Estimation of ultra precision machined surface by Scanning Near-field Optical Microscope

通过扫描近场光学显微镜估计超精密加工表面

• 批准号: 04452130
• 负责人: KATOAOKA Toshihiko
• 金额: $ 0.45万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-04452130/
• 关键词: scanning near-field optical microscope; near-field; surface roughness; piezo actuator; laser; surface of insulator; ultra precision machined surface; near field

The probe of this scanning near-field optical microscope (SNOM) is a dielectric sphere of 500nm in diameter on a transparent substrate. The probe sphere is illuminated by evanescent wave which is formed by the incidence of He-Ne laser with the wave length of 632.8nm from the inside of the substrate on the condition of total reflection. The light from the probe is collected by a conventional microscope through the substrate. The detected light intensity changes remarkably when a sample is brought in a near-field around the probe. The variation of detected light intensity in the near-field depends on refractive index of sample ; the amaller real part of refractive index of sample, the more remarkable increase of detected light intensity. This result is explained by using an electric dipole model for the elctromagnetic interaction between probe and sample. The vertical resolution of about 2nm and lateral resolution of less than 10nm are obtained for the developed microscope by measuring a standard specimen which is prepared by vacuum evaporation of metal.

这种扫描近场光学显微镜（SNOM）的探针是在透明基底上的直径为500 nm的介质球。用波长为632.8nm的He-Ne激光在全反射条件下从基片内部入射形成的倏逝波照射探针球。来自探针的光由常规显微镜通过基板收集。当样品被带到探针周围的近场时，检测到的光强度发生显著变化。近场探测光强的变化与样品折射率有关，样品折射率的真实的部分越小，探测光强的增加越显著。用探针与样品间电磁相互作用的电偶极子模型解释了这一结果。通过对金属真空蒸发制备的标准样品的测量，该显微镜的纵向分辨率约为2nm，横向分辨率小于10 nm。

项目成果

片岡 俊彦: "走査型近接場光学顕微鏡(SNOM)の開発" 精密工学会1992年度関西地方定期学術講演会論文集. 109-110 (1992)

Toshihiko Kataoka：“扫描近场光学显微镜（SNOM）的发展”日本精密工程学会1992年关西地区定期学术会议记录109-110（1992）。

遠藤 勝義: "走査型近接場光学顕微鏡の開発" 1992年度精密工学会春季大会学術講演会講演論文集. 415-416 (1992)

Katsuyoshi Endo：“扫描近场光学显微镜的开发”1992 年日本精密工程学会春季会议记录 415-416 (1992)。

T.Kataoka, K.Endo, H.Inoue, K.Inagaki, Y.Mori, K.Hirose and K.Takada: "Development of Scanning Near-field Optical Microscope Using a Spherical Small Protlusion as a Probe" Journal of the Japan Society for Precision Engineering. (in press).

T.Kataoka、K.Endo、H.Inoue、K.Inagaki、Y.Mori、K.Hirose 和 K.Takada：“使用球形小突起作为探针的扫描近场光学显微镜的开发” 日本杂志

片岡俊彦 他: "走査型近接場光学顕微鏡の開発" 精密工学会1992年度関西地方定期学術講演会講演論文集. 109-110 (1992)

Toshihiko Kataoka等人：“扫描近场光学显微镜的开发”日本精密工程学会1992年关西地区定期学术会议记录109-110（1992）。

片岡俊彦 他: "走査型近接場光学顕微鏡の開発(第2報)-プローブの改良-" 1993年度精密工学会秋季大会学術講演会講演論文集. 2. 573-574 (1993)

Toshihiko Kataoka等：“扫描近场光学显微镜的开发（第2次报告）-探针的改进-”1993年日本精密工程学会秋季会议学术会议论文集2. 573-574（1993）。