Dielectric control of high Q nanomechanical resonators (A07)

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We explore nanomechanical resonators fabricated from strongly pre-stressed material offering a high mechanical qual-ity factor. Besides the established amorphous silicon nitride, we will focus on crystalline InGaP resonators in which dissipation from configurational material defects should be suppressed. Refined dielectric control schemes based multi-electrode layouts will be developed to implement tunable coupling and to induce bistability. Finally, the nonlinear dy-namics of two coupled nanomechanical modes under large amplitude vibration will be studied to investigate phenomena such as self-oscillation, synchronization, parametric resonance and injection locking.