Development of a new ion-beam sputtering apparatus and its application for scanning electron microscopy.

新型离子束溅射装置的研制及其在扫描电子显微镜中的应用

• 批准号: 59870002
• 负责人: TANAKA Keiichi
• 金额: $ 4.54万
• 依托单位: Tottori University School of Medicine
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research
• 财政年份: 1984
• 资助国家: 日本
• 起止时间: 1984 至 1986
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-59870002/
• 关键词: ion beam; metal deposition; scanning electron microscope; high resolution; ultra fine grain; 白金; 蒸着; 高分解能走査電子顕微鏡

An ion beam sputter coater for high resolution scanning electron microscopy was newly developed. It is equipped with a specimen chamber (an ion beam gun, a specimen stage, metal targets and a thickness monitor), control units and a vacuum system. With this apparatus, very thin metal film which is composed of fine platinum particles of about 15-20 A in diameter was obtained. The size of the particles is much smaller than that obtained by ordinary ion sputter coater (50-60 A in diameter). Tantalum and tungsten can be also used as coating metals. On observation with an ultra high resolution scanning electron microscope, the specimens which had been thinly coated by the new coater provided enough conductivity and yield of secondary electrons for taking pictures in good contrast. Thus the newly developed ion beam sputter coater have very high ability in compare with the ordinary ion sputter coater and it exercises its power at ultra high resolution scanning electron microscopy. In the future, this apparatus surely become a necessary in this research field.

新开发了用于高分辨率扫描电子显微镜的离子束溅射镀膜机。它配备了样品室（离子束枪、样品台、金属靶材和厚度监视器）、控制单元和真空系统。利用该设备，获得由直径约15-20埃的细铂颗粒组成的非常薄的金属膜。颗粒尺寸比普通离子溅射镀膜机（直径50-60埃）获得的颗粒小得多。钽和钨也可用作涂层金属。通过超高分辨率扫描电子显微镜观察，经过新型镀膜机薄薄镀膜的样品提供了足够的电导率和二次电子产额，可以拍摄出良好对比度的照片。因此，新开发的离子束溅射镀膜机与普通离子溅射镀膜机相比具有非常高的能力，并在超高分辨率扫描电子显微镜下发挥其威力。未来，该设备必将成为该研究领域的必需品。

项目成果

K. TANAKA, A. MITSUSHIMA and K. MORI: "A new apparatus of ion-beam sputtering deposition for electron microscopy." Biomedical SEM. 13. 15-16 (1984)

K. TANAKA、A. MITSUSHIMA 和 K. MORI：“一种用于电子显微镜的离子束溅射沉积的新装置。”

医生物走査電顕. 14-1. (1985)

医学和生物扫描电子显微镜。14-1。

田中敬一,満嶋明,森金太郎: 医生物走査電顕. 13. 15-16 (1984)

Keiichi Tanaka、Akira Mitsushima、Kintaro Mori：医学和生物扫描电子显微镜。13. 15-16 (1984)

田中敬一,満嶋明,森金太郎: 14. 60-63 (1985)

田中敬一、满岛晃、森金太郎：14. 60-63 (1985)

A. MITSUSHIMA, K.TANAKA and K. MORI: "An experiment on ion-beam deposition --Pt grain siz and its applicability for SEM" Biomedical SEM. 14. 60-61 (1985)

A. MITSUSHIMA、K.TANAKA 和 K. MORI：“离子束沉积实验——Pt 晶粒尺寸及其对 SEM 的适用性”生物医学 SEM。