Microtribology of Super hard films

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To improve the microtribological properties, super hard films were deposited and investigated. The atomic-scale surface state is very important in microtribology. The require surface material is not usually a self-sacrificing type solid lubricant film but rather a wear-resistant and lubricating film. The surface compositions are thought to reduce atomic-scale wear and friction fluctions. A surface material composition model that feasibly achieves the micro-tribological zero wear is suggested here. Microwear properties of these films were investigated by scanning probe microscope (SPM).The top surfaces of super hard films are modefied to improve the microtribological properties. Superior atomic-scale lubricities are obtained jby reducing the atomic interaction between the sliding surfaces. This requires a material with a low surface energy such as C-F or graphite. Superior wear resistance is obtained by improving the strength of films. Such improvements are made by using super hard materials such as silicon containing carbon film, diamond film or cubic boron nitride film.