Removal of Fine Particles from Surfaces by Consecutive Pulse Air Jets

本工作旨在开发连续脉冲空气射流干式表面清洗方法。研究了空气射流清洗法对各种平面和颗粒材料的清洗性能。本工作得到的主要结论有：1。沉积过程对颗粒的去除效率影响不大。颗粒阻力与范德华力之比F^*是决定球形颗粒在光滑平面上去除效率的关键参数。带电粒子与表面之间的静电力不影响去除效率，因为它与范德华力相比可以忽略不计。球形颗粒在粗糙表面的去除效率取决于相对于颗粒大小的表面粗糙度。由于颗粒形状的不规则性会影响分离距离和接触面积，因此颗粒形状对去除效率的影响不容忽视。粒径越小，颗粒形状对去除率的影响越显著。

The present work is aimed at developing dry surface cleaning method with consecutive pulse air jet. The performance of air jet cleaning method was studied for various flat surfaces and particle materials. Major conclusion obtained by this work are ;1.Deposition process has little effect on the removal efficiency of particles from wafer.2.The ratio of drag force on particle to van der Waals force, F^*, is the key parameter to determine the removal efficiency of spherical particles from smooth flat surfaces.3.Electrostatic force between charged particles and surface does not affect removal efficiency because it is negligible compared to van der Waals force.4.Removal efficiency of spherical particle from rough surface depends on surface roughness relative to particle size.5.Since irregularity in particle shape affects both separation distance and contact area, the effect of particle shape on removal efficiency is not trivial. However, the influence of particle shape on removal efficiency becomes more significant as particle size decreases.