Low voltage actuation and control of an electrostatic micromirror

静电微镜的低压驱动和控制

• 批准号: 452230-2013
• 负责人: AbdelRahman, Eihab
• 金额: $ 1.82万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2013
• 资助国家: 加拿大
• 起止时间: 2013-01-01 至 2014-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=540725
• 关键词: Low; voltage; actuation; control; electrostatic

Electrostatic micromirrors are a valuable tool for light beam steering. They enable the realization of small and light weight projection systems. The main hurdle in their utilization is that conventional electrostatic micromirrors require high actuation voltage supplied by high voltage amplifiers and suffer from a pull-in (snap-down) phenomenon that limits their operation range to less than 44 % of maximum angular displacement.

静电微镜是一种有价值的光束转向工具。它们使得能够实现小且轻重量的投影系统。它们的使用中的主要障碍是常规静电微镜需要由高压放大器提供的高致动电压，并且遭受将它们的操作范围限制到小于最大角位移的44%的拉入（骤停）现象。