Development of functional film processing using ultra-fine particle beam

1.超细碳颗粒超高速冲击沉积非晶态碳膜系统的设计与构建该系统由以下三部分组成：1)低压气室，利用微波等离子体合成超细颗粒；2)连接薄管，将合成的颗粒与载气进行传输；3)真空室，通过静电充电和加速，获得含能粒子和冲击沉积。研究了微波等离子体在CH4和He混合气体中如何控制碳颗粒的直径和结构，可以稳定地获得直径为20 nm的图形化无定形碳颗粒。粒子的高速加速研究了三种有效的粒子加速方法：1)场发射充电和静电加速，2)二次电子发射充电和静电加速，3)超音速喷嘴气流加速。因此，非晶态碳膜的生长只能用方法1)来确定。然而，从薄膜生长效率的角度来看，方法2)、3)优于方法1)。因此，我们必须不断研究这些方法。颗粒速度测量系统研究发现，设计的高灵敏度飞行时间测量系统使测量从传送管中喷出的颗粒速度成为可能。但由于飞行时间信号之间的时间分辨率不够，为了实现精确的超高速测量，必须对系统进行改进。合成技术的评估我们可以将合成、转移和加速粒子的三个过程系统地结合到一个有机系统中。为此，进行了超细粒子束沉积系统的基础工作。

1. Design and construction of a processing systemThe system was constructed to deposit amorphous carbon film using hyper-velocity impact of ultra-fine carbon particles, which consists of the following three parts ; 1)Low pressure gas chamber to synthesize ultra-fine particles using microwave plasma, 2)Connecting thin tube to transfer the synthesized particles with carrier gases, 3)Vacuum chamber to obtain energetic particles and the impact deposit by electrostatic charging and acceleration.2. Synthesizing particlesHow to control the diameter and structure of carbon particles was investigated with microwave plasma in mixed gases of CH_4 and He, and the graphic amorphous carbon particles of 20nm in diameter can be obtained stably.3. Highly accelerating of particlesThe useful acceleration for particles was researched on the following three methods ; 1)Charging by field emission and accelerating by electrostatic force, 2)Charging by secondary electron emission and accelerating by electrostatic force, 3)Accelerating by gas flow from supersonic nozzle. As the results the growth of amorphous carbon film is identified only by the method 1). From the standpoint of efficiency of film growth, however, the methods 2), 3)are superior to the method 1). So we must continually investigate these methods.4. Measuring system for particle velocityIt is found that the high sensitive time-of-flight measuring system designed make possible to measure the velocities of particles spouted from the transfer tube. But for the accurate hyper-velocity measurement, the system must be improved as the time resolution between TOF signals is insufficient.5. Estimation of the synthesizing techniqueWe can systematically combine the three process of synthesizing, transferring, and accelerating particles into one organic system. So the base of the Ultra Fine Particle Beam Deposition system was performed.