Development of laser-beam shaping method for retro-reflector fabrication on surface of metal substrate

金属基底表面后向反射器制造激光束整形方法的发展

• 批准号: 24656095
• 负责人: YAMASAKI Kazuhiko
• 金额: $ 2.58万
• 依托单位: Ibaraki University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Challenging Exploratory Research
• 财政年份: 2012
• 资助国家: 日本
• 起止时间: 2012-04-01 至 2014-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-24656095/
• 关键词: ナノ・マイクロ加工; ビーム整形; 短パルスレーザ; レーザ加工

We proposed new laser micro-fabrication process for stainless steel substrate using beam-shaping method to make triangle-shaped beam. Then we confirmed the profiles of the beam. After pulse irradiation to metal surface, formation of two-dimensional micro structures with 2.5 micrometer in pitch were observed. On the other hand micro grooves with 4 micrometer in width and with 0.7 micrometer in depth were fabricated by focused beam irradiation. Although fabrication of retro-reflector on stainless steel substrate could not be achieved, this indicates possibility of the micro-fabrication technology of metal surface using interference pattern of short pulse.

我们提出了一种新的不锈钢基底激光微加工工艺，利用光束整形方法制造三角形光束。然后我们确认了梁的轮廓。对金属表面进行脉冲照射后，观察到节距为2.5微米的二维微结构的形成。另一方面，通过聚焦光束照射制造宽度为4微米、深度为0.7微米的微凹槽。虽然未能实现在不锈钢基板上制作回复反射器，但这表明利用短脉冲干涉图样的金属表面微加工技术的可能性。