Development of functional film processing using ultra-fine particle beam

开发利用超细粒子束的功能性薄膜加工

• 批准号: 05452139
• 负责人: IDE Takashi
• 金额: $ 3.33万
• 依托单位: Ehime University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05452139/
• 关键词: Ultra Fine Particle; Electrostatic Accelerate; Diamond Like Carbon; Time Of Flight; ダイヤモンド; ビーム加工; プラズマ; 帯電

1. Design and construction of a processing systemThe system was constructed to deposit amorphous carbon film using hyper-velocity impact of ultra-fine carbon particles, which consists of the following three parts ; 1)Low pressure gas chamber to synthesize ultra-fine particles using microwave plasma, 2)Connecting thin tube to transfer the synthesized particles with carrier gases, 3)Vacuum chamber to obtain energetic particles and the impact deposit by electrostatic charging and acceleration.2. Synthesizing particlesHow to control the diameter and structure of carbon particles was investigated with microwave plasma in mixed gases of CH_4 and He, and the graphic amorphous carbon particles of 20nm in diameter can be obtained stably.3. Highly accelerating of particlesThe useful acceleration for particles was researched on the following three methods ; 1)Charging by field emission and accelerating by electrostatic force, 2)Charging by secondary electron emission and accelerating by electrostatic force, 3)Accelerating by gas flow from supersonic nozzle. As the results the growth of amorphous carbon film is identified only by the method 1). From the standpoint of efficiency of film growth, however, the methods 2), 3)are superior to the method 1). So we must continually investigate these methods.4. Measuring system for particle velocityIt is found that the high sensitive time-of-flight measuring system designed make possible to measure the velocities of particles spouted from the transfer tube. But for the accurate hyper-velocity measurement, the system must be improved as the time resolution between TOF signals is insufficient.5. Estimation of the synthesizing techniqueWe can systematically combine the three process of synthesizing, transferring, and accelerating particles into one organic system. So the base of the Ultra Fine Particle Beam Deposition system was performed.

1. 该系统是利用超细碳颗粒的超高速撞击沉积非晶碳膜，该系统由以下三个部分组成；1)低压气室，利用微波等离子体合成超细颗粒；2)连接细管，用载气传递合成颗粒；3)真空室，通过静电充电和加速获得高能颗粒和冲击沉积。研究了微波等离子体在CH_4和He混合气体中如何控制碳颗粒的直径和结构，可以稳定地得到直径为20nm的图形非晶碳颗粒。粒子的高加速度研究了以下三种方法对粒子的有用加速度；1)场发射充电，静电力加速；2)二次电子发射充电，静电力加速；3)超音速喷管气流加速。结果表明，非晶碳膜的生长只能用方法1)来确定。然而，从膜生长效率的角度来看，方法2),3)优于方法1)。因此，我们必须不断地研究这些方法。粒子速度测量系统设计了高灵敏度的飞行时间测量系统，使从传递管中喷出的粒子速度的测量成为可能。但由于TOF信号间的时间分辨率不足，需要对系统进行改进，以实现精确的超高速测量。我们可以系统地将合成、传递和加速三个过程结合到一个有机系统中。在此基础上进行了超细粒子束沉积系统的研究。