities by the use of the dry etcher, which can stimulate K-12 students' interest to pursue science, technology, engineering, and mathematics (STEM) disciplines in the future. Connectivity with such demonstration experiments will also be promoted to train existing women and underrepresented minority students at RIT.

这笔主要研究仪器（MRI）资金将支持购买感应耦合等离子体反应离子蚀刻（ICP-RIE）系统，以实现纳米光子学、纳米电子学和纳米生物器件的基础研究和教育。此次 MRI 收购的目的是促进科学和工程领域新的和现有的多学科研究，实现教育课程的开发，并促进罗彻斯特理工学院 (RIT) 的外展活动。 ICP-RIE 系统将实现 RIT 和罗彻斯特地区目前尚不具备的光子、电子和生物器件制造能力。所要求的ICP-RIE系统将为化合物半导体、介电材料和金属等各种材料系统提供干法刻蚀能力，具有快速刻蚀速率、良好控制的选择性和良好的均匀性。该仪器对于实现基于 III-氮化物的发光二极管 (LED) 和激光器的基础研究和教育、鲁棒且低功率的 III-V 量子点 (QD) 激光器与硅光子学、III-V 隧道场效应晶体管、计算存储设备、QD 和纳米线光伏、III-氮化物光电探测器的无缝集成至关重要。 用于高效生物分子转移的惯性约束聚变研究、纳米等离子体装置和纳米生物装置。所要求的仪器将是 RIT 的第一台 ICP 干蚀刻工具，该工具将由科学和工程所有学科的研究小组与微系统工程博士生培训的学生共享。计划和博士学位。在工程计划中。该工具还将由罗切斯特地区的外部研究小组共享，以加强 RIT 与该地区其他学院、国家实验室和小型企业之间的研究和合作。 ICP-RIE 系统将被指定为共享用户设施，可供 RIT 本科生和研究生进行器件制造的新课程和实验室部分开发，并为下一代科学家和工程师提供培训。拟议仪器提供的制造能力将有利于 RIT 的几门基础课程和专注于纳米制造和半导体器件的实验室部分的课程开发。还可以通过 RIT 的外展活动，使用干蚀刻机为 K-12 学生和教师设计光子和电子器件的演示实验，从而激发 K-12 学生未来追求科学、技术、工程和数学 (STEM) 学科的兴趣。还将促进与此类示范实验的联系，以培训 RIT 现有的女性和代表性不足的少数族裔学生。