FIB-SEM (Focused Ion Beam Scanning Electron Microscope)

FIB-SEM（聚焦离子束扫描电子显微镜）

• 批准号: 471402977
• 金额: --
• 依托单位: Technische Universität München (TUM)
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2022
• 资助国家: 德国
• 起止时间: 2021-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/471402977?language=en
• 关键词: FIB; SEM; Focused; Ion; Beam

The FIB-SEM (Focused Ion Beam Scanning Electron Microscope) is to be integrated into the newly created EM Facility at TUM and used across disciplines (chemistry, physics, life sciences, medicine, battery and materials research) and across TUM sites (Garching, Munich, Weihenstephan, and Straubing) for multidisciplinary research into structure-function relationships in biological systems such as cells, tissues, and soil samples, as well as battery materials and metallic materials. Unfortunately, such an instrument is not currently available at TUM. The instrument uniquely enables the combination of tomography and electron microscopy on a variety of sample systems. With the FIB-SEM, it will be possible to perform tomography in addition to surface analysis. This opens up the three-dimensional measurement of complex sample systems. These include cells (human, animal, plant), tissues, and organoids, as well as soil microaggregates and composite systems (e.g., fungus-wood). The instrument also enables topographic characterization and functional testing of electrochemical and metallic materials.This wide range of applications places high demands on the system's technical components, flexibility, and robustness. The instrument will also play a central role in linking state-of-the-art imaging techniques through correlative image evaluation as an interface between the diverse light microscopic methods.The sequential milling function using FIB is essential for 3D imaging of objects. Also, it enables the preparation of thin lamellae, which can then be imaged at even higher resolution. Comparative light microscopy of the same objects can be used to preselect the target volume of interest to substantially increase efficiency. In addition, the distribution of different elements can be imaged. Thus, the proposed FIB-SEM instrument could provide an urgently needed multidisciplinary instrument for the TUM EM Facility, enabling new interactions and collaborations between TUM research fields and sites through the common methodology.

FIB扫描电镜（聚焦离子束扫描电子显微镜）将被集成到TUM新创建的EM设施中，并跨学科使用（化学，物理，生命科学，医学，电池和材料研究）和跨TUM网站（Garching，慕尼黑，魏亨斯特潘，和Straubing）对生物系统如细胞，组织和土壤样品的结构-功能关系进行多学科研究，以及电池材料和金属材料。不幸的是，目前TUM还没有这样的仪器。该仪器独特地实现了对各种样品系统的断层扫描和电子显微镜的组合。 使用FIB-SEM，除了表面分析之外，还可以进行断层扫描。这开启了复杂样品系统的三维测量。这些包括细胞（人类、动物、植物）、组织和类器官，以及土壤微团聚体和复合系统（例如，真菌-木材）。该仪器还可以对电化学和金属材料进行形貌表征和功能测试。广泛的应用对系统的技术组件、灵活性和鲁棒性提出了很高的要求。该仪器还将通过相关的图像评估作为各种光学显微镜方法之间的接口，在连接最先进的成像技术方面发挥核心作用。使用FIB的连续铣削功能对于物体的3D成像至关重要。此外，它能够制备薄的薄片，然后可以以更高的分辨率成像。可以使用相同物体的比较光学显微镜来预选感兴趣的目标体积，以大幅提高效率。此外，不同元素的分布可以成像。因此，拟议的FIB-SEM仪器可以为TUM EM设施提供迫切需要的多学科仪器，通过通用方法实现TUM研究领域和站点之间的新互动和合作。