VO2-based thin film shape memory nanoactuators

基于VO2的薄膜形状记忆纳米执行器

• 批准号: 278400745
• 负责人: Professor Dr. Manfred Kohl
• 金额: --
• 依托单位: Institut für Mikrostrukturtechnik (IMT)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 资助国家: 德国
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/278400745?language=en
• 关键词: VO2; based; thin; film; shape

This proposal represents the extension of the project “VO2-Based Thin Film Shape Memory Nanoactuators”. During the previous project, (V-M)O2 (M=3rd metals) thin-film materials libraries have been synthesized by combinatorial co-sputtering with their phase transformation properties and mechanical performances characterized by high-throughput methods. Furthermore, novel nanotechnology processes have been established to obtain VO2-based nanoactuators with dimensions down to 100 nm. A size effect in the electrical resistance change upon the phase transformation of the nanoactuator has been identified. Our research demonstrates the large potential of VO2-based devices for electro-thermo-mechanical as well as thermochromic switching and tuning at the nanoscale, which could meet the urgent need of compact multifunctional solutions in the rapidly evolving field of nanophotonics. The project extension addresses this challenge and goes well beyond the current state-of-the art combining two interlinked parts: Subproject I (RUB) will explore up to quaternary (V-M1-M2)O2 systems in order to improve the mechanical performance of the thin film (e.g., strain and stress change) and to tailor the phase transformation properties. The shape memory oxide ZrO2 will be combined with VO2 to the new system (V-Zr)O2 aiming at an extended stress change and working-temperature range of up to 200 °C. Based on the new material systems, subproject II (KIT) will develop novel nanoactuator designs with enhanced functionality and related fabrication processes for tailoring of out-of-plane curvature and bistable operation. The application of VO2-based films in the field of photonic waveguide switching will be exploited based on the electro-thermo-mechanical and the thermochromic effect as well as alternative electro-optical and all-optical concepts.

该提案代表了“基于VO 2的薄膜形状记忆纳米执行器”项目的扩展。在上一个项目中，（V-M）O2（M=第三金属）薄膜材料库已合成的组合共溅射，其相变特性和机械性能的高通量的方法表征。此外，已经建立了新的纳米技术工艺，以获得尺寸低至100 nm的基于VO 2的纳米致动器。已经确定的纳米致动器的相变后的电阻变化的尺寸效应。我们的研究表明，基于VO 2的器件在纳米尺度上具有很大的电-热-机械以及热致变色开关和调谐潜力，可以满足快速发展的纳米光子学领域对紧凑型多功能解决方案的迫切需求。该项目扩展解决了这一挑战，并远远超出了目前最先进的技术，结合了两个相互关联的部分：子项目I（RUB）将探索四元（V-M1-M2）O2系统，以提高薄膜的机械性能（例如，应变和应力变化）和定制相变性质。形状记忆氧化物ZrO 2将与VO 2结合成新的（V-Zr）O2系统，旨在扩大应力变化和高达200 °C的工作温度范围。基于新的材料系统，子项目II（KIT）将开发具有增强功能的新型纳米致动器设计和相关的制造工艺，用于定制平面外曲率和可调操作。基于电-热-机械和热致变色效应以及可替代的电光和全光概念，将开发基于VO 2的薄膜在光子波导开关领域中的应用。