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Uniting Lithographic Patterning and Topochemical Reaction for Processing of Functional Oxides for Electronic Applications

结合光刻图案化和拓扑化学反应来加工电子应用的功能氧化物

基本信息

批准号：
2001888
负责人：
Steven May
金额：
$ 32.91万
依托单位：
Drexel University
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2020
资助国家：
美国
起止时间：
2020-07-01 至 2024-06-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=2001888&HistoricalAwards=false
关键词：
Uniting Lithographic Patterning Topochemical Reaction

项目摘要

This grant supports research into developing and understanding a new nanomanufacturing process to fabricate novel patterned materials, thereby generating fundamental innovations in advanced manufacturing and advancing the nation’s technological capabilities. Patterned materials are essential components in numerous societally-critical applications including electronics, communications, data storage, and sensing. However, current approaches to processing these structures result in patterns that are static and often limited in their functionality. This award supports fundamental research to provide the knowledge needed to realize new classes of patterned materials with properties that cannot be accessed through currently available processing approaches. This new manufacturing strategy combines industrially-relevant and scalable processes used to pattern materials with low-temperature chemical reactions to create oxide-based structures with tunable properties that can be reconfigured in response to external stimuli. The dynamic nature of these structures could serve as a platform for a new generation of adaptive devices. Therefore, the new manufacturing insights and approaches resulting from this project benefit the U.S. economy and society. The project provides research training to students on a variety of experimental skills sought by industry and engages local high school students in promoting engineering fields.Topochemical transformations are solid-state chemical reactions that alter composition but retain central features of the material structure. When carried out on lithographically-defined areas, these reactions enable the creation of oxide-based lateral patterns with controlled geometries, diverse chemistries, and new functionality not afforded by existing processing routes. However, the ability to harness the full technological potential of this manufacturing strategy rests on developing a fundamental scientific understanding of numerous aspects of the process. This research addresses these knowledge gaps to better understand the relevant mechanisms and kinetic limitations. The research team identifies the relationships between material composition, crystal structure and processing parameters by systematically varying the reactions on different patterned metal oxides. The team establishes the kinetic factors that set the ultimate limit on feature sizes in nanoscale patterns and enable the formation of non-binary structures and elucidate the stability and reconfigurability of the structures under applied electric fields and through sequential reaction steps. In doing so, the research enables manufacturing of lateral structures including functional oxide and oxyfluoride ABO3/ABO2F, e.g., SrFeO3/SrFeO2F patterns that facilitate applications such as reconfigurable or transient electronics, diffraction gratings, and sensors.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

该补助金支持研究开发和理解一种新的纳米制造工艺，以制造新型图案化材料，从而在先进制造业中产生根本性创新，并提高国家的技术能力。图案化材料是许多社会关键应用中的重要组成部分，包括电子，通信，数据存储和传感。然而，当前处理这些结构的方法导致模式是静态的，并且其功能常常受到限制。该奖项支持基础研究，以提供实现新类型图案化材料所需的知识，这些材料具有无法通过当前可用的加工方法获得的特性。这种新的制造策略结合了工业相关和可扩展的工艺，用于通过低温化学反应对材料进行图案化，以创建具有可调特性的氧化物基结构，这些结构可以根据外部刺激进行重新配置。这些结构的动态特性可以作为新一代自适应设备的平台。因此，该项目产生的新的制造见解和方法有利于美国经济和社会。该项目为学生提供工业界所需的各种实验技能的研究培训，并让当地高中生参与促进工程领域的发展。局部化学转化是改变成分但保留材料结构中心特征的固态化学反应。当在光刻限定的区域上进行时，这些反应使得能够产生具有受控几何形状、不同化学性质和现有处理路线无法提供的新功能的基于氧化物的横向图案。然而，利用这种制造战略的全部技术潜力的能力取决于对该过程的许多方面的基本科学理解。这项研究解决了这些知识差距，以更好地了解相关的机制和动力学限制。研究小组通过系统地改变不同图案化金属氧化物上的反应来确定材料成分、晶体结构和工艺参数之间的关系。该团队建立了动力学因素，这些因素为纳米级图案中的特征尺寸设定了最终限制，并使非二元结构的形成成为可能，并阐明了在施加电场和顺序反应步骤下结构的稳定性和可重构性。在这样做的过程中，该研究能够制造包括功能氧化物和氟氧化物ABO 3/ABO 2F的横向结构，例如，该奖项反映了NSF的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。