Robust Control of Electrostatic Microactuators

静电微执行器的鲁棒控制

• 批准号: DP0774287
• 负责人: Prof S. O. Reza Moheimani
• 金额: $ 61.2万
• 依托单位: The University of Newcastle
• 依托单位国家: 澳大利亚
• 项目类别: Discovery Projects
• 财政年份: 2007
• 资助国家: 澳大利亚
• 起止时间: 2007-01-15 至 2012-12-31
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/DP0774287
• 关键词: Robust; Control; Electrostatic; Microactuators

This proposal seeks to address a number of fundamental problems associated with electrostatic microactuators that form an integral part of microelectromechanical systems (MEMS). Performance of these microactuators is limited due to the presence of a specific form of nonlinearity in their dynamics. In this research advanced and innovative feedback controllers will be developed to improve operational performance of such microactuators. The global MEMS market is projected to increase from $10B in 2005 to $40B in 2015. This project will enhance Australia's standing in this important high-tech field.

该提案旨在解决与静电微致动器相关的许多基本问题，静电微致动器构成微机电系统 (MEMS) 的组成部分。由于其动力学中存在特定形式的非线性，这些微执行器的性能受到限制。在这项研究中，将开发先进和创新的反馈控制器，以提高此类微执行器的操作性能。全球MEMS市场预计将从2005年的10B美元增长到2015年的40B美元。该项目将提高澳大利亚在这一重要高科技领域的地位。