High-precision Pico-AFM for nanometrology and nanofabrication

该项目的目标是一个高精度的Pico-AFM与主动探针的高速测量和大面积的纳米加工。与热机械致动，压阻偏转检测和长寿命的金刚石尖端，结合纳米定位和纳米测量机的主动杠杆，提供了一个高潜力的纳米测量机的整个运动范围内的亚纳米分辨率的纳米结构的测量和检查。对于高精度的AFM测量，必须保证悬臂梁偏转的可追溯性。这将通过在第一个项目阶段设计的光学皮科位置探测器来实现。

The object of the project is a high-precision Pico-AFM with active probes for high-speed measurements and nanofabrication in large areas. The active cantilevers with thermomechanical actuation, piezoresistive deflection detection and long-lived diamond tips, in combination with the nanopositioning and nanomeasuring machine, offer a high potential for the measurement and inspection of nanostructures with subnanometer resolution within the entire range of motion of the nanomeasuring machine. For high-precision AFM measurements, the traceability of the cantilever deflection is to be guaranteed. This will be achieved by means of the optical pico position detector designed in the first project phase.