FIB-SEM (Focused Ion Beam Scanning Electron Microscope)

FIB-SEM(聚焦离子束扫描电子显微镜)将被集成到TUM新创建的EM设施中，并跨学科(化学、物理、生命科学、医学、电池和材料研究)和跨TUM站点(Garching、慕尼黑、魏亨斯特潘和施特劳宾)用于多学科研究生物系统中的结构-功能关系，如细胞、组织和土壤样本，以及电池材料和金属材料。不幸的是，TUM目前还没有这样的仪器。该仪器独一无二地实现了层析成像和电子显微镜在各种样品系统上的结合。有了FIB-SEM，除了表面分析外，还可以进行断层扫描。这为复杂样品系统的三维测量开辟了新的途径。这些包括细胞(人、动物、植物)、组织和类有机物，以及土壤微团聚体和复合系统(例如真菌-木材)。该仪器还可以对电化学和金属材料进行形貌表征和功能测试。这种广泛的应用对系统的技术组件、灵活性和坚固性提出了很高的要求。该仪器还将通过相关图像评估在连接最先进的成像技术方面发挥核心作用，作为不同光学显微镜方法之间的接口。使用FIB的顺序铣削功能对于物体的3D成像是必不可少的。此外，它还可以制备薄片，然后以更高的分辨率进行成像。可以使用相同物体的比较光学显微镜来预先选择感兴趣的目标体积，以显著提高效率。此外，还可以对不同元素的分布进行成像。因此，拟议的FIB-SEM工具可以为TUM EM设施提供急需的多学科工具，使TUM研究领域和地点之间能够通过共同的方法进行新的互动和合作。

The FIB-SEM (Focused Ion Beam Scanning Electron Microscope) is to be integrated into the newly created EM Facility at TUM and used across disciplines (chemistry, physics, life sciences, medicine, battery and materials research) and across TUM sites (Garching, Munich, Weihenstephan, and Straubing) for multidisciplinary research into structure-function relationships in biological systems such as cells, tissues, and soil samples, as well as battery materials and metallic materials. Unfortunately, such an instrument is not currently available at TUM. The instrument uniquely enables the combination of tomography and electron microscopy on a variety of sample systems. With the FIB-SEM, it will be possible to perform tomography in addition to surface analysis. This opens up the three-dimensional measurement of complex sample systems. These include cells (human, animal, plant), tissues, and organoids, as well as soil microaggregates and composite systems (e.g., fungus-wood). The instrument also enables topographic characterization and functional testing of electrochemical and metallic materials.This wide range of applications places high demands on the system's technical components, flexibility, and robustness. The instrument will also play a central role in linking state-of-the-art imaging techniques through correlative image evaluation as an interface between the diverse light microscopic methods.The sequential milling function using FIB is essential for 3D imaging of objects. Also, it enables the preparation of thin lamellae, which can then be imaged at even higher resolution. Comparative light microscopy of the same objects can be used to preselect the target volume of interest to substantially increase efficiency. In addition, the distribution of different elements can be imaged. Thus, the proposed FIB-SEM instrument could provide an urgently needed multidisciplinary instrument for the TUM EM Facility, enabling new interactions and collaborations between TUM research fields and sites through the common methodology.