Focused Ion Beam Scanning Electron Microscope (FIB-SEM)

在这项提案中，来自哥廷根大学物理系的九个工作组要求获得一种聚焦离子束（FIB）显微镜，用于直接制造和表征纳米级样品。该仪器将大大扩展现有FIB显微镜的分辨率、加工能力和生产能力，而现有的FIB显微镜越来越不可靠。在过去的10年里，我们现有的FIB使哥廷根雄心勃勃的研究计划得以发展，包括收购超快和环境透射电子显微镜，并建立了“能源转换的原子尺度控制”合作研究中心（CRC 1073）。可靠的FIB能力和提高成像和加工分辨率，现在有必要保持强大的基础，使我们能够遵循这样具有挑战性的研究方向，我们在这里描述我们目前的FIB支持的研究和概述的进步，我们希望实现提高成像分辨率，加工精度和灵活性，和吞吐量的一个新的FIB。我们还描述了一个成熟的概念，操作和使用的基础上训练有素的技术人员在一个集中管理的设施。我们概述了安装计划的青睐显微镜在实验室空间有足够的规格不受干扰的性能。最后，我们认为，有优秀的FIB系统，可满足我们的需求，我们使这些系统之一的情况。

In this proposal, nine working groups from the Faculty of Physics at the University of Göttingen request to acquire a focused ion beam (FIB) microscope for the direct fabrication and characterization of nanoscale specimens. The envisioned instrument would significantly extend the resolution, machining, and throughput capabilities beyond what are currently available with the existing FIB microscope, which is increasingly unreliable.Over the last 10 years, our existing FIB has enabled the development of ambitious research initiatives in Göttingen, including the acquisition of ultrafast and environmental transmission electron microscopes, and the establishment of a collaborative research center on “Atomic Scale Control of Energy Conversion” (CRC 1073). Reliable FIB capacity and increased imaging and machining resolution are now necessary to maintain the strong basis for specimen fabrication and characterization that has allowed us to follow such challenging research directions.We describe here our current FIB-supported research and outline the advancements we expect to achieve with the improved imaging resolution, machining precision and flexibility, and throughput of a new FIB. We also describe a mature concept for operation and use based on highly trained technical staff within a centrally administered facility. We outline the installation plans of the favored microscope in a laboratory space with sufficient specifications for undisturbed performance. Finally we argue that there are excellent FIB systems available that fulfill our needs and we make the case for one of these systems.