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Robust Control of Electrostatic Microactuators

Robust Control of Electrostatic Microactuators
静电微执行器的鲁棒控制
批准号：
DP0774287
负责人：
Prof S. O. Reza Moheimani
金额：
$61.2万
依托单位：
The University of Newcastle
依托单位国家：
澳大利亚
项目类别：
Discovery Projects
财政年份：
2007
资助国家：
澳大利亚
项目状态：
已结题
起止时间：
2007-01-15 至 2012-12-31
来源：
https://dataportal.arc.gov.au/RGS/Web/Grants/DP0774287
关键词：
RobustControlElectrostaticMicroactuators

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中文摘要
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英文摘要
This proposal seeks to address a number of fundamental problems associated with electrostatic microactuators that form an integral part of microelectromechanical systems (MEMS). Performance of these microactuators is limited due to the presence of a specific form of nonlinearity in their dynamics. In this research advanced and innovative feedback controllers will be developed to improve operational performance of such microactuators. The global MEMS market is projected to increase from $10B in 2005 to $40B in 2015. This project will enhance Australia's standing in this important high-tech field.
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国内基金
海外基金
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