Selective growth of ultra-long grain in metal thin film for microelectronic application

微电子应用金属薄膜中超长晶粒的选择性生长

• 批准号: 18K14139
• 负责人: Pham Hoang Anh
• 金额: $ 1.75万
• 依托单位: Shimane University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Early-Career Scientists
• 财政年份: 2018
• 资助国家: 日本
• 起止时间: 2018-04-01 至 2022-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-18K14139/
• 关键词: Thin film; Single Crystal; Laser annealing; Metal film; Crystal orientation; Crystal growth; Microstructure control; Characterization; Aluminum film; Gold film; Selective growth; Single crystal; Selective grain growth; Crystallization

项目成果

Rapid annealing of metal thin films by micron chevron-shaped laser beam scanning

微米人字形激光束扫描金属薄膜快速退火

• 发表时间: 2020
• 作者: A.H. Pham;N. Fukunaga;W. Yeh;S. Morito;T. Ohba
• 通讯作者: T. Ohba

Orientation selection of single-grain crystal grown in Au thin films by micron chevron-shaped laser beam scanning

微米人字形激光束扫描在金薄膜中生长单晶晶体的取向选择

• 发表时间: 2022
• 作者: Nishio Kazunori;Horiba Koji;Nakamura Naoto;Kitamura Miho;Kumigashira Hiroshi;Shimizu Ryota;Hitosugi Taro;Pham Hoang Anh
• 通讯作者: Pham Hoang Anh

Rapid annealing of Au thin films by micron chevron-shaped laser beam scanning toward growth of single-grain crystal

通过微米 V 形激光束扫描金薄膜快速退火以生长单晶晶体

• DOI: 10.35848/1347-4065/abdf22
• 发表时间: 2021
• 期刊: Japanese Journal of Applied Physics
• 影响因子: 1.5
• 作者: Pham Anh Hoang;Fukunaga Naruki;Yeh Wenchang;Morito Shigekazu;Ohba Takuya
• 通讯作者: Ohba Takuya

Growth of single-grain crystal in Au thin films by using micron chevron-shaped laser beam scanning

利用微米人字形激光束扫描在金薄膜中生长单晶晶体

• 发表时间: 2021
• 作者: 今村岳;吉川元起;鷲尾隆;Pham Hoang Anh
• 通讯作者: Pham Hoang Anh

Laser scanning crystallization of metal thin films

金属薄膜的激光扫描结晶

• 发表时间: 2019
• 作者: 北村未歩;相馬清吾;若林大佑;田中宏和;豊島章雄;雨宮健太;本間飛鳥;川上竜平;菅原克明;中山耕輔;佐藤宇史;組頭広志;堀場弘司;Pham Hoang Anh
• 通讯作者: Pham Hoang Anh