MRI: Acquisition of a variable angle spectroscopic ellipsometer

可变角光谱椭偏仪（VASE）将获得提供无与伦比的薄膜表征能力的主机在罗切斯特，纽约地区的研究项目。研究项目的例子包括通过独特的化学气相沉积技术沉积的聚合物薄膜的热物理性质的基础研究，在生物医学设备中的响应涂层的原位表征，光子器件的二维材料的综合表征，以及高功率激光应用的光学涂层材料的激光诱导损伤的研究。来自罗切斯特大学、罗切斯特理工学院和激光能量学实验室的12个研究小组已被确定为VASE工具的用户。为了进一步促进VASE工具的有效利用，并使其成为可广泛获取的资源，将在罗切斯特大学校园的一般用户设施中安装该工具。VASE工具的另一个关键功能是支持学生教育，为他们在光学，半导体和光子学方面的潜在职业做好准备。拟议的光谱椭圆偏振法将用于各种光学特性的薄膜材料。米勒矩阵椭圆偏振测量法测量米勒矩阵的所有16个元素，这是对介质对偏振光响应的最完整描述。这使得能够定量分析具有复杂结构的样品，例如光学各向异性和去偏振样品，同时保留标准椭圆偏振测量能力，这对于同位素、非去偏振样品是足够的。将采购的具体仪器是RC 2椭圆偏振仪，并进行了额外的改进，以最大限度地提高其多功能性，并使多学科研究工作成为可能。它们包括用于绘制图案化表面和/或评估膜均匀性的自动平移台、用于在相对于入射偏振的若干角度处测量各向异性样品的旋转台、用于动态测量水化样品的液体池、用于测量水化样品的液体池和用于测量水化样品的液体池。（溶剂化）膜，表征作为温度函数的膜性质的热台，在受控的蒸气气氛中测量膜的环境单元，和用于耦合原位电化学装置表征的电化学电池。RC 2椭偏仪的大样品台和灵活的物理配置将允许未来开发定制的原位表征能力，确保该仪器在未来许多年的研究项目中的广泛用途。该奖项反映了NSF的法定使命，并被认为值得通过使用基金会的智力价值和更广泛的影响审查标准进行评估来支持。

The variable angle spectroscopic ellipsometer (VASE) to be acquired will provide unparalleled thin film characterization capabilities for a host of research projects in the Rochester, NY region. Examples of research projects include the fundamental study of thermophysical properties of polymer thin films deposited by a unique chemical vapor deposition technique, in situ characterization of responsive coatings in biomedical devices, comprehensive characterization of two-dimensional materials for photonic devices, and the study of laser-induced damage in optical coating materials for high power laser applications. Twelve research groups from the University of Rochester, Rochester Institute of Technology, and the Laboratory for Laser Energetics have been identified as users of the VASE tool. To further promote effective utilization of the VASE tool and make it widely accessible resource, it will be installed in a general user facility on the University of Rochester campus. Another key function of the VASE tool is to support student education to prepare them for potential careers in optics, semiconductors and photonics.The proposed spectroscopic ellipsometry will be utilized for thin film materials of varied optical properties. Mueller-matrix ellipsometry measures all 16 elements of the Mueller matrix, which is the most complete description of a medium's response to polarized light. This enables quantitative analysis of samples with complex structure, such as optically anisotropic and depolarizing samples, while retaining standard ellipsometry capabilities, which are sufficient for isotopic, non-depolarizing samples. The specific instrument to be acquired is the RC2 ellipsometer, with additional enhancements to maximize its versatility and to enable multidisciplinary research efforts. They include an auto-translating stage for mapping of patterned surfaces and/or to assess film uniformity, rotational stage to measure anisotropic samples at several angles relative to the incident polarization, liquid cell for dynamic measurements of hydrated (solvated) films, thermal stage to characterize film properties as a function of temperature, environmental cell to measure films in controlled vapor atmospheres, and an electrochemical cell for coupled in situ electrochemical device characterization. The large sample stage and flexible physical configuration of the RC2 ellipsometer will allow future development of custom in situ characterization capabilities, ensuring the broad utility of this instrument in research projects for many years to come.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.