Core facility Micro-Nano-Integration

该项目的目的是建立微纳集成核心设施。一方面，这一概念支持研究人员将具有新功能的（外国）纳米结构集成到他们自己的微系统和设备中，或者另一方面将他们的新纳米结构实现到现有的微系统中。通过适当的结构和现有技术的优化组织，TU Ilmenau的更广泛的用户群和其他外部用户可以获得核心设施技术，组合的跨学科专业知识得到最佳利用，运营和研究的专业性将得到提高。重点是发展专业的科学管理，以有效地运营核心设施。将向用户提供流程和技术链，而不是单个流程，从而更好地利用基础设施。为此目的，将建立透明的建议、决策和会计结构，使更多的用户能够获得技术。这些措施除了确保符合供资要求的费用分配和必要的保密性外，还确保了按照规定的流程沿着进行的流程的可重复性。

The aim of the project is to establish a micro-nano-integration core facility. On the one hand this concept supports researchers to integrate (foreign) nano structures with new functions into their own micro systems and devices or on the other hand to implement their new nano structures into existing micro systems. Through appropriate structures and optimized organization of the available technologies, a wider user group at the TU Ilmenau and additional external users can get access to core facility technologies, the combined interdisciplinary expertise becomes optimally utilized and the professionalism of the operation and research will be improved. The focus is on developing a professional scientific management to operate the core facility efficiently. Instead of individual processes, process and technology chains will be made available for users which lead to a better utilization of the infrastructure. For this purposes transparent proposal, decision-making and accounting structures will be established to allow more users the access to technology. These measures ensure reproducibility of the processes along defined process-lines in addition to aspects of funding-compliant cost allocation and the necessary confidentiality.