MEMS High Voltage Triboelectric Levitation: A Generactuator

MEMS 高压摩擦电悬浮：发电机

• 批准号: 1919608
• 负责人: Shahrzad Towfighian
• 金额: $ 42.91万
• 依托单位: SUNY at Binghamton
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2019
• 资助国家: 美国
• 起止时间: 2019-06-01 至 2025-05-31
• 项目状态: 未结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1919608&HistoricalAwards=false
• 关键词: MEMS; Voltage; Triboelectric; Levitation; Generactuator

This grant aims to obtain new knowledge regarding the multiphysics of a novel self-operated mechanical shock switch system. The mechanism merges two transducers, one which converts mechanical shock to voltage and another which converts voltage to motion to open a micro-switch. The result is a self-operated sensor directly operated by mechanical shock when the shock goes beyond a threshold. Currently, shock sensors such as those in air-bag deployment devices need a processing unit to engage the device, which requires a complicated control system having risks of software and component failures. The system eliminates the need for signal processing units by synergistically connecting two transducers that overcome the limitations of each system. There is a gap in the knowledge of several key aspects of each transducer that this project will address. The system has promising applications in earthquake detection systems that need to trigger an immediate response to significant seismic activity such as shutting off power lines and sounding alarms. Wider applications include safety switches in the automotive industry and shipment monitors. To familiarize a broad range of students with transducers, educational activities will be undertaken that include hands-on experiences for local elementary schools and structured research projects for undergraduate students. This project aims to provide a fundamental understanding of the underlying multiphysics from the integration of triboelectric generators and levitation actuators. These systems have numerous advantages for energy transduction and electrostatic actuation, respectively. However, each mechanism has drawbacks that have not been adequately addressed and cause major limitations in various applications: triboelectric generators produce high voltages (~50-70 V) making their use in vibration energy harvesting very difficult and electrostatic levitation devices require high voltages to operate. Merging the two systems overcomes the limitations of each system. Despite much research on triboelectric materials, the coupled dynamic characteristics of triboelectric transducers and electrostatic actuators are unknown. The combined system contains mechanical and electrical components causing a sophisticated exchange of the energies between them that affects their normal behavior. This project will delineate the nonlinear interactions of the two systems using mathematical models, prototype fabrication and experimental verification. A threshold shock micro-switch will be presented that autonomously operates from mechanical shock to validate the understanding of the underlying physical phenomenon affecting these devices.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

本项目旨在获得关于一种新型自操作机械冲击开关系统的多物理场的新知识。该机构合并了两个换能器，一个将机械冲击转换为电压，另一个将电压转换为打开微开关的运动。其结果是当冲击超过阈值时，由机械冲击直接操作的自操作传感器。目前，安全气囊展开装置中的冲击传感器需要一个处理单元来启动设备，这需要一个复杂的控制系统，有软件和组件故障的风险。该系统通过协同连接两个换能器来克服每个系统的局限性，从而消除了对信号处理单元的需求。本项目将解决的每个换能器的几个关键方面的知识存在差距。该系统在地震探测系统中有很好的应用前景，这些系统需要对重大地震活动（如切断电源线和发出警报）立即做出反应。更广泛的应用包括汽车行业的安全开关和运输监视器。为了让更多的学生熟悉换能器，将开展教育活动，包括为当地小学提供实践经验，并为本科生提供结构化的研究项目。该项目旨在从摩擦发电机和悬浮致动器的集成中提供对潜在多物理场的基本理解。这些系统分别在能量转导和静电驱动方面具有许多优点。然而，每种机制都有缺点，这些缺点尚未得到充分解决，并在各种应用中造成重大限制：摩擦发电机产生高电压（~50-70 V），使得它们在振动能量收集中的使用非常困难，静电悬浮装置需要高电压才能运行。两个系统的合并克服了各自系统的局限性。尽管对摩擦电材料进行了大量的研究，但摩擦电换能器和静电致动器的耦合动态特性尚不清楚。组合系统包含机械和电气组件，导致它们之间复杂的能量交换，影响它们的正常行为。该项目将利用数学模型、原型制造和实验验证来描述这两个系统的非线性相互作用。将提出一种阈值冲击微开关，可以在机械冲击下自主操作，以验证对影响这些设备的潜在物理现象的理解。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

项目成果

Self-powered triboelectric MEMS accelerometer

• DOI: 10.1016/j.nanoen.2023.108282
• 发表时间: 2023-05
• 期刊: Nano Energy
• 影响因子: 17.6
• 作者: Mohammad Alzgool;Yu Tian;B. Davaji;Shahrzad Towfighian

Micro-triboelectric generator for zero-power shock detection

• DOI: 10.1016/j.nanoen.2022.107758
• 发表时间: 2022-09
• 期刊: Nano Energy
• 影响因子: 17.6
• 作者: Mohammad Alzgool;M. Mousavi;B. Davaji;Shahrzad Towfighian

Electrostatic levitation: an elegant method to control MEMS switching operation

静电悬浮：一种控制 MEMS 开关操作的优雅方法

• DOI: 10.1007/s11071-021-06499-9
• 发表时间: 2021
• 期刊: Nonlinear Dynamics
• 影响因子: 5.6
• 作者: Mousavi, Mohammad;Alzgool, Mohammad;Towfighian, Shahrzad
• 通讯作者: Towfighian, Shahrzad

Towards a CMOS-Compatible Accelerometer Using Self-Powered Teng System

• DOI: 10.1109/powermems56853.2022.10007574
• 发表时间: 2022-12
• 期刊: 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
• 作者: Mohammad Alzgool;Yu Tian;B. Davaji;Shahrzad Towfighian

Genetic Algorithm Application to Enlarge Travel Range for Multi-Electrode MEMS Resonators

应用遗传算法扩大多电极 MEMS 谐振器的行程范围

• DOI: 10.1109/sensors52175.2022.9967334
• 发表时间: 2022
• 期刊: 2022 IEEE Sensors
• 作者: Tian, Yu;Miles, Ronald N;Towfighian, Shahrzad
• 通讯作者: Towfighian, Shahrzad