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CVD SYNTHESIS OF THIN FILMS OF RARE EARTH AND HEAVY METAL FLUORIDES,AND OPTICAL AND/OR ELECTRICAL FUNCTIONS

稀土和重金属氟化物薄膜的 CVD 合成以及光学和/或电学功能

基本信息

批准号：
05453126
负责人：
KAWAMOTO Yoji
金额：
$ 4.35万
依托单位：
KOBE UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1993
资助国家：
日本
起止时间：
1993 至 1994
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05453126/
关键词：
RARE EARTH FLUORIDES CVD THIN FILM

项目摘要

The object of the present research is (i) development of a microwave ECR plasma CVD equipment, (ii) synthesis of volatile comlpexes of rare earth and other metal elements, (iii) preparation of rare earth-containing fluoride glasses by microwave ECR plasma CVD process, and (iv) evaluation of optical and electrical properties of the prepared rare earth-containing fluoride glasses.(i) A microwave ECR plasma CVD equipment was designed and constructed in cooperation with HIRANO KOON Inc. Some of the main performance are microwave oscillation number of 2.45GHz, oscillation power of max. 1000W,deposition area of 20x20mm, deposition temperature of max. 200ﾟC,gas supply systems of Ar, O_2 and SF_6, and four complex-monomer introduction lines.(ii) The followings are required for volatile complexes of rare earth and other metal elements which are available for microwave ECR plasma CVD process ; Those vaporize at lower temperatures without decomposition and, in addition, as a monomer at almost the same temperature. As volatile complexes of rare earth and other metal elements, various beta-diketone complexes were chosen.(iii) At first, synthesis of a ZrF_4-BaF_2 film was attempted by using Zr (HFA) _4 and Ba (DFHD) _2 as beta-diketones of Zr and Ba, respectively, and by employing CaF_2 as a substrate. Microwave ECR plasma CVD with SF_6 as a fluorinating gas and Ar as a carrier gas gave amorphous ZrF_4-BaF_2 film of a few mum thickness. Its X-ray powder pattern indicates that the composition is close to 67ZrF_4・33BaF_2. Synthesis of rare earth-containing fluoride glasses is now in progress by using DPM complexes.

本研究的目的是：(1)研制微波ECR等离子体CVD装置；(2)合成稀土等金属元素的挥发性络合物；(3)用微波ECR等离子体CVD工艺制备含稀土氟化物玻璃；(4)评价制备的含稀土氟化物玻璃的光学和电学性能。(1)与Hirano Koon公司合作设计建造了微波ECR等离子体CVD装置，其主要性能指标为微波振荡次数2.45 GHz，最大振荡功率。1000W，沉积面积20x20 mm，最高沉积温度。(2)适用于微波等离子体化学气相沉积工艺的稀土和其他金属元素的挥发性络合物，它们在较低的温度下蒸发而不分解，并且在几乎相同的温度下作为单体挥发。作为稀土和其他金属元素的挥发性络合物，我们选择了不同的β-二酮络合物。(Iii)首先，尝试了分别以Zr(HFA)_4和Ba(DFHD)_2为基础，以CaF_2为衬底，以Zr(HFA)_4和Ba(DFHD)_2为β-二酮，合成了一种ZrF_4-BaF_2薄膜。以SF_6为氟化气体、Ar为载气的微波ECR等离子体CVD制备了厚度较小的非晶态ZrF_4-BaF_2薄膜。X-射线粉末分析表明其组成接近67ZrF_4·33BaF_2。用DPM络合物合成含稀土氟化物玻璃的工作正在进行中。