Development of Scanning Reflection Electron Holography Microscopy (SREHM)

扫描反射电子全息显微镜（SREHM）的发展

• 批准号: 05402028
• 负责人: SHIMIZU Ryuichi
• 金额: $ 10.69万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (A)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05402028/
• 关键词: Reflection Electron Microscopy; Holography Microscopy; Micro Surface Physics; Surface Potential; Surface topography; 表面トボグラフィー; 反射電子顕微鏡法; 表面反応の動的観察; 反射電子線ホログラフィー; 高輝度電子銃; 超高真空試料ホルダー; 表面再構成; 表面トポグラフィー

Scanning type reflection electron beam holography microscopy (SREHM) has been developed. The resualts obtained though the present research project are as follows.(1) UHV Reflection electron microscope was, first, developed and we succeeded to observe the reconstructed domains on Pt(100) under this microscope (paper #1)(2) A new type sample holder for the SREHM ws also designed. This holder enables shifts along X and Y directions and rotation for incident and azimuthal angles to be controlled with high precision. (paper #2)(3) Micro mapping of electric field along superconducting wire and its hologram have been successfully obtained. (paper #4)(4) The SREHM system with infrared-radiation heating system and Zr-O/W(100) TF emitter has been contructed, and a prelimary result was enconrageous enough to confirm very high potentiality of the SREHM (paper #5)

开发出扫描型反射电子束全息显微镜（SREHM）。本研究项目取得的成果如下：(1)首先研制出了UHV反射电子显微镜，并成功地在该显微镜下观察到了Pt(100)上的重构域(论文#1)(2)还设计了一种用于SREHM的新型样品架。该支架可实现沿 X 和 Y 方向的移动以及高精度控制入射角和方位角的旋转。 （论文#2）(3) 已成功获得沿超导线的电场微观图及其全息图。 （论文#4）（4）带有红外辐射加热系统和Zr-O/W(100) TF发射器的SREHM系统已经构建完毕，初步结果足以证实SREHM具有非常高的潜力（论文#5）

项目成果

白永煥,関敬烈,井上雅彦,木内正人,志水隆一: "Reflection High Energy Electron Diffraction Observation of Dynamic Ion Beam Process in Titanium Nitride Crystal Growth" Jpm.J.Appl.Phys.32. 4714-4717 (1993)

Hiroshi Shiranaga、Takayoshi Seki、Masahiko Inoue、Masato Kiuchi、R​​yuichi Shimizu：“氮化钛晶体生长中动态离子束过程的反射高能电子衍射观察”Jpm.J.Appl.Phys.32 (1993)。

K.Ogai,Y.Kimura,R.Shimizu: "Dynamic Observation of Microelectric Field in Oxide Superconducting Material by Electron Interference Microscopy" Ultramicroscopy. 54. 345-350 (1994)

K.Ogai，Y.Kimura，R.Shimizu：“通过电子干涉显微镜动态观察氧化物超导材料中的微电场”超显微镜。

T.Akita, M.Takeguchi and R.Shimizu: ""Observation of Reconstructed Pt(001) Surfacely Reflection Electron Microscopy"" Jpn. J.Appl. Phys.32. L1631-L1634 (1993)

T.Akita、M.Takeguchi 和 R.Shimizu：“重建 Pt(001) 表面反射电子显微镜的观察”Jpn。

K.Ogai,S.Matsui,Y.Kimura,R.Shimizu: "An Approach for Nanolithography Using Electron Holograpy" Japan J. Appl.Phys.32. 5988-5992 (1993)

K.Ogai、S.Matsui、Y.Kimura、R.Shimizu：“使用电子全息技术的纳米光刻方法”Japan J. Appl.Phys.32。

K.Ogai, S.Matsui, Y.Kimura and R.Shimizu: ""An Approach for Nanolithography Using Electron Holography"" Japan J.Appl. Phys.32. 5988 (1993)

K.Ogai、S.Matsui、Y.Kimura 和 R.Shimizu：““使用电子全息术的纳米光刻方法””Japan J.Appl。