I-Corps: Real-time characterization using in-line angular scatterometry during high-speed roll-to-roll fabrication processes

I-Corps:在高速卷对卷制造过程中使用在线角散射测量进行实时表征

基本信息

  • 批准号:
    2041676
  • 负责人:
  • 金额:
    $ 5万
  • 依托单位:
  • 依托单位国家:
    美国
  • 项目类别:
    Standard Grant
  • 财政年份:
    2021
  • 资助国家:
    美国
  • 起止时间:
    2021-01-01 至 2021-10-31
  • 项目状态:
    已结题

项目摘要

The broader impact/commercial potential of this I-Corps project provides real-time measurements to optimize yield and reduce waste in novel roll-to-roll (R2R) manufacturing processes. The proposed high-speed technology can perform the critical non-contact, real-time measurements without interfering with high-speed R2R fabrication processes. Commonly used analytical tools use statistical analysis procedures; none of them can be implemented during real-time R2R fabrication systems due to their large-size and vacuum conditions. The proposed technology closes the gap between new fabrication processes and systems that measure in real time. This I-Corps project focuses on the commercialization of metrology technology for novel fabrication processes used in nano-technology products (e.g. nano-imprint lithography, roll-to-roll, and wafer-scale). The proposed in-line optical angular scatterometer provides real-time metrology without interfering with fabrication processes. Optical Angular Scatterometry offers enough resolution to characterize structures down to approximately 20 nm and 24 nm (pitch size) for pattern metallic and photoresist nanostructures. Projections of sensitivity show enough resolution and sensitivity for dimensions down to approximately 10 nm. The proposed scatterometer system has been demonstrated on a moving substrate at a speed of 50 cm/s, well above currently projected roll-to-roll manufacturing speeds. Various 1D, 2D, and 3D patterns have been studied in good agreement with both static off-line scatterometers and SEM measurements.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.
I-Corps项目的广泛影响/商业潜力提供实时测量,以优化新型卷对卷(R2R)制造工艺的产量并减少浪费。提出的高速技术可以在不干扰高速R2R制造工艺的情况下进行关键的非接触实时测量。常用的分析工具采用统计分析程序;由于它们的大尺寸和真空条件,它们都不能在实时R2R制造系统中实现。提出的技术缩小了新的制造工艺和实时测量系统之间的差距。这个I-Corps项目的重点是将计量技术商业化,用于纳米技术产品的新型制造工艺(例如纳米压印、卷对卷和晶圆级)。所提出的直列光学角散射计提供实时测量而不干扰制造过程。光学角散射测量法提供了足够的分辨率来表征大约20 nm和24 nm(间距尺寸)的图案金属和光抗蚀剂纳米结构。灵敏度的投影显示出足够的分辨率和灵敏度,尺寸低至大约10纳米。所提出的散射计系统已在移动基板上以50厘米/秒的速度进行了演示,远远高于目前预计的卷对卷制造速度。各种1D, 2D和3D模式的研究与静态离线散射计和SEM测量结果一致。该奖项反映了美国国家科学基金会的法定使命,并通过使用基金会的知识价值和更广泛的影响审查标准进行评估,被认为值得支持。

项目成果

期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)

数据更新时间:{{ journalArticles.updateTime }}

{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

数据更新时间:{{ journalArticles.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ monograph.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ sciAawards.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ conferencePapers.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ patent.updateTime }}

Juan Faria-Briceno其他文献

Juan Faria-Briceno的其他文献

{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

相似国自然基金

Immuno-Real Time PCR法精确定量血清MG7抗原及在早期胃癌预警中的价值
  • 批准号:
    30600737
  • 批准年份:
    2006
  • 资助金额:
    22.0 万元
  • 项目类别:
    青年科学基金项目
无色ReAl3(BO3)4(Re=Y,Lu)系列晶体紫外倍频性能与器件研究
  • 批准号:
    60608018
  • 批准年份:
    2006
  • 资助金额:
    28.0 万元
  • 项目类别:
    青年科学基金项目

相似海外基金

I-Corps: Translation Potential of Simultaneous Musculoskeletal Assessment with Real-Time Ultrasound
I-Corps:实时超声同步肌肉骨骼评估的转化潜力
  • 批准号:
    2413735
  • 财政年份:
    2024
  • 资助金额:
    $ 5万
  • 项目类别:
    Standard Grant
I-Corps: Translation Potential of Real-time, Ultrasensitive Electrical Transduction of Biological Binding Events for Pathogen and Disease Detection
I-Corps:生物结合事件的实时、超灵敏电转导在病原体和疾病检测中的转化潜力
  • 批准号:
    2419915
  • 财政年份:
    2024
  • 资助金额:
    $ 5万
  • 项目类别:
    Standard Grant
I-Corps: Real-time visual feedback for speech learning
I-Corps:语音学习的实时视觉反馈
  • 批准号:
    2408991
  • 财政年份:
    2024
  • 资助金额:
    $ 5万
  • 项目类别:
    Standard Grant
I-Corps: Hardware Accelerators for Real-Time Decision Making at the Edge
I-Corps:用于边缘实时决策的硬件加速器
  • 批准号:
    2346620
  • 财政年份:
    2023
  • 资助金额:
    $ 5万
  • 项目类别:
    Standard Grant
I-Corps: Real-time anxiety detection and modulation using wearables
I-Corps:使用可穿戴设备进行实时焦虑检测和调节
  • 批准号:
    2243335
  • 财政年份:
    2023
  • 资助金额:
    $ 5万
  • 项目类别:
    Standard Grant
I-Corps: Web-based Platform for Real-time Crime Mapping
I-Corps:基于网络的实时犯罪地图平台
  • 批准号:
    2329738
  • 财政年份:
    2023
  • 资助金额:
    $ 5万
  • 项目类别:
    Standard Grant
I-Corps: Energy conservation network software that simultaneously audits, monitors, and manages energy use in buildings in real-time
I-Corps:节能网络软件,可同时实时审核、监控和管理建筑物的能源使用情况
  • 批准号:
    2227513
  • 财政年份:
    2022
  • 资助金额:
    $ 5万
  • 项目类别:
    Standard Grant
I-Corps: Commercialization of a real-time, palm-size, low-cost, and wireless SARS-COV-II detector
I-Corps:实时、手掌大小、低成本、无线 SARS-COV-II 探测器的商业化
  • 批准号:
    2230853
  • 财政年份:
    2022
  • 资助金额:
    $ 5万
  • 项目类别:
    Standard Grant
I-Corps: A wearable device for continuous, real-time, and multiplexed monitoring of biomarkers present in interstitial fluid
I-Corps:一种可穿戴设备,用于连续、实时和多重监测间质液中存在的生物标志物
  • 批准号:
    2218926
  • 财政年份:
    2022
  • 资助金额:
    $ 5万
  • 项目类别:
    Standard Grant
I-Corps: Wearable lighting assist tool for real-time tracking and monitoring of lighting conditions and delivery of health information
I-Corps:可穿戴照明辅助工具,用于实时跟踪和监控照明条件并传递健康信息
  • 批准号:
    2147618
  • 财政年份:
    2021
  • 资助金额:
    $ 5万
  • 项目类别:
    Standard Grant
{{ showInfoDetail.title }}

作者:{{ showInfoDetail.author }}

知道了