Core facility Micro-Nano-Integration - follow-up application

DFG核心设施Micro-Nano-Integration自2013年12月以来一直由DFG资助。它包括微纳米技术中心（ZMN）的整个技术和分析基础设施，该中心最初成立于2002年，是伊尔梅瑙工业大学三个部门的九个小组的跨学科核心设施。该中心共有200多台机器和系统，用于微纳集成领域的处理和分析，总价值约为1000万美元。30绪。欧元。2005年，ZMN成为中央操作单位，并成立了Micro- and Nanotechnologies MacroNano®跨部门研究所（IMN MacroNano®），目前由四个部门的38个小组组成。纳米技术和微系统技术的独特结合，基于从纳米加工到系统集成的技术链，以及与过程相关的综合分析，代表了研究领域的独特地位。它使核心设施的用户能够将具有新特性和功能的特定纳米结构直接集成到微系统中，或者将纳米结构、纳米材料和现有的微系统异质地结合起来。下一个供资期将巩固一个可持续的核心设施，并将已经建立的专业组织结构从单一仪器扩展到综合流程链。结构的专业化是项目的关键方面之一，它允许透明的成本结构和用户规则、为实现可重复的过程结果（质量控制）而持续的过程链支持、项目机构符合会计程序和保密性。流程链成本确定的一般方法将与现有的实验室管理系统（设备预订和预订工具）相结合。对于不熟悉核心设施中详细流程流的用户来说，科学技术协调器代表了一个单一的接触点。她/他建立了一个专家小组，能够评估具体要求的可行性。因此，外部用户可以很容易地连接到作为一站式服务的设施。在执行阶段，实验室技术人员将支持这些过程。随着科学项目协调员和实验室技术员转变为固定职位，核心设施的原则将可持续地嵌入到技术中心有效和持久的管理结构中。各种附加措施将促进对核心设施的利用，特别是对外部用户的利用。企业wiki、（培训）讲习班和科学讨论会将向外部用户开放，以便分享信息、最佳实践和科学成果。此外，还将扩大与其他核心设施的合作。

The DFG core facility Micro-Nano-Integration has been funded by the DFG since December 2013. It comprises the entire technological and analytical infrastructure of the Center for Micro- and Nanotechnologies (ZMN), which was originally founded in 2002 as an interdisciplinary core facility of nine groups from three departments of TU Ilmenau. Altogether, the center hosts more than 200 machines and systems for processing and analysis in the field of micro-nano-integration, the total value amounts to approx. 30 Mio. Euro. In 2005, the ZMN became central operation unit and the interdepartmental Institute of Micro- and Nanotechnologies MacroNano® (IMN MacroNano®), which today comprises 38 groups from four departments, was founded. The unique combination of nanotechnology and microsystems technology based on technology chains from nano-processing to systems integration and the comprehensive process-related analytics represents a unique position in the research landscape. It enables users of the core facility to integrate specific nanostructures with new properties and functionalities directly into microsystems or to combine nanostructures and nanomaterials and existing microsystems heterogeneously. The next funding period consolidates a sustainable core facility and expands already established professional organizational structures from single instrument to comprehensive process chain access. The professionalization of structures is one of the crucial aspects of the project and allows for transparent cost-structures and user rules, continuous process chain support for achieving reproducible process results (quality control), project agency conform accounting procedures and confidentiality. A general methodology for process chain cost determination will be combined with the already existing lab management system (equipment reservation and booking tool). The scientific technology coordinator represents a single-point-of-contact for users not familiar with the detailed process flows in the core facility. She/he establishes a team of experts, which is capable to evaluate the feasibility of the specific request. Thus, external users can easily connected to the facility working as a one-stop-shop. During the execution phase, the lab technician will support these processes. With the transition of the scientific project coordinator and the lab technician into permanent positions, the principles of the core facility will be sustainably embedded into effective and long lasting management structures of the technological center. Various additional measures will foster the utilization of the core facility especially for external users. The corporate wiki, (training) workshops and scientific colloquia will be opened to external users in order to share information, best practice and scientific results. Moreover, the cooperation with other core facilities will be expanded.