An electronbeam evaporator for realtime and precise flux control for molecular beam epitaxy

该提案旨在购买一台电子束蒸发器，该蒸发器将用作位于UBC Stewart Blusson量子物质研究所（SBQMI）的分子束外延（MBE）和角分辨光电子能谱（ARPES）集群的附加设备。该集群工具是量子材料和器件铸造厂（QSTY）的核心基础设施，旨在解决工程量子材料系统中最具挑战性的问题。所提出的蒸发器是必要的沉积高熔点温度4D和5D难熔金属是必不可少的拓扑材料，如WTe 2和SrIrO 3，因为它们引入强自旋轨道耦合到电子结构。 我们的目标是建立一个世界级的研究计划，有能力常规设计，诱导和控制新的性能和功能，如超导性和拓扑保护状态，在过渡金属硫属化物和氧化物和其他新颖的二维材料系统。这些目标是SBQMI目前活跃的许多核心研究指令的基础。MBE生长含有Ta、Ru、Ir和Mo等元素的材料的主要障碍是金属在所需高温（~2500°C）下的固有不稳定蒸发速率。蒸发器和我们在Qatrium开发的原位电子衍射的创新应用解决了这个关键问题，并提供了一种多功能方法来保证完美的化学计量。通过稳定含有难熔金属的新相的可能性，我们的目标是在量子材料的合成方面取得重大突破。新材料和新器件的研究一直在支持加拿大的快速经济增长，例如过去在半导体行业的技术创新，新的量子材料是加拿大未来量子技术路线图的关键。昆泰的研究计划将是HQP培训的核心。由于其重点是复杂材料，纳米科学，MBE和先进的光谱学，对UBC和加拿大具有战略重要性，QQQF在HQP培训中发挥着关键作用。为MBE + ARPES集群购买电子束蒸发器将为HQP提供一套独特的高度专业化的基础设施，为研究和工业提供关键技能培训。

This proposal is for the purchase of an electron-beam (e-beam) evaporator that will be used as an add-on to the molecular beam epitaxy (MBE) and angle-resolved photoemission spectroscopy (ARPES) cluster located in Stewart Blusson Quantum Matter Institute (SBQMI) at UBC. The cluster tool is the central infrastructure of the Quantum Materials and Devices Foundry (QMDF), designed to tackle the most challenging questions in engineered quantum material systems. The proposed evaporator is necessary for depositing high-melting temperature 4d and 5d refractory metals that are essential in topological materials, such as WTe2 and SrIrO3, because they introduce strong spin-orbit coupling into the electronic structure. We aim to build a world¬-class research program that has the ability to routinely design, induce, and control new properties and functionalities, such as superconductivity and topologically protected states, in transition¬ metal chalcogenides and oxides and other novel two¬-dimensional materials systems. These goals underlie many of the core research directives currently in vigor at SBQMI. The major obstacle to MBE growth of materials containing elements such as Ta, Ru, Ir and Mo is the metals' intrinsically unstable evaporation rates at the required high temperatures (~2500°C). The evaporator, and our innovative application of in situ electron diffraction developed at QMDF, solves this critical issue and provides a versatile approach to guarantee perfect stoichiometry. With the possibility of stabilizing new phases containing refractory metals, we aim to achieve major breakthroughs in the synthesis of quantum materials. Research on new materials and devices has been supporting the rapid economic growth of Canada with technological innovations for example in semiconductor industries in the past, and new quantum materials are key to Canada's roadmap for quantum technologies in the future. QMDF's research program will be central to HQP training. With its emphasis on complex materials, nanoscience, MBE, and advanced spectroscopy, of strategic importance to UBC and Canada, the QMDF plays a key role in HQP training. The acquisition of the e-beam evaporator for the MBE + ARPES cluster will offer HQP access to a unique suite of highly-specialized infrastructure, providing training in critical skills for both research and industry.