Focused Ion Beam Scanning Electron Microscope (FIB-SEM)

在这项提案中，来自哥廷根大学物理系的九个工作组要求获得一台聚焦离子束(FIB)显微镜，用于直接制造和表征纳米级样品。设想的仪器将大大扩展分辨率、加工和生产能力，超过现有的FIB显微镜，后者越来越不可靠。在过去的10年里，我们现有的FIB使哥廷根的雄心勃勃的研究计划得以发展，包括收购超高速和环境传输电子显微镜，并建立一个合作研究中心的“原子尺度控制能量转换”(CRC 1073)。可靠的FIB能力和更高的成像和加工分辨率现在是维持样品制造和表征的坚实基础所必需的，这些基础使我们能够遵循这些具有挑战性的研究方向。在这里，我们描述了我们目前由FIB支持的研究，并概述了我们期望通过提高成像分辨率、加工精度和灵活性以及新FIB的生产能力而实现的进展。我们还描述了基于中央管理设施中训练有素的技术人员的操作和使用的成熟概念。我们概述了最受欢迎的显微镜在实验室空间中的安装计划，该空间具有足够的规格以保证不受干扰的性能。最后，我们认为有很好的FIB系统可以满足我们的需求，我们提出了其中一个系统的理由。

In this proposal, nine working groups from the Faculty of Physics at the University of Göttingen request to acquire a focused ion beam (FIB) microscope for the direct fabrication and characterization of nanoscale specimens. The envisioned instrument would significantly extend the resolution, machining, and throughput capabilities beyond what are currently available with the existing FIB microscope, which is increasingly unreliable.Over the last 10 years, our existing FIB has enabled the development of ambitious research initiatives in Göttingen, including the acquisition of ultrafast and environmental transmission electron microscopes, and the establishment of a collaborative research center on “Atomic Scale Control of Energy Conversion” (CRC 1073). Reliable FIB capacity and increased imaging and machining resolution are now necessary to maintain the strong basis for specimen fabrication and characterization that has allowed us to follow such challenging research directions.We describe here our current FIB-supported research and outline the advancements we expect to achieve with the improved imaging resolution, machining precision and flexibility, and throughput of a new FIB. We also describe a mature concept for operation and use based on highly trained technical staff within a centrally administered facility. We outline the installation plans of the favored microscope in a laboratory space with sufficient specifications for undisturbed performance. Finally we argue that there are excellent FIB systems available that fulfill our needs and we make the case for one of these systems.