Development of functional film processing using ultra-fine particle beam

1.一种存款非晶碳薄膜的工艺系统的设计与构建本系统主要由以下三部分组成：1）低压气室，利用微波等离子体合成超细颗粒，2）连接细管，将合成的颗粒与载气一起输送，3）真空室获得高能粒子，并通过静电荷电和加速撞击存款.研究了在CH_4和He混合气体中，利用微波等离子体对碳颗粒的粒径和结构进行控制，稳定地得到了粒径为20nm的图形化非晶碳颗粒.粒子的高加速研究了场致发射充电加静电力加速、二次电子发射充电加静电力加速、超音速喷管气流加速三种方法对粒子的有效加速。结果表明，非晶碳膜的生长仅由方法1）确定。然而，从膜生长效率的观点来看，方法2）、3）优于方法1）上级。因此，我们必须不断研究这些方法。4.颗粒速度测量系统研究发现，所设计的高灵敏度飞行时间测量系统可以测量从传输管喷出的颗粒速度。但由于飞行时间信号之间的时间分辨率不一致，为了实现超高速的精确测量，必须对系统进行改进.合成技术的评价我们可以把粒子的合成、转移和加速三个过程系统地联合收割机结合在一个有机系统中。为此，本文对超细粒子束沉积系统进行了基础研究。

1. Design and construction of a processing systemThe system was constructed to deposit amorphous carbon film using hyper-velocity impact of ultra-fine carbon particles, which consists of the following three parts ; 1)Low pressure gas chamber to synthesize ultra-fine particles using microwave plasma, 2)Connecting thin tube to transfer the synthesized particles with carrier gases, 3)Vacuum chamber to obtain energetic particles and the impact deposit by electrostatic charging and acceleration.2. Synthesizing particlesHow to control the diameter and structure of carbon particles was investigated with microwave plasma in mixed gases of CH_4 and He, and the graphic amorphous carbon particles of 20nm in diameter can be obtained stably.3. Highly accelerating of particlesThe useful acceleration for particles was researched on the following three methods ; 1)Charging by field emission and accelerating by electrostatic force, 2)Charging by secondary electron emission and accelerating by electrostatic force, 3)Accelerating by gas flow from supersonic nozzle. As the results the growth of amorphous carbon film is identified only by the method 1). From the standpoint of efficiency of film growth, however, the methods 2), 3)are superior to the method 1). So we must continually investigate these methods.4. Measuring system for particle velocityIt is found that the high sensitive time-of-flight measuring system designed make possible to measure the velocities of particles spouted from the transfer tube. But for the accurate hyper-velocity measurement, the system must be improved as the time resolution between TOF signals is insufficient.5. Estimation of the synthesizing techniqueWe can systematically combine the three process of synthesizing, transferring, and accelerating particles into one organic system. So the base of the Ultra Fine Particle Beam Deposition system was performed.