Development of Zr/W - Gun for nano-meter Auger Electron Microprobe

纳米俄歇电子探针Zr/W枪的研制

• 批准号: 61850013
• 负责人: SHIMIZU Ryuichi
• 金额: $ 5.57万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research
• 财政年份: 1986
• 资助国家: 日本
• 起止时间: 1986 至 1987
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-61850013/
• 关键词: High Brightness Emitter; T.F. Emission; ジルコニウム被覆タングステン; 高輝度電子鏡

A new type high brightness electron gun was designed for developing a nano-meter Auger electron microprobe. This gun was equiped with a Zr/W - tip consisting of a (100) - oriented tungusten emitter with an overlayer of zirconium. The emission properties was investigated to find that the work function of the Zr/W - tip operatinf in extended Schottky emission region was coarsely estimated to be 3.2eV. The emission properties of the Zr/W - tip has been turned to be excellent as a stable and high brightness emitter, most suitable for the present purpose. This electron gun system was mounted on a commercial type scanning electron microscope, JSEM-840. The net performance as a nano-meter Auger electron microprobe has been under examination. The assessment will be published shortly.

为研制纳米级俄歇电子探针，设计了一种新型高亮度电子枪。这支枪配备了一个由(100)取向的钨丝发射体和一层锆层组成的Zr/W尖端。研究发现，在扩展的肖特基发射区，Zr/W针尖的工作功函数粗略估计为3.2 eV。作为一种稳定的、高亮度的发射体，Zr/W-TiP的发射性能已经变得很好，最适合目前的用途。该电子枪系统安装在商品型扫描电子显微镜JSEM-840上。作为纳米俄歇电子探针的净性能正在测试中。评估报告很快就会公布。

项目成果

Z.J.Ding;R.Shimizu.: J.Electron Microscopy.

Z.J.Ding；R.Shimizu.：J.电子显微镜。

K. Harada,; H. Endoh; R. Shimizu.: "Anti-contamination Electron Biprism for Electron Holography" J. Electron Microscopy, Japan.

K.原田，；

K.Harada;H.Endoh;R.Shimizu.: J.Electron Microscopy,Japan.

K.Harada；H.Endoh；R.Shimizu.：J.电子显微镜，日本。

R. Shimizu.: "Work Function Measurement of Zr/W(100) Field Emitter" in Proc. XIth Int. Cong. on Electron Microscopy (Kyoto, 1986). 215-219 (1986)

R. Shimizu.：Proc. 中的“Zr/W(100) 场发射器的功函数测量”。

R.SHIMIZU: Nuchear Instrument and Methods. B18. 486-495 (1987)

R.SHIMIZU：Nuchear 仪器和方法。