Process control in micro atmospheric pressure RF plasma jets by voltage waveform tailoring and customized boundary surfaces (A04)

通过电压波形定制和定制边界表面对微大气压射频等离子体射流进行过程控制 (A04)

• 批准号: 397766095
• 金额: --
• 依托单位: Lehrstuhl für Allgemeine Elektrotechnik und Plasmatechnik (AEPT)
• 依托单位国家: 德国
• 项目类别: Collaborative Research Centres
• 资助国家: 德国
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/397766095?language=en
• 关键词: Process; control; micro; atmospheric; pressure

Based on experiments and simulations, the species transport in the COST reference plasma jet will be studied from the gas inlet through the active plasma region into the effluent in the presence of Voltage Waveform Tailoring (VWT) and customised boundary surfaces (materials + topology). The buildup of different neutral species along the direction of the gas flow will be quantified and understood as a basis for advanced plasma source design. Moreover, the plasma jet design will be modified by introducing a mesh into one of the electrodes and closing the original nozzle to make use of the unique features of VWT and structured electrodes to enhance the flux of selected neutral species into the effluent through the gridded electrode. Finally, the unique potential of VWT to tailor the Electron Energy Probability Function (EEPF) in combination with the new plasma source design will be used to enhance the synthesis of NH3 via cold non-equilibrium plasma catalysis by selectively exciting and dissociating nitrogen by electron impact.

在实验和模拟的基础上，将研究在电压波形剪裁(VWT)和定制的边界表面(材料+拓扑)存在的情况下，成本参考等离子体射流中的物种从气体入口通过活性等离子体区域进入流出物的传输。不同中性物质沿气流方向的积聚将被量化并被理解为先进的等离子体源设计的基础。此外，等离子体射流的设计将进行修改，在其中一个电极上引入网格，并关闭原来的喷嘴，以利用VWT和结构化电极的独特特性，增强选定的中性物质通过网格电极进入流出水的通量。最后，VWT独特的电子能量概率函数(EEPF)与新的等离子体源设计相结合的潜力将被用来通过电子碰撞选择性地激发和解离氮来增强冷非平衡等离子体催化合成NH3。