Microtribology of Super hard films

超硬薄膜的微观摩擦学

• 批准号: 04650072
• 负责人: MIYAKE Shojiro
• 金额: $ 1.22万
• 依托单位: Nippon Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-04650072/
• 关键词: Microtribology; Diamond-like-carbon-film; Diamond film; Ion implantation; Fluorination; Scanning probe microscope; 立方晶窒化ホウ素膜; プラズマ処理; 原子間力顕微鏡

To improve the microtribological properties, super hard films were deposited and investigated. The atomic-scale surface state is very important in microtribology. The require surface material is not usually a self-sacrificing type solid lubricant film but rather a wear-resistant and lubricating film. The surface compositions are thought to reduce atomic-scale wear and friction fluctions. A surface material composition model that feasibly achieves the micro-tribological zero wear is suggested here. Microwear properties of these films were investigated by scanning probe microscope (SPM).The top surfaces of super hard films are modefied to improve the microtribological properties. Superior atomic-scale lubricities are obtained jby reducing the atomic interaction between the sliding surfaces. This requires a material with a low surface energy such as C-F or graphite. Superior wear resistance is obtained by improving the strength of films. Such improvements are made by using super hard materials such as silicon containing carbon film, diamond film or cubic boron nitride film.

为了提高微摩擦性能，制备了超硬膜并对其进行了研究。原子尺度的表面态在微摩擦学中是非常重要的。所需的表面材料通常不是自牺牲型固体润滑膜，而是耐磨润滑膜。表面成分被认为可以减少原子尺度的磨损和摩擦波动。提出了一种能够实现微摩擦学零磨损的表面材料成分模型。利用扫描探针显微镜（SPM）研究了这些薄膜的微磨损性能。对超硬膜的表面进行了改性，以提高微摩擦学性能。优异的原子级润滑性是通过减少滑动表面之间的原子相互作用而获得的。这需要一种表面能低的材料，如碳氟化合物或石墨。通过提高膜的强度获得优异的耐磨性。这种改进是通过使用超硬材料，如含硅碳膜、金刚石膜或立方氮化硼膜来实现的。

项目成果

三宅正二郎他2名: "イオン注入ダイヤモンド薄膜のマイクロトライボロジー特性" トライボロジー会議'93秋名古屋予稿集. 39-43 (1993)

Shojiro Miyake 和其他 2 人：“离子注入金刚石薄膜的微观摩擦学特性”摩擦学会议 93 秋季名古屋会议记录 39-43 (1993)。

S.Miyake et al.: "Tribological improvement of thin carbon layrs by ion beam enhanced depositon(IBED)" Diamond Films and Technology. 3. 167-176 (1994)

S.Miyake 等人：“通过离子束增强沉积（IBED）对薄碳层进行摩擦学改进”金刚石薄膜和技术。

S.Miyake et al.: "Tribological improvement of thin carbon layrs by ion beam Enhanced Depositon(IBED)" 2nd Int1. Conf. on the App1n. of Diamond Films and Related Materials. 649-654 (1993)

S.Miyake 等人：“通过离子束增强沉积 (IBED) 对薄碳层进行摩擦学改进”第 2 届 Int1。

三宅正二郎他4名: "ダイヤモンド膜およびフッ素化ダイヤモンド膜表面のマイクロ摩擦特性" トライボロジー会議'94東京. (発表予定). (1994)

Shojiro Miyake 和其他 4 人：“金刚石膜和氟化金刚石膜表面的微摩擦特性”摩擦学会议 94 东京（预定演讲）（1994 年）。

三宅正二郎他2名: "フッ素化ダイヤモンド薄膜のトライボロジー" トライボロジー会議'93春東京予稿集. 223-226 (1993)

Shojiro Miyake 和其他 2 人：“氟化金刚石薄膜的摩擦学”摩擦学会议 93 春季东京会议记录 223-226 (1993)。