I-Corps: Real-time characterization using in-line angular scatterometry during high-speed roll-to-roll fabrication processes

I-Corps项目更广泛的影响/商业潜力提供了实时测量，以优化产量并减少新型辊到辊(R2R)制造工艺中的浪费。所提出的高速技术可以在不干扰高速R2R制造工艺的情况下执行关键的非接触式实时测量。常用的分析工具使用统计分析程序；由于其大尺寸和真空条件，这些工具都不能在实时R2R制造系统中实施。这项拟议的技术缩小了新的制造工艺和实时测量系统之间的差距。该i-Corps项目专注于纳米技术产品(例如，纳米压印光刻、卷对卷和晶片规模)中使用的新型制造工艺的计量技术的商业化。提出的直列式光学角散射计提供了实时测量，而不干扰制造工艺。光学角度散射法提供了足够的分辨率来表征图形金属和光致抗蚀剂纳米结构的低至约20 nm和24 nm(节距尺寸)的结构。灵敏度的投影显示了足够的分辨率和灵敏度，尺寸小到大约10纳米。建议的散射计系统已经在移动的基板上以50厘米/S的速度进行了演示，远远高于目前预计的卷对卷制造速度。各种一维、二维和三维模式的研究与静态离线散射计和扫描电子显微镜测量都很好地一致。该奖项反映了NSF的法定使命，并通过使用基金会的智力优势和更广泛的影响审查标准进行评估，被认为值得支持。

The broader impact/commercial potential of this I-Corps project provides real-time measurements to optimize yield and reduce waste in novel roll-to-roll (R2R) manufacturing processes. The proposed high-speed technology can perform the critical non-contact, real-time measurements without interfering with high-speed R2R fabrication processes. Commonly used analytical tools use statistical analysis procedures; none of them can be implemented during real-time R2R fabrication systems due to their large-size and vacuum conditions. The proposed technology closes the gap between new fabrication processes and systems that measure in real time. This I-Corps project focuses on the commercialization of metrology technology for novel fabrication processes used in nano-technology products (e.g. nano-imprint lithography, roll-to-roll, and wafer-scale). The proposed in-line optical angular scatterometer provides real-time metrology without interfering with fabrication processes. Optical Angular Scatterometry offers enough resolution to characterize structures down to approximately 20 nm and 24 nm (pitch size) for pattern metallic and photoresist nanostructures. Projections of sensitivity show enough resolution and sensitivity for dimensions down to approximately 10 nm. The proposed scatterometer system has been demonstrated on a moving substrate at a speed of 50 cm/s, well above currently projected roll-to-roll manufacturing speeds. Various 1D, 2D, and 3D patterns have been studied in good agreement with both static off-line scatterometers and SEM measurements.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.