Formation of Diamond-Like Carbon Film by Electrostatic Microparticle-Impact-Deposition Using Assistance of Ion Beam and Plasma

(1)磁场和射频电场的辅助作用及沉积DLC膜的特性(A)当仅有磁场辅助时，薄膜的生长速度比目前的直流辅助方法提高了约11.3倍。在外加射频电场的情况下，DLC薄膜的电阻率和温度系数都有所增加，但薄膜的生长速率有所降低。(3)对于薄膜的微观结构与边界摩擦特性之间的关系，在非晶相含量较高的类金刚石薄膜中表现出较强的边界摩擦行为，这可能是由于吸附气体分子的高吸附热所致。(2)离子束辅助作用对微粒子束处理方法的影响，以及成膜机理的研究(A)考察了微粒子带电现象的实验方法，以求微粒子的碰撞能，设计并制造了大电流输出的电子束辐照装置。(2)对于聚集态微粒的粉碎并提供给充电装置的方法，可采用静电粉碎的方法进行充电实验。

(1) Effect of assistance of the magnetic and rf electric fields, and characteristics of the deposited DLC film in microparticle impact coating(a) When assisted with only magnetic field, the film growth rate increased by about 11.3 times compared with the present dc method. In addition of rf field, it increased by about as much as 14.7 times.(b) The resistivity of the DLC film and its temperature coefficient increased by applying of electromagnetic field, though the film growth rate decreased. This suggests microstructure of the film changed into an amorphous phase.(c) As for the relation between the microstructure and the boundary friction characteristic of the film, the behavior of the boundary friction appears strongly in the DLC film with a high content of amorphous phase, which may be due to the high heat of adsorption of adsorbed gas molecule.(2) Effect of assistance of ion beam in the microparticle beam processing method, and the research on film formation mechanism(a) The experimental method to clarify the charging phenomenon of microparticle was examined for evaluating of microparticle impact energy, the electron beam irradiation device having a large stable current output was designed and manufactured.(b) As for the method for making aggromerated microparticles minute and supplying to the charging device, the electrostatic pulverizing method may be used for the charging experiment.