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Carbom free MOMBE growth by comlete cracking of the metal organic precarsores.

通过金属有机前体的完全裂解实现无碳 MOMBE 生长。

基本信息

批准号：
02452144
负责人：
HASEGAWA Fumio
金额：
$ 2.05万
依托单位：
University of Tsukuba
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1991
项目状态：
已结题

项目摘要

The aim of this work is to achieve a carbon free MOMBE growth by removing the carbon from methyl radical the metalorganic precursors, such as TMG.The first trial was complete cracking of the methane (CH_4), but it was found that it is difficult, e13EA\ : specially in vacuum, because that the sticking probability of methane on the heater is too small. Next trial was a reverse way : removal of methyl radical from metal organic as methane using atomic hydrogen produced by a heated tungsten (W) filament13EA\ : . It seemed to be possible because TMG (Trimethy gallium) was seemed to be cracked to gallium gydride (gallan) and methane, when a small amount of TMG was passed through a heated tungsten filament of about 2000ﾟC.However, when the amount of TMG was13EA\ : increased one order of magnitude in order to grow GaAs, it was found that the W filament was broken due to a reaction with the cracked gallium.Finally, it was confirmed that the best way is to use a new precursor, dimethyl amine gallan (GaH_3-NH(CH_3)_2--DMAG), which has no direct bond between Ga and C.the carbon concentration was reduced by about 5 orders of magnitudes : from 10^<20> c13EA\ : m^<-3> for the film grown with TMG to 1,2x10^<15> cm^<-3> for the film grown by DMAG at 550C.The carbon reduction was also confirmed by photoluminescence. The DMAG was stable for about 2 months as far as it was kept at about -10ﾟC.

本工作的目的是通过金属有机前驱体（如TMG）去除甲基自由基中的碳来实现无碳MOMBE生长，第一次尝试是完全裂解甲烷（CH_4），但发现这是困难的，特别是在真空中，因为甲烷在加热器上的粘附概率太小。下一个试验是相反的方式：使用由加热的钨（W）催化剂13 EA产生的原子氢从金属有机物如甲烷中去除甲基自由基。这似乎是可能的，因为TMG当少量TMG通过约2000 ℃的加热钨丝时，TMG（三甲基镓）似乎裂解成氢化镓（镓烷）和甲烷。增加一个数量级以生长GaAs，发现W丝由于与破裂的镓反应而断裂。最后，结果表明，采用一种新的Ga和C之间没有直接键合的前驱体--二甲胺镓酸盐（GaH_3-NH（CH_3）_2--DMAG），可以使碳浓度降低5个数量级，从TMG生长的10 × 10 ~<20>（13）EAl：m ~ 2降低<-3>到<15><-3>550 ℃下DMAG生长的1.2 × 10 ~（13）EAl：m ~ 2，光致发光也证实了碳的减少。DMAG保持在约-10 ° C时稳定约2个月。