Ion-beam induced rippling at the amorphous-crystalline interface in silicon

硅中非晶-晶体界面处的离子束诱发波纹

• 批准号: 30757250
• 负责人: Dr. Jörg Grenzer
• 金额: --
• 依托单位: Institut für Ionenstrahlphysik und Materialforschung
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2006
• 资助国家: 德国
• 起止时间: 2005-12-31 至 2009-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/30757250?language=en
• 关键词: Ion; beam; induced; rippling; amorphous

rradiation. In the second period of the project, i.e. after finding of the optimum condition for crystalline ripple formation, we plan to vary the ion beam energy in a wider range (5 keV < E < 100 keV) in order to tune the depth of the buried ripples and to study energy dependent processes. It might become necessary to apply this technique to create buried lateral mesoscopic and/or nano structures in Si/SiGe quantum well structures. For basic science investigation such SiGe wells can be used as marker layers to probe the depth of ion beam erosion and the strain field inside nanostructure by means of X-ray analysis. Finally, deep understanding of irradiation process, considering initial anisotropic structure, and the reasons of an enormous mass transport due to irradiation and detailed features of ripple formation will provide unique possibility of nanopatterning and production of novel nanostructured materials.The project will be carried out in close cooperation between the solid state physics group at Siegen university (X-ray investigations, FEM) with FZ Rossendorf (Ion beam treatment, AFM, TRIM) accompanied by ID1 group at European Synchrotron radiation Facility (ESRF), where most of the X-ray scattering experiments will be performed.

辐射。在项目的第二阶段，即在找到晶体涟漪形成的最佳条件后，我们计划在更宽的范围内（5 keV < E < 100 keV）改变离子束能量，以调整掩埋波纹的深度并研究能量依赖过程。应用这种技术在Si/SiGe量子阱结构中产生掩埋的横向介观和/或纳米结构可能是必要的。在基础科学研究中，这种SiGe威尔斯阱可以作为标记层，通过X射线分析来探测离子束侵蚀的深度和纳米结构内部的应变场。最后，深入理解辐照过程，考虑初始各向异性结构，以及由于辐照引起的巨大质量传输的原因和涟漪形成的详细特征，将为纳米图案化和新型纳米结构材料的生产提供独特的可能性。该项目将与锡根大学固态物理组密切合作进行（X射线研究，FEM）与FZ Rossendorf（离子束处理，AFM，TRIM）以及欧洲同步辐射设施（ESRF）的ID 1组，在那里将进行大多数X射线散射实验。