FIB-SEM (Focused Ion Beam Scanning Electron Microscope)

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The FIB-SEM (Focused Ion Beam Scanning Electron Microscope) is to be integrated into the newly created EM Facility at TUM and used across disciplines (chemistry, physics, life sciences, medicine, battery and materials research) and across TUM sites (Garching, Munich, Weihenstephan, and Straubing) for multidisciplinary research into structure-function relationships in biological systems such as cells, tissues, and soil samples, as well as battery materials and metallic materials. Unfortunately, such an instrument is not currently available at TUM. The instrument uniquely enables the combination of tomography and electron microscopy on a variety of sample systems. With the FIB-SEM, it will be possible to perform tomography in addition to surface analysis. This opens up the three-dimensional measurement of complex sample systems. These include cells (human, animal, plant), tissues, and organoids, as well as soil microaggregates and composite systems (e.g., fungus-wood). The instrument also enables topographic characterization and functional testing of electrochemical and metallic materials.This wide range of applications places high demands on the system's technical components, flexibility, and robustness. The instrument will also play a central role in linking state-of-the-art imaging techniques through correlative image evaluation as an interface between the diverse light microscopic methods.The sequential milling function using FIB is essential for 3D imaging of objects. Also, it enables the preparation of thin lamellae, which can then be imaged at even higher resolution. Comparative light microscopy of the same objects can be used to preselect the target volume of interest to substantially increase efficiency. In addition, the distribution of different elements can be imaged. Thus, the proposed FIB-SEM instrument could provide an urgently needed multidisciplinary instrument for the TUM EM Facility, enabling new interactions and collaborations between TUM research fields and sites through the common methodology.