Development of Zr/W - Gun for nano-meter Auger Electron Microprobe

为研制纳米俄歇电子探针，设计了一种新型高亮度电子枪。该枪配备了一个Zr/W -尖端，由一个（100）取向的钨射极和一层锆组成。研究了Zr/W -尖端在扩展肖特基发射区工作时的发射特性，粗略估计其功函数为3.2eV。Zr/W -尖端的发射性能优异，是一种稳定、高亮度的发射体，非常适合目前的用途。该电子枪系统安装在商用扫描电子显微镜JSEM-840上。对其作为纳米俄歇电子探针的净性能进行了研究。评估结果将于近期公布。

A new type high brightness electron gun was designed for developing a nano-meter Auger electron microprobe. This gun was equiped with a Zr/W - tip consisting of a (100) - oriented tungusten emitter with an overlayer of zirconium. The emission properties was investigated to find that the work function of the Zr/W - tip operatinf in extended Schottky emission region was coarsely estimated to be 3.2eV. The emission properties of the Zr/W - tip has been turned to be excellent as a stable and high brightness emitter, most suitable for the present purpose. This electron gun system was mounted on a commercial type scanning electron microscope, JSEM-840. The net performance as a nano-meter Auger electron microprobe has been under examination. The assessment will be published shortly.