MRI: Acquisition of a versatile direct write micro patterning system for research and education

MRI:购买用于研究和教育的多功能直写微图案系统

基本信息

  • 批准号:
    1040344
  • 负责人:
  • 金额:
    $ 28.78万
  • 依托单位:
  • 依托单位国家:
    美国
  • 项目类别:
    Standard Grant
  • 财政年份:
    2011
  • 资助国家:
    美国
  • 起止时间:
    2011-01-01 至 2012-12-31
  • 项目状态:
    已结题

项目摘要

1040344AustinThe Integrated Microfabrication Laboratory (IML) is a 2,500 square foot Class 10 cleanroom on the Brigham Young University (BYU) campus. It is an open access facility that is freely available for use by anyone affiliated with the university. The facility supports externally- and internally-funded research projects, and both undergraduate and graduate hands-on instructional laboratories. Its toolset is focused on micro and nanofabrication processes for device fabrication in areas such as photonics, MEMS microfluidics, and sensors. The available processes include photolithography, thin film deposition, chemical-mechanical planarization, reactive ion etching, and various types of metrology. However, many current research projects require lithography on non-planar substrates, a capability they do not currently have. Other projects require writing in three dimensions, which also cannot be done using existing instrumentation. The goal of this proposal is the acquisition of a maskless, 3-dimensional direct-write microlithography system to address these critical needs. Direct-write lithography is a revolutionary new technique in which substrates are patterned using optical imaging rather than using photomasks. The addition of such an instrument as specified in this proposal would add state-of-the-art maskless lithography capability to the IML and complement existing infrastructure.
1040344奥斯汀集成微加工实验室(IML)是一个2,500平方英尺的10级洁净室在杨百翰大学(杨百翰大学)校园。它是一个开放的设施,可供任何与大学有关联的人免费使用。该设施支持外部和内部资助的研究项目,以及本科生和研究生动手教学实验室。其工具集专注于光子学、MEMS微流体和传感器等领域器件制造的微米和纳米制造工艺。可用的工艺包括光刻、薄膜沉积、化学机械平坦化、反应离子蚀刻和各种类型的计量。然而,许多当前的研究项目需要在非平面衬底上进行光刻,这是他们目前不具备的能力。其他项目需要在三维中进行写入,这也无法使用现有的仪器来完成。这项建议的目标是收购一个无掩模,三维直写微光刻系统,以解决这些关键的需求。直写光刻是一种革命性的新技术,其中使用光学成像而不是使用光掩模来图案化衬底。增加本提案中规定的这种仪器将为IML增加最先进的无掩模光刻能力,并补充现有的基础设施。

项目成果

期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)

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Daniel Austin其他文献

Health care resource utilization in the 2 years prior to total shoulder arthroplasty
全肩关节置换术前 2 年的医疗资源利用情况
  • DOI:
    10.1016/j.jse.2024.11.033
  • 发表时间:
    2025-08-01
  • 期刊:
  • 影响因子:
    2.900
  • 作者:
    Julia Schwarz;Yiqiao Bao;Ryan Dean;Alexandra Zagaria;John-Erik Bell;Daniel Austin
  • 通讯作者:
    Daniel Austin
Monomials and Basin Cylinders for Network Dynamics
网络动力学的单项式和盆柱面
A state-space model for finger tapping with applications to cognitive inference
手指敲击的状态空间模型及其在认知推理中的应用
“Are You Sure?”
“你确定吗?”
  • DOI:
  • 发表时间:
    2016
  • 期刊:
  • 影响因子:
    3
  • 作者:
    Katherine V Wild;N. Mattek;Daniel Austin;J. Kaye
  • 通讯作者:
    J. Kaye
Air pressure propagation through Wind Cave and Jewel Cave: How do pressure waves travel through barometric caves?
气压通过风洞和宝石洞传播:压力波如何穿过气压洞穴?

Daniel Austin的其他文献

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{{ truncateString('Daniel Austin', 18)}}的其他基金

Collaborative Research: Development and Evaluation of a Miniature Coaxial Ion Trap Mass Analyzer for Portable Chemical Analysis
合作研究:用于便携式化学分析的微型同轴离子阱质量分析仪的开发和评估
  • 批准号:
    2003667
  • 财政年份:
    2020
  • 资助金额:
    $ 28.78万
  • 项目类别:
    Standard Grant
Miniaturized mass spectrometry using lithographically patterned electrodes
使用光刻图案化电极的小型化质谱分析
  • 批准号:
    1404886
  • 财政年份:
    2014
  • 资助金额:
    $ 28.78万
  • 项目类别:
    Standard Grant

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