High-precision Pico-AFM for nanometrology and nanofabrication

用于纳米计量学和纳米加工的高精度 Pico-AFM

• 批准号: 274917136
• 负责人: Professor Dr.-Ing. Eberhard Manske
• 金额: --
• 依托单位: Institut für Prozessmess- und Sensortechnik
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2015
• 资助国家: 德国
• 起止时间: 2014-12-31 至 2020-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/274917136?language=en
• 关键词: precision; Pico; AFM; nanometrology; nanofabrication

The object of the project is a high-precision Pico-AFM with active probes for high-speed measurements and nanofabrication in large areas. The active cantilevers with thermomechanical actuation, piezoresistive deflection detection and long-lived diamond tips, in combination with the nanopositioning and nanomeasuring machine, offer a high potential for the measurement and inspection of nanostructures with subnanometer resolution within the entire range of motion of the nanomeasuring machine. For high-precision AFM measurements, the traceability of the cantilever deflection is to be guaranteed. This will be achieved by means of the optical pico position detector designed in the first project phase.

该项目的目标是配备有源探针的高精度 Pico-AFM，用于大面积的高速测量和纳米加工。具有热机械驱动、压阻偏转检测和长寿命金刚石尖端的主动悬臂，与纳米定位和纳米测量机相结合，为在纳米测量机的整个运动范围内以亚纳米分辨率测量和检查纳米结构提供了巨大的潜力。对于高精度AFM测量，需要保证悬臂梁挠度的可追溯性。这将通过项目第一阶段设计的光学微型位置探测器来实现。

项目成果

Nanopositioning and fabrication using the Nano Fabrication Machine with a positioning range up to ⊘100 mm

• DOI: 10.1117/12.2583703
• 发表时间: 2021-02
• 期刊: Advanced Electronic Materials
• 影响因子: 6.2
• 作者: J. Stauffenberg;C. Reuter;I. Ortlepp;M. Holz;D. Dontsov;C. Schäffel;Jens-Peter Zöllner;I. Rangelow;S. Strehle;E. Manske

Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)

纳米加工机（NFM-100）定位精度研究

• DOI: 10.1515/teme-2021-0079
• 期刊: tm - Technisches Messen
• 作者: Jaqueline Stauffenberg;Ingo Ortlepp;Ulrike Blumröder;Denis Dontsov;Christoph Schäffel;Mathias Holz;Ivo W. Rangelow;Eberhard Manske
• 通讯作者: Eberhard Manske