Wafer-Scale Manufacturing of Ultrathin Nanoporous Transition Metal Dichalcogenide Membranes Using Chemical Etching for Water Purification and Other Applications

使用化学蚀刻进行水净化和其他应用的超薄纳米多孔过渡金属二硫属化物膜的晶圆级制造

基本信息

批准号：
2002477
负责人：
Marija Drndic
金额：
$ 64.19万
依托单位：
University of Pennsylvania
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2020
资助国家：
美国
起止时间：
2020-07-01 至 2024-06-30
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=2002477&HistoricalAwards=false
关键词：
Wafer Scale Manufacturing Ultrathin Nanoporous

项目摘要

This advanced manufacturing grant supports research in novel ultrathin membranes for efficient water purification. This work focuses on large-area manufacturing of ultra-thin transition metal dichalcogenide membranes to improve the precision of water filtration and treatment. This project creates new fundamental knowledge through the understanding of the mechanisms of water molecule and ion motion at atomic scales in these improved membranes. An important motivation for decreasing the membrane thickness is that it leads to increased water fluxes. The membranes are made by chemical vapor deposition of transition metal dichalcogenides on foils, followed by chemical etching in acids to make them nanoporous. Besides water purification, this work is anticipated to impact other applications where membranes are used such as gas and biomolecule filtration. This project leverages research outcomes for education and outreach. Outreach to the broad nanomaterials community and to membrane industry involves sharing of manufacturing processing data. The educational component provides innovative multidisciplinary learning opportunities for students at all levels at the crossroads of solid-state physics, materials science and high-resolution microscopy. Student outreach includes presentations to high school students and participation in STEM activities.This grant supports advanced manufacturing of two-dimensional (2D) nanomaterials towards creating novel cm-scale membranes, in which monolayers are supported by robust few-layer membranes. Two-dimensional nanomaterials, such as, transition metal dichalcogenides, have demonstrated potential for many applications from defect-free materials for electronics to defect-engineered materials for membrane separation technologies like water desalination and gas separation. Current fabrication of 2D nanoporous membranes is often limited in terms of control or rely on the use of ion and electron beam irradiation, which is slow and costly. This work uses simple chemical etching to make holes in membranes using an industrial wet etchant, leading to controllable membrane porosity and economic manufacturing. This research answers key scientific questions about fundamental properties of ion flow as a function of membrane properties, thickness, pore size and density towards efficient water desalination in comparison with state-of-the-art polymer membranes. The research approach encompasses chemical vapor deposition growth of single- and few-atom thick 2D nanomaterials up to 4-inch wafer-scales, the optimization of 2D nanomaterials transfer on to apertures to make 2D nanomaterial membranes, followed by wet etching and transport studies to understand fundamental pore-forming and ion transport mechanisms. The research involves optimizing the manufacture of ultrathin membranes and maximizing water flow while retaining membrane integrity. This work further develops the instrumentation towards scale-up via roll-to-roll nanomanufacturing of the nanoporous membranes.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

这项先进的制造赠款支持新型超薄膜的研究，以有效地净化水。这项工作着重于超薄过渡金属二分法膜膜的大面积制造，以提高水过滤和处理的精度。该项目通过理解这些改善的膜上原子尺度下的水分子和离子运动的机制来创造新的基本知识。减少膜厚度的重要动机是导致水通量增加。膜是通过化学蒸气在箔上的化学蒸气沉积在箔上，然后在酸中进行化学蚀刻，使其纳米孔。除了净水外，预计这项工作还会影响使用膜的其他应用，例如气体和生物分子过滤。该项目利用研究成果进行教育和外展。向广泛的纳米材料社区和膜行业推广涉及共享制造加工数据。该教育组成部分为固态物理学，材料科学和高分辨率显微镜十字路口的各级学生提供了创新的多学科学习机会。学生外展活动包括向高中生的演讲和参加STEM活动。这笔赠款支持高级制造二维（2D）纳米材料，以创建新型的CM尺度膜，其中单层由强大的几层层膜提供支持。二维纳米材料（例如过渡金属二核苷）表现出了许多应用的潜力，从电子物质的无缺陷材料到缺陷工程材料，用于膜分离技术，例如水脱盐和气体分离。当前的2D纳米孔膜的制造通常在控制方面受到限制，或依赖于使用离子和电子束照射，这是缓慢且昂贵的。这项工作使用简单的化学蚀刻来使用工业湿法制造膜上的孔，从而导致可控的膜孔隙和经济制造。这项研究回答了有关离子流的基本特性与膜特性的函数，厚度，孔径和密度相比，与最先进的聚合物膜相比，有关离子流的基本特性的关键科学问题。该研究方法涵盖了化学蒸气沉积的单个和少量厚的厚2D纳米材料的生长，最高为4英寸的晶圆尺度，2D纳米材料的优化转移到孔径上，以制造2D纳米材料膜，然后进行潮湿的蚀刻和运输研究，然后进行湿的运输研究，以了解基本的孔隙式运输机构。该研究涉及优化超薄膜的生产，并在保留膜完整性的同时最大化水流。这项工作进一步开发了通过纳米多孔膜的滚动纳米制造来扩大扩大的仪器。该奖项反映了NSF的法定任务，并使用基金会的知识分子优点和更广泛的影响审查标准，被认为值得通过评估。

项目成果

期刊论文数量（4）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Ultrafast Polymer Dynamics through a Nanopore

DOI：
10.1021/acs.nanolett.2c03546
发表时间：
2022-10-31
期刊：
NANO LETTERS
影响因子：
10.8
作者：
Lin, Chih-Yuan;Fotis, Riley;Drndic, Marija
通讯作者：
Drndic, Marija

Gas flow through atomic-scale apertures

DOI：
10.1126/sciadv.abc7927
发表时间：
2020-12-01
期刊：
SCIENCE ADVANCES
影响因子：
13.6
作者：
Thiruraman, Jothi Priyanka;Dar, Sidra Abbas;Radha, Boya
通讯作者：
Radha, Boya

Computer vision AC-STEM automated image analysis for 2D nanopore applications

适用于 2D 纳米孔应用的计算机视觉 AC-STEM 自动图像分析

DOI：
10.1016/j.ultramic.2021.113249
发表时间：
2021
期刊：
Ultramicroscopy
影响因子：
2.2
作者：
Chen, Joshua;Balan, Adrian;Masih Das, Paul;Thiruraman, Jothi Priyanka;Drndić, Marija
通讯作者：
Drndić, Marija