Investigation of the mechanisms during sintering process modifications of multi-component sputter materials and the phase specific deposition of AlCrSi(W,Ta)N

研究多组分溅射材料烧结工艺改进和 AlCrSi(W,Ta)N 相特定沉积的机理

• 批准号: 394475086
• 负责人: Professor Dr.-Ing. Wolfgang Tillmann
• 金额: --
• 依托单位: Lehrstuhl für Werkstofftechnologie (LWT)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2018
• 资助国家: 德国
• 起止时间: 2017-12-31 至 2022-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/394475086?language=en
• 关键词: Investigation; mechanisms; during; sintering; process

This research project investigates interactions of sintering processes for multi-component target materials, which are subsequently used for the formation of nanocomposite structures. The AlCrSiN system, consisting of nanocrystalline grains (nc (Al,Cr)N), embedded in an amorphous matrix (a-Si3N4), is the basis for this structure. It is the aim of this project to understand the mechanisms that lead to an increase of the hardness as well as the wear and oxidation resistance by doting the coating system with tungsten and tantalum. Fundamental analyses of sintering processes for the CrSi(W, Ta) system are used to synthesize target segments with a low porosity, which are embedded in a monolithic aluminum body.Sintering parameters such as the temperature, pressure, sintering time and the stoichiometry that support diffusion and compaction, are modified while hot pressing CrSi(W, Ta). So far, the resulting diffusion and phase formation mechanisms have not been explored. Finely dispersed nanopowders are used for the refractory metals W and Ta to accelerate the diffusion velocity. Powder particle agglomerations are avoided by powder coatings, applied by means of Arc-PVD to achieve a homogenous distribution of particles in the sintered segments. Based on a simulation-assisted selection of the basic materials, sintering with solid/liquid phases is realized to foster a balanced formation of intermetallic phases in order to identify porosity-minimizing mechanisms caused by process modifications. The nanostructures of reactively deposited AlCrSi(W, Ta)N layers are correlated with the intermetallic phases in the target material by stoichiometric variations in the CrSi(W, Ta) segments as well as the number of segments in the Al target. The variations of Si, W, and Ta contents are of particular interest when investigating AlCrSi(W, Ta)N films as they enable both grain-refining as well as solid solution hardening mechanisms, thus positively influencing the hardness, wear, and oxidation resistance.The overall objective of this research project is to holistically combine the results of the analyses of the interactions between the chemical compositions and phase compositions of new target materials with the resulting tribo-mechanic coating properties of nanocomposite structures. Especially, the influence of the W and Ta contents on the oxidation behavior is closely scrutinized. Finally, the examined AlCrSi(W, Ta)N coating systems will be applied on cutting tools to analyze the influence of the doping elements and to verify these influences under real production conditions.

该研究项目研究了多组分目标材料的烧结过程的相互作用，随后将其用于纳米复合结构的形成。由纳米晶粒（NC（Al，Cr）N）组成的Alcrsin系统嵌入了无定形基质（A-SI3N4）中，是该结构的基础。该项目的目的是了解导致硬度增加以及通过用tungsten和tantalum涂涂层系统来增加硬度以及耐磨性和氧化耐药性的机制。 CRSI（W，TA）系统的烧结过程的基本分析用于合成具有低孔隙率的目标段，这些孔隙率嵌入了整体铝体中。温度，压力，压力，烧结时间和支持的差异和综合，同时修改了crsi（crsi fecrsi fecrsi fecrsi fecrsi for）。到目前为止，尚未探索所得的扩散和相形机制。细分纳米植物用于耐火酸金属W和TA，以加速扩散速度。通过粉末涂料避免了粉末颗粒的聚集，通过ARC-PVD施加粉末涂层，以实现烧结段中颗粒的同质分布。基于基本材料的仿真选择，实现固体/液相相的烧结以促进金属间相的平衡形成，以确定由过程修饰引起的孔隙度最小化机制。反应沉积的AlcRSI（W，TA）N层的纳米结构与CRSI（W，TA）段的化学计量变化以及AL靶标的片段数量与目标材料中的金属间相相关。在研究藻类（W，ta）n膜时，Si，w和ta含量的变化特别值得关注纳米复合材料结构的底环机械涂层。特别是，仔细检查了W和TA含量对氧化行为的影响。最后，检查的ALCRSI（W，TA）N涂层系统将用于切割工具，以分析掺杂元素的影响并在实际生产条件下验证这些影响。